JPH0535565B2 - - Google Patents

Info

Publication number
JPH0535565B2
JPH0535565B2 JP60164798A JP16479885A JPH0535565B2 JP H0535565 B2 JPH0535565 B2 JP H0535565B2 JP 60164798 A JP60164798 A JP 60164798A JP 16479885 A JP16479885 A JP 16479885A JP H0535565 B2 JPH0535565 B2 JP H0535565B2
Authority
JP
Japan
Prior art keywords
command
sequence
keyboard
input
input means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60164798A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6225417A (ja
Inventor
Ryuichi Sato
Masanori Numata
Fumyoshi Hamazaki
Naoki Ayada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60164798A priority Critical patent/JPS6225417A/ja
Publication of JPS6225417A publication Critical patent/JPS6225417A/ja
Priority to US07/752,986 priority patent/US5197118A/en
Publication of JPH0535565B2 publication Critical patent/JPH0535565B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60164798A 1985-07-25 1985-07-25 半導体製造装置 Granted JPS6225417A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60164798A JPS6225417A (ja) 1985-07-25 1985-07-25 半導体製造装置
US07/752,986 US5197118A (en) 1985-07-25 1991-09-03 Control system for a fine pattern printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60164798A JPS6225417A (ja) 1985-07-25 1985-07-25 半導体製造装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6107398A Division JPH07311607A (ja) 1994-04-25 1994-04-25 シーケンス制御方法

Publications (2)

Publication Number Publication Date
JPS6225417A JPS6225417A (ja) 1987-02-03
JPH0535565B2 true JPH0535565B2 (enExample) 1993-05-26

Family

ID=15800133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60164798A Granted JPS6225417A (ja) 1985-07-25 1985-07-25 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6225417A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231621A (ja) * 2001-11-19 2002-08-16 Canon Inc 露光装置およびそのユニットの駆動方法
EP1796136B1 (en) * 2004-08-19 2015-09-30 Nikon Corporation Alignment information display method, program thereof, alignment method, exposure method, device manufacturing method, display system, display device, program, and measurement/inspection device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188340U (enExample) * 1981-05-25 1982-11-30
JPS58159110A (ja) * 1982-03-18 1983-09-21 Mitsubishi Electric Corp 対話形図形デ−タベ−ス作成及び修正方式
FR2549983B1 (fr) * 1983-07-25 1988-03-18 Telemecanique Electrique Terminal pour l'elaboration de programmes utilisables par un automate programmable
JPH0616483B2 (ja) * 1983-11-07 1994-03-02 株式会社ニコン 投影光学装置

Also Published As

Publication number Publication date
JPS6225417A (ja) 1987-02-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term