JPS5269578A - Wafer suscepter - Google Patents

Wafer suscepter

Info

Publication number
JPS5269578A
JPS5269578A JP14502475A JP14502475A JPS5269578A JP S5269578 A JPS5269578 A JP S5269578A JP 14502475 A JP14502475 A JP 14502475A JP 14502475 A JP14502475 A JP 14502475A JP S5269578 A JPS5269578 A JP S5269578A
Authority
JP
Japan
Prior art keywords
wafer
suscepter
susceptor
secape
occruring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14502475A
Other languages
Japanese (ja)
Inventor
Yukio Misonoo
Masakuni Akiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14502475A priority Critical patent/JPS5269578A/en
Publication of JPS5269578A publication Critical patent/JPS5269578A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To eliminate displacement occruring at loading of wafer onto susceptor by forming grooves for vapor secape on the surface of semiconductor wafer mounting susceptor which is installed inside reaction furnace.
COPYRIGHT: (C)1977,JPO&Japio
JP14502475A 1975-12-08 1975-12-08 Wafer suscepter Pending JPS5269578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14502475A JPS5269578A (en) 1975-12-08 1975-12-08 Wafer suscepter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14502475A JPS5269578A (en) 1975-12-08 1975-12-08 Wafer suscepter

Publications (1)

Publication Number Publication Date
JPS5269578A true JPS5269578A (en) 1977-06-09

Family

ID=15375652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14502475A Pending JPS5269578A (en) 1975-12-08 1975-12-08 Wafer suscepter

Country Status (1)

Country Link
JP (1) JPS5269578A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5572029A (en) * 1978-11-27 1980-05-30 Nec Corp Tray for semiconductor wafer
JPH0338357U (en) * 1989-08-21 1991-04-12
JPH05166916A (en) * 1991-05-15 1993-07-02 Applied Materials Inc Method and apparatus for cooling wafer
JPH07169824A (en) * 1993-12-13 1995-07-04 Anelva Corp Substrate heating and cooling mechanism
JPH09120987A (en) * 1995-07-10 1997-05-06 Watkins Johnson Co Electrostatic chuck assembly
US6506257B2 (en) 2000-06-01 2003-01-14 Tokyo Electron Limited Single-substrate-processing apparatus for semiconductor process

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5572029A (en) * 1978-11-27 1980-05-30 Nec Corp Tray for semiconductor wafer
JPH0338357U (en) * 1989-08-21 1991-04-12
JPH05166916A (en) * 1991-05-15 1993-07-02 Applied Materials Inc Method and apparatus for cooling wafer
JPH07169824A (en) * 1993-12-13 1995-07-04 Anelva Corp Substrate heating and cooling mechanism
JPH09120987A (en) * 1995-07-10 1997-05-06 Watkins Johnson Co Electrostatic chuck assembly
US5838528A (en) * 1995-07-10 1998-11-17 Watkins-Johnson Company Electrostatic chuck assembly
US6506257B2 (en) 2000-06-01 2003-01-14 Tokyo Electron Limited Single-substrate-processing apparatus for semiconductor process

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