JPH1183886A - 静電容量型マイクロフローセンサ及び静電容量型マイクロフローセンサの製造方法並びに静電容量型マイクロフローセンサの外付け用固定具 - Google Patents

静電容量型マイクロフローセンサ及び静電容量型マイクロフローセンサの製造方法並びに静電容量型マイクロフローセンサの外付け用固定具

Info

Publication number
JPH1183886A
JPH1183886A JP26292497A JP26292497A JPH1183886A JP H1183886 A JPH1183886 A JP H1183886A JP 26292497 A JP26292497 A JP 26292497A JP 26292497 A JP26292497 A JP 26292497A JP H1183886 A JPH1183886 A JP H1183886A
Authority
JP
Japan
Prior art keywords
substrate
electrode
sub
main
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26292497A
Other languages
English (en)
Japanese (ja)
Inventor
Yoshitaka Kanai
義隆 金井
Masanori Amemori
雅典 雨森
Jun Mizuno
潤 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosch Corp
Original Assignee
Zexel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zexel Corp filed Critical Zexel Corp
Priority to JP26292497A priority Critical patent/JPH1183886A/ja
Priority to PCT/JP1997/003398 priority patent/WO1999013342A1/fr
Priority to DE19781747T priority patent/DE19781747T1/de
Publication of JPH1183886A publication Critical patent/JPH1183886A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/14—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring differences of pressure in the fluid

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Weting (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Volume Flow (AREA)
JP26292497A 1997-09-11 1997-09-11 静電容量型マイクロフローセンサ及び静電容量型マイクロフローセンサの製造方法並びに静電容量型マイクロフローセンサの外付け用固定具 Pending JPH1183886A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP26292497A JPH1183886A (ja) 1997-09-11 1997-09-11 静電容量型マイクロフローセンサ及び静電容量型マイクロフローセンサの製造方法並びに静電容量型マイクロフローセンサの外付け用固定具
PCT/JP1997/003398 WO1999013342A1 (fr) 1997-09-11 1997-09-25 Detecteur capacitif de microdebit, son procede de fabrication et son accessoire de fixation exterieure
DE19781747T DE19781747T1 (de) 1997-09-11 1997-09-25 Elektrischer Kapazitätsmikroströmungssensor, Herstellung für einen elektrischenKapazitätsmikroströmungssensor undaußen passende Halterung für den elektrischen Kapazitätsmikroströmungssensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26292497A JPH1183886A (ja) 1997-09-11 1997-09-11 静電容量型マイクロフローセンサ及び静電容量型マイクロフローセンサの製造方法並びに静電容量型マイクロフローセンサの外付け用固定具

Publications (1)

Publication Number Publication Date
JPH1183886A true JPH1183886A (ja) 1999-03-26

Family

ID=17382490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26292497A Pending JPH1183886A (ja) 1997-09-11 1997-09-11 静電容量型マイクロフローセンサ及び静電容量型マイクロフローセンサの製造方法並びに静電容量型マイクロフローセンサの外付け用固定具

Country Status (3)

Country Link
JP (1) JPH1183886A (fr)
DE (1) DE19781747T1 (fr)
WO (1) WO1999013342A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001168350A (ja) * 1999-12-09 2001-06-22 Fuji Electric Co Ltd 静電容量式圧力センサとその製造方法
JP2006071501A (ja) * 2004-09-02 2006-03-16 Canon Anelva Technix Corp 静電容量型圧力センサ
KR100581137B1 (ko) 2004-02-27 2006-05-16 오므론 가부시키가이샤 유속 측정 장치
JP4851036B2 (ja) * 1999-07-13 2012-01-11 アイオーエヌ ジオフィジカル コーポレーション 併合マスクの微細加工プロセス
US9321627B2 (en) 2014-03-18 2016-04-26 Seiko Epson Corporation Electronic device, electronic module, electronic apparatus, and moving object
US9829505B2 (en) 2014-03-18 2017-11-28 Seiko Epson Corporation Electronic device, electronic apparatus, and moving object
CN111999572A (zh) * 2020-06-22 2020-11-27 重庆大学 基于区间电容式传感器的电力设备气液两相流体多参量在线监测装置及方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10058378C2 (de) * 2000-11-24 2003-04-30 Fraunhofer Ges Forschung Vorrichtung zur Überwachung der Fluiddurchflußrate in einer Fluidleitung
EP3112819B1 (fr) * 2015-06-30 2020-03-11 Commissariat A L'energie Atomique Et Aux Energies Alternatives Débitmètre miniature à pression différentielle

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60262014A (ja) * 1984-06-08 1985-12-25 Ryoichi Endo 流量検知方法
JPH02195941A (ja) * 1989-01-25 1990-08-02 Yamatake Honeywell Co Ltd 呼吸気流量計
FR2687783B1 (fr) * 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur de pression.
JPH07167725A (ja) * 1993-12-14 1995-07-04 Yazaki Corp 静電容量型圧力センサとその製造方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4851036B2 (ja) * 1999-07-13 2012-01-11 アイオーエヌ ジオフィジカル コーポレーション 併合マスクの微細加工プロセス
JP2001168350A (ja) * 1999-12-09 2001-06-22 Fuji Electric Co Ltd 静電容量式圧力センサとその製造方法
KR100581137B1 (ko) 2004-02-27 2006-05-16 오므론 가부시키가이샤 유속 측정 장치
JP2006071501A (ja) * 2004-09-02 2006-03-16 Canon Anelva Technix Corp 静電容量型圧力センサ
JP4542397B2 (ja) * 2004-09-02 2010-09-15 キヤノンアネルバ株式会社 静電容量型圧力センサの製造方法
US9321627B2 (en) 2014-03-18 2016-04-26 Seiko Epson Corporation Electronic device, electronic module, electronic apparatus, and moving object
US9829505B2 (en) 2014-03-18 2017-11-28 Seiko Epson Corporation Electronic device, electronic apparatus, and moving object
CN111999572A (zh) * 2020-06-22 2020-11-27 重庆大学 基于区间电容式传感器的电力设备气液两相流体多参量在线监测装置及方法
CN111999572B (zh) * 2020-06-22 2023-03-31 重庆大学 基于区间电容式传感器的电力设备气液两相流体多参量在线监测装置及方法

Also Published As

Publication number Publication date
WO1999013342A1 (fr) 1999-03-18
DE19781747T1 (de) 1999-09-30

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