JPH1187733A5 - - Google Patents
Info
- Publication number
- JPH1187733A5 JPH1187733A5 JP1997268156A JP26815697A JPH1187733A5 JP H1187733 A5 JPH1187733 A5 JP H1187733A5 JP 1997268156 A JP1997268156 A JP 1997268156A JP 26815697 A JP26815697 A JP 26815697A JP H1187733 A5 JPH1187733 A5 JP H1187733A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor film
- forming
- heat treatment
- amorphous semiconductor
- boron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26815697A JPH1187733A (ja) | 1997-09-11 | 1997-09-11 | 半導体装置の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26815697A JPH1187733A (ja) | 1997-09-11 | 1997-09-11 | 半導体装置の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1187733A JPH1187733A (ja) | 1999-03-30 |
| JPH1187733A5 true JPH1187733A5 (enExample) | 2005-06-02 |
Family
ID=17454687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26815697A Withdrawn JPH1187733A (ja) | 1997-09-11 | 1997-09-11 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1187733A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000208771A (ja) | 1999-01-11 | 2000-07-28 | Hitachi Ltd | 半導体装置、液晶表示装置およびこれらの製造方法 |
| US6512504B1 (en) | 1999-04-27 | 2003-01-28 | Semiconductor Energy Laborayory Co., Ltd. | Electronic device and electronic apparatus |
| TW473800B (en) | 1999-12-28 | 2002-01-21 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
| US6865093B2 (en) | 2003-05-27 | 2005-03-08 | Power Integrations, Inc. | Electronic circuit control element with tap element |
| JP4884735B2 (ja) * | 2005-09-16 | 2012-02-29 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
-
1997
- 1997-09-11 JP JP26815697A patent/JPH1187733A/ja not_active Withdrawn
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