JPS5210079A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5210079A
JPS5210079A JP8593775A JP8593775A JPS5210079A JP S5210079 A JPS5210079 A JP S5210079A JP 8593775 A JP8593775 A JP 8593775A JP 8593775 A JP8593775 A JP 8593775A JP S5210079 A JPS5210079 A JP S5210079A
Authority
JP
Japan
Prior art keywords
semiconductor device
silicon
film
chargo
dure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8593775A
Other languages
Japanese (ja)
Other versions
JPS5628376B2 (en
Inventor
Masayoshi Kitamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHIN NIPPON MUSEN KK
New Japan Radio Co Ltd
Japan Radio Co Ltd
Original Assignee
SHIN NIPPON MUSEN KK
New Japan Radio Co Ltd
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHIN NIPPON MUSEN KK, New Japan Radio Co Ltd, Japan Radio Co Ltd filed Critical SHIN NIPPON MUSEN KK
Priority to JP8593775A priority Critical patent/JPS5210079A/en
Publication of JPS5210079A publication Critical patent/JPS5210079A/en
Publication of JPS5628376B2 publication Critical patent/JPS5628376B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To control surface chargo of multi-layer film without aggravation of surface condition of a silicon dure to defects of a silicon oxide film and a silicon nitride film.
COPYRIGHT: (C)1977,JPO&Japio
JP8593775A 1975-07-14 1975-07-14 Semiconductor device Granted JPS5210079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8593775A JPS5210079A (en) 1975-07-14 1975-07-14 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8593775A JPS5210079A (en) 1975-07-14 1975-07-14 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5210079A true JPS5210079A (en) 1977-01-26
JPS5628376B2 JPS5628376B2 (en) 1981-07-01

Family

ID=13872663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8593775A Granted JPS5210079A (en) 1975-07-14 1975-07-14 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5210079A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59161879U (en) * 1984-01-12 1984-10-30 株式会社　大一商会 Pachinko ball detection unit
JPS60122181U (en) * 1984-01-27 1985-08-17 株式会社ソフィア Pachinko machine passing ball detection device
JPS60177876U (en) * 1984-05-07 1985-11-26 株式会社　ソフイア Falling ball detection device for pachinko gaming machines

Also Published As

Publication number Publication date
JPS5628376B2 (en) 1981-07-01

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