JPH1167978A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH1167978A
JPH1167978A JP9229694A JP22969497A JPH1167978A JP H1167978 A JPH1167978 A JP H1167978A JP 9229694 A JP9229694 A JP 9229694A JP 22969497 A JP22969497 A JP 22969497A JP H1167978 A JPH1167978 A JP H1167978A
Authority
JP
Japan
Prior art keywords
semiconductor device
sealing resin
lead frame
package
semiconductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9229694A
Other languages
Japanese (ja)
Inventor
Mayumi Tsuchida
真由美 土田
Norio Koutou
詔夫 杭東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9229694A priority Critical patent/JPH1167978A/en
Publication of JPH1167978A publication Critical patent/JPH1167978A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

Abstract

PROBLEM TO BE SOLVED: To improve reliability in moisture-resistance and mounting characteristics by reducing a package in size. SOLUTION: A semiconductor element 1 is bonded to a die pad 2 of a lead frame 4 with a bonding agent 3, while using a wire 5, the semiconductor element 1 is connected to an inner lead 4a of the lead frame 4. After that, the package of an entire device is formed of a sealing resin 6 such as an epoxy group resin. Here, a projection part 10 is formed around the center of the bottom surface of the sealing resin 6, and on both sides of the projection part 10, only the bottom surface in an outer lead 4b of the lead frame 4 is exposed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、半導体装置に係
り、特にその外形とパッケージの構成に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly, to a semiconductor device and a package structure.

【0002】[0002]

【従来の技術】従来より、半導体素子におけるパッケー
ジの構成に関する技術として数種のものが知られてい
る。図3〜図5は従来の半導体装置の構成を説明するた
めの断面図であり、各図において、1は半導体素子、2
はリードフレーム4のダイパッド、そしてダイパッド2
は接着剤3によって半導体素子1と接着される。5はリ
ードフレーム4におけるインナーリード部4aと半導体
素子1とを接続するワイヤー、6は半導体素子1,リー
ドフレーム4,ワイヤー5を全体的に覆うパッケージと
しての封止用樹脂であって、4bはリードフレーム4を
外部に導出する部位であるアウターリード(外部端子)部
である。
2. Description of the Related Art Heretofore, there have been known several kinds of techniques relating to the structure of a package in a semiconductor device. 3 to 5 are cross-sectional views illustrating the configuration of a conventional semiconductor device. In each of the drawings, reference numeral 1 denotes a semiconductor element;
Is the die pad of lead frame 4 and die pad 2
Is bonded to the semiconductor element 1 by the adhesive 3. Reference numeral 5 denotes a wire for connecting the inner lead portion 4a of the lead frame 4 to the semiconductor element 1, reference numeral 6 denotes a sealing resin as a package that entirely covers the semiconductor element 1, the lead frame 4, and the wire 5, and reference numeral 4b denotes a resin. It is an outer lead (external terminal) portion that leads the lead frame 4 to the outside.

【0003】そして、図3に示す半導体装置おいては、
通常のQFP(Quad Flad L-LeadedPackage)やSOP(Sm
all Outline L-Leaded Package)のごとく、アウターリ
ード部4bは封止用樹脂6の側面から引き出され、アウ
ターリード部4bの端部が曲げ加工されて、その端面が
封止用樹脂6の底面よりも少し下面に位置するように設
けられている。
In the semiconductor device shown in FIG.
Normal QFP (Quad Flad L-Leaded Package) or SOP (Sm
As in all Outline L-Leaded Package), the outer lead portion 4b is pulled out from the side surface of the sealing resin 6, the end portion of the outer lead portion 4b is bent, and the end surface is formed from the bottom surface of the sealing resin 6. Is also provided slightly below.

【0004】図4に示す半導体装置おいては、インナー
リード部4aを少し下に曲げて、封止用樹脂6の底面に
おける端部にアウターリード部4bを露出するようにし
ている。
[0004] In the semiconductor device shown in FIG. 4, the inner lead portion 4 a is bent slightly downward so that the outer lead portion 4 b is exposed at the end of the bottom surface of the sealing resin 6.

【0005】図5に示す半導体装置おいては、封止用樹
脂6の底面にダイパッド2の裏面と、アウターリード部
4bを含むリードフレーム4の底面全体を露出するように
している。
In the semiconductor device shown in FIG. 5, the back surface of the die pad 2 and the outer lead portion
The entire bottom surface of the lead frame 4 including the lead frame 4b is exposed.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上記の
ような従来の半導体装置のパッケージ、すなわち封止用
樹脂6の構造においては、下記のような問題があった。
However, the conventional semiconductor device package as described above, that is, the structure of the sealing resin 6, has the following problems.

【0007】すなわち、図3に示す半導体装置では、パ
ッケージサイズが大きくなるという問題があり、また、
図4に示す半導体装置では、インナーリード部4aを曲
げる必要があり、さらに本装置をプリント基板に半田付
けする際に、パッケージ底面が平坦な面であるため、余
分な半田の逃げ場がなく、ショート不良の原因となって
いた。さらに、図5においては、小型化には適している
が前記と同様に半田の逃げ場がないことと、ダイパット
裏面も露出しているためダイパット側面からの水分が入
りやすく耐湿性に問題があった。
That is, the semiconductor device shown in FIG. 3 has a problem that the package size becomes large.
In the semiconductor device shown in FIG. 4, it is necessary to bend the inner lead portion 4a, and when soldering this device to a printed circuit board, since the bottom surface of the package is a flat surface, there is no escape area for extra solder, and there is no short circuit. It was the cause of the failure. Further, in FIG. 5, there is no escape for solder as described above, which is suitable for miniaturization, and since the back surface of the die pad is also exposed, there is a problem in that moisture from the side surface of the die pad easily enters and moisture resistance is high. .

【0008】そして上記の問題は、近年において、集積
度を増す半導体集積回路にあって、より重要な問題とな
り、また実装信頼性の向上が要望される中でその解決が
強く望まれている。
The above-mentioned problem has become more important in recent years in semiconductor integrated circuits with an increasing degree of integration, and there is a strong demand for an improvement in mounting reliability while demands for improvement in mounting reliability are increasing.

【0009】本発明は、前記従来の問題を解決するもの
であり、パッケージが小型化し、耐湿性に優れ、しかも
実装上の信頼性が向上する半導体装置を提供することを
目的とする。
An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a semiconductor device in which a package is reduced in size, excellent in moisture resistance and improved in mounting reliability.

【0010】[0010]

【課題を解決するための手段】前記目的を達成するた
め、本発明は、封止用樹脂の底面を突起させて、封止用
樹脂の底面とリードフレームにおけるアウターリード部
分とに段差を設け、封止用樹脂の底面においてアウター
リード部分の底面のみを露出させたものであり、この構
成によって、封止用樹脂によるパッケージの小型化が図
れ、アウターリード部分の底面のみを露出させたことに
よって耐湿性が向上し、しかも封止用樹脂の突起を利用
することにより、プリント基板への実装上の信頼性を向
上させることができる半導体装置を提供することが可能
になる。
In order to achieve the above object, the present invention provides a method in which a bottom surface of a sealing resin is projected to provide a step between the bottom surface of the sealing resin and an outer lead portion of a lead frame. Only the bottom surface of the outer lead portion is exposed on the bottom surface of the sealing resin. With this configuration, the size of the package can be reduced by using the sealing resin. By using the projections of the sealing resin, the semiconductor device can be provided with improved reliability and reliability in mounting on a printed circuit board.

【0011】[0011]

【発明の実施の形態】本発明の請求項1記載の発明は、
リードフレームのダイパッド上に半導体素子を接着剤に
よって固定し、半導体素子をリードフレームのインナー
リード部分にワイヤーによって接続して、全体を封止用
樹脂によって覆ってなる半導体装置であって、前記封止
用樹脂の底面を突起させて、封止用樹脂の底面と前記リ
ードフレームのアウターリード部分とに段差を設け、前
記封止用樹脂の底面において前記アウターリード部分の
底面のみを露出させたことを特徴とし、この構成によっ
て、封止用樹脂によるパッケージを小型化することがで
き、しかもダイパッドとインナーリード部分がパッケー
ジによって覆われるため、当該部材の防湿性が向上し、
さらにプリント基板への半田付けもアウターリード部分
とパッケージ間に段差が存在するためショート不良にな
りにくく、実装時にその段差部分の突起を位置基準など
に使用することによって、実装の整合性が高まる。
BEST MODE FOR CARRYING OUT THE INVENTION
A semiconductor device comprising: fixing a semiconductor element on a die pad of a lead frame by an adhesive; connecting the semiconductor element to an inner lead portion of the lead frame by a wire; and covering the whole with a sealing resin. Projecting the bottom surface of the sealing resin, providing a step between the bottom surface of the sealing resin and the outer lead portion of the lead frame, and exposing only the bottom surface of the outer lead portion on the bottom surface of the sealing resin. Characteristically, with this configuration, the package made of the sealing resin can be miniaturized, and the die pad and the inner lead portion are covered by the package, so that the moisture resistance of the member is improved,
Further, soldering to a printed circuit board is unlikely to cause a short circuit failure due to the presence of a step between the outer lead portion and the package, and the mounting consistency is improved by using the projection of the step portion as a position reference during mounting.

【0012】以下、本発明の実施形態を図面を用いて詳
細に説明する。なお、図3〜図5に基づいて説明した部
材に対応する部材には同一符号を付して詳しい説明は省
略する。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Members corresponding to those described with reference to FIGS. 3 to 5 are denoted by the same reference numerals, and detailed description is omitted.

【0013】図1は本発明の一実施形態を説明するため
の半導体装置の断面図であり、具体例として、3.5mm×
3.5mmの半導体素子1を、銀ペーストの接着剤3によっ
て、4.0mm×4.0mmのリードフレーム4のダイパッド2に
接着する。そして直径25μmの金線からなるワイヤー5
を用いて半導体素子1とリードフレーム4のインナーリ
ード4aとを接続する。その後、エポキシ系樹脂などの
封止用樹脂6によって装置全体のパッケージを形成する
ためトランスファ成型を行う。
FIG. 1 is a cross-sectional view of a semiconductor device for explaining one embodiment of the present invention.
A 3.5 mm semiconductor element 1 is bonded to a 4.0 mm × 4.0 mm lead frame 4 die pad 2 by a silver paste adhesive 3. And a wire 5 consisting of a gold wire with a diameter of 25 μm
Is used to connect the semiconductor element 1 to the inner lead 4a of the lead frame 4. Thereafter, transfer molding is performed to form a package of the entire device using a sealing resin 6 such as an epoxy resin.

【0014】このとき、封止用樹脂6の底面の略中央に
突起部10が形成されるようにする。その本例では突起部
10を幅5.5mm×長さ5.5mm,高さ0.2mmと設定した。突起
部10の両側におけるリードフレーム4のアウターリード
4bの底面における露出長さSは封止用樹脂6の端面か
ら0.65mmとなった。そして、封止用樹脂6の端面よりは
み出したアウターリード4bを金型にて切断することに
よって、図1に示すような半導体装置が得られる。
At this time, the projection 10 is formed substantially at the center of the bottom surface of the sealing resin 6. In this example, the protrusion
10 was set to 5.5 mm wide x 5.5 mm long and 0.2 mm high. The exposed length S on the bottom surface of the outer lead 4b of the lead frame 4 on both sides of the protrusion 10 was 0.65 mm from the end surface of the sealing resin 6. Then, the outer lead 4b protruding from the end face of the sealing resin 6 is cut by a mold, whereby the semiconductor device as shown in FIG. 1 is obtained.

【0015】なお、リードフレーム4のインナーリード
4aとアウターリード4bに対する外装メッキとしてパラ
ジウムメッキなどを施すが、これに限定されず、例えば
インナーリード4aには銀メッキを施し、アウターリー
ド4bには半田メッキを行ったものを用いてもよい。
The inner lead 4a and the outer lead 4b of the lead frame 4 are plated with palladium as an exterior plating, but are not limited thereto. For example, the inner lead 4a is plated with silver and the outer lead 4b is soldered. Plated material may be used.

【0016】図2は図1に示す半導体装置をプリント基
板に実装したときの状態を説明するための断面図であ
り、20はプリント基板、21はプリント基板20に設けられ
た凹部、22はプリント基板20の表面に設けられた電極、
23は半田ペーストである。
FIG. 2 is a cross-sectional view for explaining a state in which the semiconductor device shown in FIG. 1 is mounted on a printed circuit board. Reference numeral 20 denotes a printed circuit board; 21, a concave portion provided on the printed circuit board 20; An electrode provided on the surface of the substrate 20,
23 is a solder paste.

【0017】プリント基板20において、図1に示す半導
体装置における突起部10が、プリント基板20の上面に当
たらないように、幅6.0mm,長さ6.0mm,深さ0.22mmの凹
部21を予め設け、そのプリント基板20の電極22に半田ペ
ースト23をスクリーン印刷によって塗布する。そして図
1に示す半導体装置を位置合わせをしてプリント基板20
に搭載する。しかる後、エアーリフローによって半田付
けを行い、半導体装置のアウターリード4bとプリント
基板20の電極22とを電気的に接続かつ固定させることに
よって実装が完了する。
On the printed circuit board 20, a recess 21 having a width of 6.0 mm, a length of 6.0 mm and a depth of 0.22 mm is provided in advance so that the projection 10 in the semiconductor device shown in FIG. Then, a solder paste 23 is applied to the electrodes 22 of the printed circuit board 20 by screen printing. Then, the semiconductor device shown in FIG.
To be mounted on. Thereafter, soldering is performed by air reflow, and the outer leads 4b of the semiconductor device and the electrodes 22 of the printed circuit board 20 are electrically connected and fixed to complete the mounting.

【0018】[0018]

【発明の効果】以上説明したように、本発明に係わる半
導体装置によれば、パッケージが小型化できるととも
に、ダイパッドおよびインナーリードの先端が樹脂で覆
われるため耐湿性を十分に確保することができる。
As described above, according to the semiconductor device of the present invention, the package can be reduced in size, and the tip of the die pad and the inner lead is covered with the resin, so that sufficient moisture resistance can be ensured. .

【0019】また、実装時のプリント基板における半田
付けもアウターリードとパッケージ間には突起部による
段差があるため、ショート不良になりにくく、さらに凹
部を持つプリント基板との組み合わせによって、整合性
の良い実装が可能になるなどの実用的な効果が大であ
る。
In addition, soldering on the printed circuit board at the time of mounting has a step due to the projection between the outer lead and the package, so that a short circuit is unlikely to occur. Practical effects such as mounting are possible.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態を説明するための半導体装
置の断面図である。
FIG. 1 is a cross-sectional view of a semiconductor device for describing an embodiment of the present invention.

【図2】図1に示す半導体装置をプリント基板に実装し
たときの状態を説明するための断面図である。
FIG. 2 is a cross-sectional view for explaining a state when the semiconductor device shown in FIG. 1 is mounted on a printed circuit board.

【図3】従来の半導体装置の構成を説明するための断面
図である。
FIG. 3 is a cross-sectional view illustrating a configuration of a conventional semiconductor device.

【図4】従来の半導体装置の構成を説明するための断面
図である。
FIG. 4 is a cross-sectional view illustrating a configuration of a conventional semiconductor device.

【図5】従来の半導体装置の構成を説明するための断面
図である。
FIG. 5 is a cross-sectional view illustrating a configuration of a conventional semiconductor device.

【符号の説明】[Explanation of symbols]

1…半導体素子、 2…ダイパッド、 3…接着剤、
4…リードフレーム、4a…インナーリード、 4b…ア
ウターリード、 5…ワイヤー、 6…封止用樹脂、
10…封止用樹脂の突起部、 20…プリント基板、 21…
プリント基板の凹部、 22…電極、 23…半田ペース
ト。
1 ... semiconductor element, 2 ... die pad, 3 ... adhesive,
4: Lead frame, 4a: inner lead, 4b: outer lead, 5: wire, 6: resin for sealing,
10 ... protrusion of sealing resin, 20 ... printed circuit board, 21 ...
Concave part of printed circuit board, 22 ... electrode, 23 ... solder paste.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 リードフレームのダイパッド上に半導体
素子を接着剤によって固定し、半導体素子をリードフレ
ームのインナーリード部分にワイヤーによって接続し
て、全体を封止用樹脂によって覆ってなる半導体装置で
あって、前記封止用樹脂の底面を突起させて、封止用樹
脂の底面と前記リードフレームのアウターリード部分と
に段差を設け、前記封止用樹脂の底面において前記アウ
ターリード部分の底面のみを露出させたことを特徴とす
る半導体装置。
1. A semiconductor device comprising a semiconductor element fixed on a die pad of a lead frame by an adhesive, the semiconductor element connected to an inner lead portion of the lead frame by a wire, and the whole covered with a sealing resin. By projecting the bottom surface of the sealing resin, a step is provided between the bottom surface of the sealing resin and the outer lead portion of the lead frame, and only the bottom surface of the outer lead portion is formed on the bottom surface of the sealing resin. A semiconductor device characterized by being exposed.
JP9229694A 1997-08-26 1997-08-26 Semiconductor device Pending JPH1167978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9229694A JPH1167978A (en) 1997-08-26 1997-08-26 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9229694A JPH1167978A (en) 1997-08-26 1997-08-26 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH1167978A true JPH1167978A (en) 1999-03-09

Family

ID=16896252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9229694A Pending JPH1167978A (en) 1997-08-26 1997-08-26 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH1167978A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6753599B2 (en) 2001-02-12 2004-06-22 Samsung Electronics Co., Ltd. Semiconductor package and mounting structure on substrate thereof and stack structure thereof
JP2015056540A (en) * 2013-09-12 2015-03-23 株式会社東芝 Semiconductor device and manufacturing method of the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6753599B2 (en) 2001-02-12 2004-06-22 Samsung Electronics Co., Ltd. Semiconductor package and mounting structure on substrate thereof and stack structure thereof
JP2015056540A (en) * 2013-09-12 2015-03-23 株式会社東芝 Semiconductor device and manufacturing method of the same

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