JPH11317336A - 集積回路デバイス製造のための装置と方法 - Google Patents

集積回路デバイス製造のための装置と方法

Info

Publication number
JPH11317336A
JPH11317336A JP11055603A JP5560399A JPH11317336A JP H11317336 A JPH11317336 A JP H11317336A JP 11055603 A JP11055603 A JP 11055603A JP 5560399 A JP5560399 A JP 5560399A JP H11317336 A JPH11317336 A JP H11317336A
Authority
JP
Japan
Prior art keywords
lot
wafer
controller
box
wafer stepper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP11055603A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11317336A5 (enExample
Inventor
Kevin K Funk
ケビン・ケー・ファンク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of JPH11317336A publication Critical patent/JPH11317336A/ja
Publication of JPH11317336A5 publication Critical patent/JPH11317336A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11055603A 1998-03-04 1999-03-03 集積回路デバイス製造のための装置と方法 Withdrawn JPH11317336A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US034967 1993-03-22
US09/034,967 US6136614A (en) 1998-03-04 1998-03-04 Apparatus and method for manufacturing integrated circuit devices

Publications (2)

Publication Number Publication Date
JPH11317336A true JPH11317336A (ja) 1999-11-16
JPH11317336A5 JPH11317336A5 (enExample) 2006-04-20

Family

ID=21879784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11055603A Withdrawn JPH11317336A (ja) 1998-03-04 1999-03-03 集積回路デバイス製造のための装置と方法

Country Status (2)

Country Link
US (2) US6136614A (enExample)
JP (1) JPH11317336A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6398429B1 (en) * 1999-03-15 2002-06-04 Tokyo Electron Limited Developing method and developing apparatus
US6351684B1 (en) * 2000-09-19 2002-02-26 Advanced Micro Devices, Inc. Mask identification database server
JP2002270667A (ja) * 2001-03-12 2002-09-20 Sony Corp 半導体製造方法及び半導体製造装置
TW533468B (en) * 2002-04-02 2003-05-21 Macronix Int Co Ltd Yield monitoring and analysis system and method
US7477959B2 (en) * 2002-06-26 2009-01-13 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist system
KR100735027B1 (ko) * 2006-01-03 2007-07-03 삼성전자주식회사 레티클 식별장치와 이를 구비한 노광설비 및 노광방법
US9987747B2 (en) * 2016-05-24 2018-06-05 Semes Co., Ltd. Stocker for receiving cassettes and method of teaching a stocker robot disposed therein
KR102813793B1 (ko) * 2021-03-30 2025-05-27 텐센트 테크놀로지(센젠) 컴퍼니 리미티드 포토레지스트 제거 방법 및 포토레지스트 제거 시스템

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1534248A (en) * 1976-03-31 1978-11-29 Tokyo Shibaura Electric Co Apparatus for manufacturing semiconductor devices
US4636634A (en) * 1984-08-28 1987-01-13 Veeco Integrated Automation, Inc. Apparatus with intelligent bins indicating the presence and identity of stored coded articles
JPS63232921A (ja) * 1987-03-19 1988-09-28 Toshiba Corp 製造方法及び装置
US4833306A (en) * 1988-05-18 1989-05-23 Fluoroware, Inc. Bar code remote recognition system for process carriers of wafer disks
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products
JP2802678B2 (ja) * 1990-09-26 1998-09-24 リンテック株式会社 レチクルケースのバーコード貼着装置
US5570293A (en) * 1990-11-29 1996-10-29 Tokyo Seimitsu Co., Ltd. Method and device for manufacturing a semiconductor chip
US5668056A (en) * 1990-12-17 1997-09-16 United Microelectronics Corporation Single semiconductor wafer transfer method and manufacturing system
US5442561A (en) * 1992-05-12 1995-08-15 Nippon Telegraph And Telephone Corporation Production management system and its application method
US5325582A (en) * 1992-10-19 1994-07-05 Trw Inc. Multi-function workstation for assembly and repair of printed wiring board assemblies
JPH06143103A (ja) * 1992-10-29 1994-05-24 Pfu Ltd 混流生産システムとそのシステムに使用されるパレット
US5432702A (en) * 1994-06-17 1995-07-11 Advanced Micro Devices Inc. Bar code recipe selection system using workstation controllers
US5567927A (en) * 1994-07-25 1996-10-22 Texas Instruments Incorporated Apparatus for semiconductor wafer identification
JPH0878882A (ja) * 1994-09-02 1996-03-22 Fuji Mach Mfg Co Ltd 対回路基板トランスファ作業装置
JP3347528B2 (ja) * 1995-05-23 2002-11-20 キヤノン株式会社 半導体製造装置
US5814829A (en) * 1995-07-11 1998-09-29 Qc Optics, Inc. Multistation surface inspection system
US5751581A (en) * 1995-11-13 1998-05-12 Advanced Micro Devices Material movement server
KR100217327B1 (ko) * 1996-07-30 1999-10-01 윤종용 반도체장치 콘택 오픈 검사 방법
JPH10177051A (ja) * 1996-12-19 1998-06-30 Asahi Chem Ind Co Ltd 電磁波発生装置
KR0174997B1 (ko) * 1996-12-20 1999-03-20 김광호 노광설비의 이중노광 방지장치
US5828989A (en) * 1997-01-22 1998-10-27 Advanced Micro Devices, Inc. Semiconductor manufacturing system having a bar-code interface
US5942739A (en) * 1997-01-22 1999-08-24 Advanced Micro Devices, Inc. Process timer monitor
US5883374A (en) * 1997-03-27 1999-03-16 Advanced Micro Devices, Inc. Scanning system for identifying wafers in semiconductor process tool chambers
US6000830A (en) * 1997-04-18 1999-12-14 Tokyo Electron Limited System for applying recipe of semiconductor manufacturing apparatus
JPH10303480A (ja) * 1997-04-24 1998-11-13 Amada Eng Center:Kk 固体レーザー発振器
US6138058A (en) * 1998-01-06 2000-10-24 Jenoptik Infab, Inc. Method for electronically tracking containers to avoid misprocessing of contents
US6265684B1 (en) * 1999-10-28 2001-07-24 Promos Technologies Inc. Wafer ID optical sorting system

Also Published As

Publication number Publication date
US6819968B1 (en) 2004-11-16
US6136614A (en) 2000-10-24

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