JPS51114764A - Drying furnace - Google Patents
Drying furnaceInfo
- Publication number
- JPS51114764A JPS51114764A JP3910775A JP3910775A JPS51114764A JP S51114764 A JPS51114764 A JP S51114764A JP 3910775 A JP3910775 A JP 3910775A JP 3910775 A JP3910775 A JP 3910775A JP S51114764 A JPS51114764 A JP S51114764A
- Authority
- JP
- Japan
- Prior art keywords
- drying furnace
- drying
- photoregister
- coated
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
PURPOSE: A drying furnace for drying a photoregister coated on a wafer surface of a silicone semiconductor.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3910775A JPS51114764A (en) | 1975-04-02 | 1975-04-02 | Drying furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3910775A JPS51114764A (en) | 1975-04-02 | 1975-04-02 | Drying furnace |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51114764A true JPS51114764A (en) | 1976-10-08 |
JPS5426024B2 JPS5426024B2 (en) | 1979-09-01 |
Family
ID=12543838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3910775A Granted JPS51114764A (en) | 1975-04-02 | 1975-04-02 | Drying furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51114764A (en) |
-
1975
- 1975-04-02 JP JP3910775A patent/JPS51114764A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5426024B2 (en) | 1979-09-01 |
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