JPH11317336A5 - - Google Patents

Info

Publication number
JPH11317336A5
JPH11317336A5 JP1999055603A JP5560399A JPH11317336A5 JP H11317336 A5 JPH11317336 A5 JP H11317336A5 JP 1999055603 A JP1999055603 A JP 1999055603A JP 5560399 A JP5560399 A JP 5560399A JP H11317336 A5 JPH11317336 A5 JP H11317336A5
Authority
JP
Japan
Prior art keywords
manufacturing process
station
human interface
interface device
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1999055603A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11317336A (ja
Filing date
Publication date
Priority claimed from US09/034,967 external-priority patent/US6136614A/en
Application filed filed Critical
Publication of JPH11317336A publication Critical patent/JPH11317336A/ja
Publication of JPH11317336A5 publication Critical patent/JPH11317336A5/ja
Withdrawn legal-status Critical Current

Links

JP11055603A 1998-03-04 1999-03-03 集積回路デバイス製造のための装置と方法 Withdrawn JPH11317336A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US034967 1993-03-22
US09/034,967 US6136614A (en) 1998-03-04 1998-03-04 Apparatus and method for manufacturing integrated circuit devices

Publications (2)

Publication Number Publication Date
JPH11317336A JPH11317336A (ja) 1999-11-16
JPH11317336A5 true JPH11317336A5 (enExample) 2006-04-20

Family

ID=21879784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11055603A Withdrawn JPH11317336A (ja) 1998-03-04 1999-03-03 集積回路デバイス製造のための装置と方法

Country Status (2)

Country Link
US (2) US6136614A (enExample)
JP (1) JPH11317336A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6398429B1 (en) 1999-03-15 2002-06-04 Tokyo Electron Limited Developing method and developing apparatus
US6351684B1 (en) * 2000-09-19 2002-02-26 Advanced Micro Devices, Inc. Mask identification database server
JP2002270667A (ja) * 2001-03-12 2002-09-20 Sony Corp 半導体製造方法及び半導体製造装置
TW533468B (en) * 2002-04-02 2003-05-21 Macronix Int Co Ltd Yield monitoring and analysis system and method
US7477959B2 (en) * 2002-06-26 2009-01-13 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist system
KR100735027B1 (ko) * 2006-01-03 2007-07-03 삼성전자주식회사 레티클 식별장치와 이를 구비한 노광설비 및 노광방법
US9987747B2 (en) * 2016-05-24 2018-06-05 Semes Co., Ltd. Stocker for receiving cassettes and method of teaching a stocker robot disposed therein
EP4095605B1 (en) * 2021-03-30 2023-11-29 Tencent Technology (Shenzhen) Company Limited Photoresist removal method and photoresist removal system

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1534248A (en) * 1976-03-31 1978-11-29 Tokyo Shibaura Electric Co Apparatus for manufacturing semiconductor devices
US4636634A (en) * 1984-08-28 1987-01-13 Veeco Integrated Automation, Inc. Apparatus with intelligent bins indicating the presence and identity of stored coded articles
JPS63232921A (ja) * 1987-03-19 1988-09-28 Toshiba Corp 製造方法及び装置
US4833306A (en) * 1988-05-18 1989-05-23 Fluoroware, Inc. Bar code remote recognition system for process carriers of wafer disks
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products
JP2802678B2 (ja) * 1990-09-26 1998-09-24 リンテック株式会社 レチクルケースのバーコード貼着装置
US5570293A (en) * 1990-11-29 1996-10-29 Tokyo Seimitsu Co., Ltd. Method and device for manufacturing a semiconductor chip
US5668056A (en) * 1990-12-17 1997-09-16 United Microelectronics Corporation Single semiconductor wafer transfer method and manufacturing system
US5442561A (en) * 1992-05-12 1995-08-15 Nippon Telegraph And Telephone Corporation Production management system and its application method
US5325582A (en) * 1992-10-19 1994-07-05 Trw Inc. Multi-function workstation for assembly and repair of printed wiring board assemblies
JPH06143103A (ja) * 1992-10-29 1994-05-24 Pfu Ltd 混流生産システムとそのシステムに使用されるパレット
US5432702A (en) * 1994-06-17 1995-07-11 Advanced Micro Devices Inc. Bar code recipe selection system using workstation controllers
US5567927A (en) * 1994-07-25 1996-10-22 Texas Instruments Incorporated Apparatus for semiconductor wafer identification
JPH0878882A (ja) * 1994-09-02 1996-03-22 Fuji Mach Mfg Co Ltd 対回路基板トランスファ作業装置
JP3347528B2 (ja) * 1995-05-23 2002-11-20 キヤノン株式会社 半導体製造装置
US5814829A (en) * 1995-07-11 1998-09-29 Qc Optics, Inc. Multistation surface inspection system
US5751581A (en) * 1995-11-13 1998-05-12 Advanced Micro Devices Material movement server
KR100217327B1 (ko) * 1996-07-30 1999-10-01 윤종용 반도체장치 콘택 오픈 검사 방법
JPH10177051A (ja) * 1996-12-19 1998-06-30 Asahi Chem Ind Co Ltd 電磁波発生装置
KR0174997B1 (ko) * 1996-12-20 1999-03-20 김광호 노광설비의 이중노광 방지장치
US5828989A (en) * 1997-01-22 1998-10-27 Advanced Micro Devices, Inc. Semiconductor manufacturing system having a bar-code interface
US5942739A (en) * 1997-01-22 1999-08-24 Advanced Micro Devices, Inc. Process timer monitor
US5883374A (en) * 1997-03-27 1999-03-16 Advanced Micro Devices, Inc. Scanning system for identifying wafers in semiconductor process tool chambers
US6000830A (en) * 1997-04-18 1999-12-14 Tokyo Electron Limited System for applying recipe of semiconductor manufacturing apparatus
JPH10303480A (ja) * 1997-04-24 1998-11-13 Amada Eng Center:Kk 固体レーザー発振器
US6138058A (en) * 1998-01-06 2000-10-24 Jenoptik Infab, Inc. Method for electronically tracking containers to avoid misprocessing of contents
US6265684B1 (en) * 1999-10-28 2001-07-24 Promos Technologies Inc. Wafer ID optical sorting system

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