JPH11297750A - Semiconductor device, manufacture thereof, and mounting of the semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To relax thermal stresses caused by non-matching thermal linear expansion coefficients between a semiconductor element and a circuit substrate, by noting the productivity of a semiconductor device, enabling its repair and providing a thermoplastic resin layer on a semiconductor element, without providing encapsulating resin. SOLUTION: In this semiconductor device, a metal layer 10 is provided on a semiconductor element electrode 9 on a semiconductor element 8, a bump 11 is provided on the metal layer 10, and a thermoplastic resin layer 12 is formed in regions other than the region of the semiconductor element electrode 9. As a result of such a structure, at reflowing for mounting, the resin 12 is melted and then set, whereby the bonding between a semiconductor device and a circuit substrate can be made firm and stresses generated in the bump 11 can be relaxed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device which protects an integrated circuit portion of a semiconductor, secures an electrical connection between an external device and a semiconductor element, and enables the highest density mounting, and its manufacture. It is about the method. Further, the semiconductor device of the present invention facilitates miniaturization of information communication equipment, office electronic equipment, and the like.

[0002]

2. Description of the Related Art In recent years, semiconductor devices have become smaller in electronic equipment.
With the advancement of functions, miniaturization, high density, and high speed are required, and accordingly, for example, C4 (Cont.
rolled Collapse Chip Conn
section) or SBB (Stud Bump)
Bonding), a mounting technique using so-called flip chip bonding has been developed. In the field of semiconductor packages, small-sized semiconductor package products such as CSP (Chip Size Package), which are as close as possible to the size of a semiconductor element, have been developed.

Hereinafter, a semiconductor device using a conventional mounting technique called SBB and a method of manufacturing the same will be described with reference to the drawings.

FIG. 6 is a sectional view showing a semiconductor device using a conventional SBB method. In FIG. 6, 1 is a semiconductor element, 2 is a semiconductor element electrode, 3 is a bump, 4 is a conductive adhesive, 5 is a circuit board, 6 is a circuit board land, and 7 is a sealing resin.

[0005] As shown in FIG.
A bump 3 is formed on a semiconductor element electrode 2 on a semiconductor element 1, and the bump 3 is connected to a circuit board land 6 (electrode) of a circuit board 5 via a conductive adhesive 4. The distance between the element 1 and the circuit board 5 is determined by the sealing resin 7.
Are filled and sealed.

Next, a conventional method of manufacturing a semiconductor device will be described with reference to the sectional view of FIG.

First, bumps 3 are formed on a semiconductor element electrode 2 on a semiconductor element 1 by a ball bonding method as an SBB method. Next, the conductive adhesive 4 is formed on the tip of the bump 3 by the transfer method. Next, alignment is performed, and the bump 3 and the circuit board land 6 on the circuit board 5 are mounted. After the thermosetting of the conductive adhesive 4, the semiconductor element 1
The sealing resin 7 is injected and filled in the gap between the circuit board 5 and
Heat cured. The function of the sealing resin 7 is to protect the semiconductor element 1 and to alleviate the thermal stress applied to the bump 3 and the conductive adhesive 4 due to the mismatch in the coefficient of linear thermal expansion between the semiconductor element 1 and the circuit board 5. A conventional semiconductor device is manufactured by the above-described method.

[0008]

However, in the above-mentioned conventional method, the gap between the semiconductor element and the circuit board is narrow, it is very difficult to inject the sealing resin, and the individual semiconductor elements are individually sealed. Therefore, there is a problem that productivity is poor. Furthermore, if a failure or defect of the semiconductor element is found after resin sealing, it is difficult to remove the defective or defective semiconductor element from the circuit board because the adhesion between the sealing resin and the circuit board is strong. Even if it can be removed, the circuit board will be damaged, so it is impossible to remount the semiconductor element on the circuit board, and there has been a problem in productivity and production cost.

The present invention solves the above-mentioned conventional problems, and focuses on the productivity of a semiconductor device, enables repair, and provides a thermoplastic resin layer on a semiconductor element without providing a sealing resin. It is an object of the present invention to provide a semiconductor device and a method for manufacturing the same, which can relieve thermal stress caused by a mismatch in the coefficient of linear thermal expansion between an element and a circuit board.

[0010]

In order to solve the above-mentioned problems, a semiconductor device according to the present invention comprises a semiconductor element, a metal layer formed on an electrode of the semiconductor element, and a surface of the semiconductor element other than the metal layer. And a thermoplastic resin layer formed in the region. Further, the semiconductor element, a metal layer formed on the electrode of the semiconductor element, a protruding electrode formed on the metal layer, and a thermoplastic resin layer formed in a region of the semiconductor element surface other than the protruding electrode And a semiconductor device comprising: Further, a circuit board, a semiconductor element mounted on the circuit board, connection means for electrically connecting a wiring of the circuit board and the semiconductor element, and an outer periphery of the semiconductor element on the circuit board are sealed. A semiconductor device having a fixed resin and a protruding electrode provided on the bottom surface of the circuit board, wherein the bottom surface of the circuit board between the protruding electrode provided on the bottom surface of the circuit board and the This is a semiconductor device provided with a resin. A semiconductor element mounted on the support portion of the lead frame; connecting means for electrically connecting the semiconductor element to the inner lead portion; and an outer periphery of the semiconductor element by exposing a bottom surface side of the inner lead portion. A semiconductor device comprising a sealing resin sealing the inner lead portion, wherein the inner lead portion surface exposed from the sealing resin constitutes an outer lead portion, and heat is applied between the outer lead portion and the outer lead portion. This is a semiconductor device on which a plastic resin is formed.

In the method of manufacturing a semiconductor device, a metal layer is formed on the entire surface of the semiconductor element electrode on the semiconductor element.
Exposing a position corresponding to the semiconductor element electrode, forming a metal layer on the semiconductor element electrode, forming a projecting electrode on the metal layer on the semiconductor element electrode, and projecting the projecting electrode of the semiconductor element. A step of covering the flexible sheet on the formed surface side, holding the flexible sheet in a mold, enclosing the thermoplastic resin in a gap between the semiconductor element and the flexible sheet, and taking out the semiconductor element from the mold and removing the flexible sheet. Forming a thermoplastic resin in a region other than the protruding electrodes of the semiconductor element by peeling off the semiconductor resin.

A method of mounting a semiconductor device is a method of mounting a semiconductor device on a substrate, wherein the semiconductor device includes a semiconductor element and a metal layer formed on an electrode of the semiconductor element. A semiconductor device comprising a protruding electrode formed on the metal layer and a thermoplastic resin layer formed in a region on the surface of the semiconductor element other than the protruding electrode; The bumps of the semiconductor device and the electrodes on the substrate are aligned and mounted, and heated to melt the protruding electrodes of the semiconductor device and connect to the electrodes of the substrate. This is a method of mounting a semiconductor device in which a thermoplastic resin of the semiconductor device is melted and cured to connect the semiconductor device and a substrate.

With the above configuration, the semiconductor device of the present invention has
Since a thermoplastic resin is used, the gap between the semiconductor element and the circuit board can be sealed simply by heating after joining the semiconductor element to the circuit board, and heating of multiple semiconductor elements simultaneously. By doing so, it is possible to improve productivity and perform resin sealing. In particular, when the type of thermoplastic resin is changed for each type of semiconductor element according to the purpose, the semiconductor element can be heat-treated and sealed with resin for each type of product. Is very effective. In addition, since a thermoplastic resin is used, if a defect or defect is found in a semiconductor element, the semiconductor element can be removed from the circuit board by heat treatment without destroying or damaging the circuit board. Since the element can be easily removed, it is advantageous in terms of productivity and production cost.

Further, the present invention does not merely provide a thermoplastic resin on the surface of a semiconductor element for surface protection, but also enhances adhesion and productivity between a substrate and a semiconductor device for later mounting on a circuit board. Considering the fact that the thermoplastic resin melts and hardens due to reflow heating during mounting, it is effectively applied to board mounting, providing a technology that replaces resin sealing with sealing resin in flip chip mounting technology Is what you do.

[0015]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view showing a semiconductor device according to the first embodiment of the present invention. As shown in FIG. 1, the semiconductor device according to the present embodiment has a metal layer 10 provided on a semiconductor element electrode 9 on a semiconductor element 8 and a bump 11 formed on the metal layer 10 as a protruding electrode. is there. The thermoplastic resin layer 12 is formed in a region other than the region of the semiconductor device electrode 9 of the semiconductor device 8.

In this embodiment, as the metal layer 10 provided on the semiconductor element electrode 9, a metal layer having a two-layer structure using Ti (titanium) as an adhesion metal and Cu (copper) as a diffusion preventing metal is used. Used. The metal material is T
i (titanium), Cr (chromium), TiW (titanium / tungsten), Cu (copper), Ni (nickel), Au
(Gold), Pd (palladium) or the like may be used, or a combination of the respective metals may be used. Also,
As the bump 11, Sn (tin), Pb (lead), Sn
(Tin), Ag (silver), an alloy of Cu (copper) and Pb (lead), and Au (gold).

A method of manufacturing the semiconductor device of the present embodiment having the above-described configuration will be described below with reference to FIG.

FIG. 2A shows a semiconductor wafer 13 on which individual semiconductor elements are formed, on which semiconductor element electrodes 9 are formed.

Next, as shown in FIG. 2B, metal is formed on the entire surface of the semiconductor element electrode 9 of the semiconductor element formed on the semiconductor wafer 13 by vacuum evaporation, sputtering, CVD or electroless plating. The layer 10 is formed. Here, as an example of the metal layer 10, Ti (titanium) and Cu
A metal layer using a combination of (copper) is used. As the metal material, Ti (titanium), Cr (chromium), TiW
Metals such as (titanium / tungsten), Cu (copper), Ni (nickel), Au (gold), and Pd (palladium) may be used, or a combination of these metals may be used. Next, a position corresponding to the semiconductor element electrode 9 is exposed by applying a photosensitive resist, drying, exposing, and developing.

Next, for example, a bump metal layer, for example, Sn (tin) and Pb (lead) is formed by using electrolytic plating. After forming the bump metal layer, the resist is melted and removed. Then, without dissolving the bump metal layer, the material of the metal layer 10 is immersed in an etchant capable of selectively dissolving, the metal layer other than the bump metal layer is dissolved and removed, and the flux is applied and then melted. As shown in FIG.
To form

Instead of forming a bump metal layer on the semiconductor element electrode 9, a desired pattern is formed on the metal layer in advance by using a photographic method, and the semiconductor element is formed on the semiconductor element at a position other than the semiconductor element electrode 9. A land electrically connected to the electrode 9 is formed. Next, a plating resist may be applied, only the lands may be exposed using photographic technology, and a bump metal layer may be formed using electrolytic plating. A flux is applied to the surface on which the bump metal layer is formed, and the bump 11 is formed by melting the bump metal layer. The method for forming the bump 11 is not limited to the above-described method, and a stud bump may be generated using a ball bonding method using a wire bonder. In this case, the material of the bump is Au ( Gold), Cu (copper) and Sn (tin).

Next, the semiconductor wafer 1 on which the bumps 11 are formed
A flexible sheet (not shown) is covered on the surface on which the third bumps 11 are formed, and is held in a mold. A thermoplastic resin is sealed in the gap between the semiconductor wafer 13 and the flexible sheet by an injection molding technique. After encapsulation, the semiconductor wafer 13 is taken out of the mold and the flexible sheet is peeled off to obtain the semiconductor wafer 13 shown in FIG.
As shown in (d), the thermoplastic resin 12 can be formed in a region other than the bumps 11 of the semiconductor wafer 13.
During the encapsulation of the thermoplastic resin, the tip of the bump 11 is embedded in the flexible sheet by the mold clamping pressure, so that the tip of the bump 11 protrudes from the upper surface of the thermoplastic resin 12 after the sheet is peeled off. As a method for forming the thermoplastic resin 12, a potting method may be used. Alternatively, a resin sheet made of a thermoplastic resin may be thermocompression-bonded from the bump 11 side of the semiconductor wafer 13. In this case, after the thermocompression bonding, it is necessary to use mechanical polishing or sandblasting to remove the resin on the surface of the bump 11.
The flexible sheet is made of a material having heat resistance, particularly a material that can withstand heat during resin encapsulation, and any material having insulation and peeling properties may be used. It does not have to be such that it adheres to the surface of the semiconductor element. The thickness of the thermoplastic resin is as follows: bump 1
The thickness is within a height of 1 and the thickness is such that the thermoplastic resin is melted by the reflow when the semiconductor device is mounted on the substrate, and the amount is large enough to firmly connect the mounting substrate and the semiconductor device. .

Next, as shown in FIG. 2E, the semiconductor elements of the semiconductor wafer 13 are divided into individual semiconductor elements by a dicing saw along scribe lines formed on the semiconductor wafer 13, A semiconductor device in which a metal layer 10 is provided on a semiconductor element electrode 9 on a semiconductor element 8, a bump 11 is formed on the metal layer 10, and a thermoplastic resin layer 12 is formed in a region other than the semiconductor element electrode 9 region To form

Next, a mounting method for mounting the semiconductor device of this embodiment on a substrate will be described. As a method of mounting a semiconductor device on a circuit board as a mounting board, a thermoplastic resin surface is opposed to the board, bumps of the semiconductor device are aligned with electrodes of the circuit board, and after mounting on the circuit board, reflow (heating) is performed. 2), the bumps 11 provided on the semiconductor device are melted and connected to the electrodes provided on the circuit board. further,
The thermoplastic resin provided in the semiconductor device is melted and hardened, and the semiconductor device and the circuit board are connected. As described above, when the semiconductor device of the present embodiment is mounted on a board, the semiconductor device and the circuit board can be electrically connected, and the connection between the circuit board and the semiconductor device can be further strengthened by the connection of the thermoplastic resin. it can.

In the present embodiment, since the thermoplastic resin is used, the gap between the semiconductor element and the circuit board can be sealed only by heating after bonding the semiconductor element to the circuit board. By simultaneously heating the semiconductor elements, the productivity can be improved and resin sealing can be performed. Of course, if necessary, resin sealing can be performed by individually performing heat treatment for each semiconductor element. In particular, when the type of thermoplastic resin is changed for each type of semiconductor element according to the purpose, the semiconductor element can be heat-treated and sealed with resin for each type of product. Is very effective. In addition, since a thermoplastic resin is used, when a defect or defect is found in a semiconductor element, by performing a heat treatment,
Without destroying the circuit board or damaging the board,
Since the semiconductor element can be easily removed from the circuit board, it is advantageous in terms of productivity and production cost.

Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 3 is a cross-sectional view illustrating the semiconductor device according to the present embodiment.

As shown in FIG. 3, in the semiconductor device of this embodiment, a metal layer 16 is provided on a semiconductor element electrode 15 on a semiconductor element 14, and a region other than the semiconductor element electrode 15 area of the semiconductor element 14 is provided. In this case, a thermoplastic resin layer 17 is formed.

The method of manufacturing the semiconductor device of the present embodiment having the above-described configuration will be described below.

As in the first embodiment, a metal layer is formed on the entire surface of the semiconductor device electrode on a semiconductor wafer by vacuum deposition, sputtering, CVD, or electroless plating. Here, a combination of Ti and Cu is used as an example. Ti, Cr, Ti
W, Cu, Ni, Au, Pd, or the like may be used, or a combination of respective metals may be used. Next, an etching resist is applied, dried, exposed and developed to leave a resist at a position corresponding to the semiconductor element electrode. Next, the metal layer other than the electrode portion is dissolved and removed with an etching agent. Next, a flexible sheet is covered on the side on which the etching resist is formed, held in a mold, and a thermoplastic resin is sealed in a gap between the semiconductor wafer and the flexible sheet by an injection molding technique. After encapsulation, take out the semiconductor wafer from the mold,
Peel off the flexible sheet. Further, a potting method may be used as a method for forming the thermoplastic resin. Next, the etching resist is removed by melting to expose the metal layer. Next, the semiconductor device shown in FIG. 3 is formed by dividing the semiconductor elements individually along scribe lines of the semiconductor wafer.

Next, an example in which the present invention is applied to another type of semiconductor device will be described with reference to the drawings.

The semiconductor device shown in FIG. 4 uses the BGA (Bal
(1 Grid Array) type semiconductor package, in which a thermoplastic resin 19 is provided on a substrate 18 and a solder ball 21 is provided on a substrate electrode 20. The semiconductor element 22 is mounted on the upper surface of the substrate 18, and a substrate wiring (not shown) and the semiconductor element 22 are connected to each other by a thin metal wire 23. This is a structure sealed with a resin 24.

As for the supply of the thermoplastic resin, a thermoplastic resin layer may be formed by installing it in a mold as in the first embodiment, or a potting method may be used.

By providing the thermoplastic resin 19 on the side of the substrate 18 on which the solder balls 21 are provided, the mounting strength is improved by melting the thermoplastic resin 19 at the time of mounting the board, and the board is interposed by the thermoplastic resin 19. And BG
It is possible to reduce the thermal stress caused by the mismatch of the coefficient of linear thermal expansion with the substrate 18 of the A-type semiconductor package.

FIG. 5 shows a SON (Small Ou).
line Non-leaded Package) or QFN (Quad Flat Non-leaded)
An example in which the present invention is applied to a single-sided resin-encapsulated semiconductor package such as a package is shown.

The semiconductor device shown in FIG. 5 is one in which the function and effect of the thermoplastic resin in the above-described embodiment are applied to a QFN type semiconductor package, and a semiconductor element 25 is provided on a support portion (not shown) of a lead frame. Is mounted, the inner lead portion 26 of the lead frame and the semiconductor element electrode of the semiconductor element 25 are connected by a thin metal wire 27, and the semiconductor element 2 is exposed so that the bottom side of the inner lead section 26 is exposed.
5 is sealed with a sealing resin 28. The bottom and side surfaces of the inner lead portion 26 exposed from the sealing resin 28 constitute an outer lead portion 29. Here, a thermoplastic resin 30 is formed between the outer lead portions 29 on the bottom surface of the QFN type semiconductor package. As for the supply of the thermoplastic resin 30, the thermoplastic resin layer may be formed by installing the same in a mold, or the thermoplastic resin may be formed by a potting method after forming a concave portion in the sealing resin. .

By providing the thermoplastic resin 30 between the exposed outer leads of the semiconductor package, the mounting strength can be improved by melting the thermoplastic resin 30 when the semiconductor package is mounted. Thermal stress can be reduced.

As described above, by applying the thermoplastic resin to the semiconductor element in the present invention, a great effect can be expected on the improvement of the productivity of the semiconductor device and the mounting of the semiconductor package.

The thermoplastic resin preferably has an insulating property, and preferably has excellent moldability.

[0040]

As described above, since a thermoplastic resin is used in the present invention, the gap between the semiconductor element and the circuit board is sealed only by heating after bonding the semiconductor element to the circuit board. By simultaneously heating a plurality of semiconductor elements, productivity can be improved and resin sealing can be performed. In particular, when the type of thermoplastic resin is changed for each type of semiconductor element according to the purpose, the semiconductor element can be heat-treated and sealed with resin for each type of product. Is very effective. Also, since a thermoplastic resin is used,
If a defect or defect is found in a semiconductor element, the semiconductor element can be easily removed from the circuit board by heat treatment without destroying the circuit board or damaging the board. It is also advantageous in terms of performance and production cost.

Further, according to the present invention, by providing a thermoplastic resin on the mounting surface side of a semiconductor device, a circuit board, and a semiconductor package, reflow can be performed at the time of mounting the substrate, thereby making an electrical connection with the substrate and at the reflow temperature. Since the resin is melted and hardened, the connection between the substrate and the semiconductor device can be further strengthened, and the thermal stress of the substrate and the semiconductor element is reduced by the interposition of the thermoplastic resin, and the connection portion,
For example, the thermal stress applied to the bump can be reduced, and the reliability can be improved.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a semiconductor device according to an embodiment of the present invention.

FIG. 2 is a sectional view showing a method for manufacturing a semiconductor device according to an embodiment of the present invention.

FIG. 3 is a sectional view showing a semiconductor device according to one embodiment of the present invention;

FIG. 4 is a sectional view showing an embodiment of the present invention applied to a semiconductor package;

FIG. 5 is a sectional view showing an embodiment of the present invention applied to a semiconductor package.

FIG. 6 is a sectional view showing a conventional semiconductor device.

[Explanation of symbols]

 Reference Signs List 1 semiconductor element 2 semiconductor element electrode 3 bump 4 conductive adhesive 5 circuit board 6 circuit board land 7 sealing resin 8 semiconductor element 9 semiconductor element electrode 10 metal layer 11 bump 12 thermoplastic resin 13 semiconductor wafer 14 semiconductor element 15 semiconductor element Electrode 16 Metal layer 17 Thermoplastic resin 18 Substrate 19 Thermoplastic resin 20 Substrate electrode 21 Solder ball 22 Semiconductor element 23 Fine metal wire 24 Sealing resin 25 Semiconductor element 26 Inner lead portion 27 Fine metal wire 28 Sealing resin 29 Outer lead portion 30 Heat Plastic resin

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI H01L 23/31 (72) Inventor Yoshifumi Nakamura 1-1, Komachi, Takatsuki-shi, Osaka Matsushita Electronics Industrial Co., Ltd. (72) Inventor Takahiro Kumakawa 1-1, Sachimachi, Takatsuki City, Osaka Prefecture Matsushita Electronics Corporation

Claims (7)

[Claims] 1. A semiconductor comprising: a semiconductor element; a metal layer formed on an electrode of the semiconductor element; and a thermoplastic resin layer formed in a region on the surface of the semiconductor element other than the metal layer. apparatus. 2. A semiconductor element, a metal layer formed on an electrode of the semiconductor element, a protruding electrode formed on the metal layer, and heat formed on a region of the semiconductor element surface other than the protruding electrode. A semiconductor device comprising a plastic resin layer. 3. A circuit board, a semiconductor element mounted on the circuit board, connection means for electrically connecting a wiring of the circuit board and the semiconductor element, and an external part of the semiconductor element on the circuit board. A semiconductor device having a resin sealing an enclosure and a protruding electrode provided on a bottom surface of the circuit board,
A semiconductor device, wherein a thermoplastic resin is provided on the bottom surface of the circuit board between the projecting electrodes provided on the bottom surface of the circuit board. 4. A semiconductor element mounted on a support portion of a lead frame, connecting means for electrically connecting the semiconductor element to an inner lead part, and exposing a bottom side of the inner lead part to the semiconductor element. Wherein the inner lead portion surface exposed from the sealing resin constitutes an outer lead portion, and is formed between the outer lead portion and the outer lead portion. Wherein a thermoplastic resin is formed on the semiconductor device. 5. A step of forming a metal layer on the entire surface of a semiconductor element electrode on a semiconductor element, exposing a position corresponding to the semiconductor element electrode, and forming a metal layer on the semiconductor element electrode; Forming a protruding electrode on the upper metal layer, covering the flexible sheet on the surface of the semiconductor element on which the protruding electrode is formed, holding the flexible sheet in a mold, and forming a thermoplastic resin between the semiconductor element and the flexible sheet. And a step of taking out the semiconductor element from the mold, peeling off the flexible sheet, and forming a thermoplastic resin in a region other than the projecting electrode of the semiconductor element. Device manufacturing method. 6. A metal layer is formed on an entire surface of a semiconductor device electrode of a semiconductor wafer on which a plurality of semiconductor devices are formed, a position corresponding to the semiconductor device electrode is exposed, and a metal layer is formed on the semiconductor device electrode. And forming a protruding electrode on the metal layer on the semiconductor element electrode, and covering a flexible sheet on the surface of the semiconductor wafer on which the protruding electrode is formed,
Holding the thermoplastic resin in the gap between the semiconductor wafer and the flexible sheet, holding the semiconductor wafer in the mold, removing the semiconductor wafer from the mold, peeling off the flexible sheet, and removing the thermoplastic resin from the semiconductor wafer. A method for manufacturing a semiconductor device, comprising: forming a semiconductor wafer in a region other than a protruding electrode; and dividing the semiconductor wafer to form individual semiconductor devices. 7. A semiconductor device mounting method for mounting a semiconductor device on a substrate, wherein the semiconductor device includes a semiconductor element, a metal layer formed on an electrode of the semiconductor element, and a metal layer formed on the metal layer. Using a semiconductor device composed of a thermoplastic resin layer formed in a region of the surface of the semiconductor element other than the protruding electrode, the semiconductor device having the thermoplastic resin surface facing a substrate, The bumps and the electrodes on the substrate are aligned and mounted, and heated to melt the protruding electrodes of the semiconductor device and connect to the electrodes of the substrate, and to melt the thermoplastic resin of the semiconductor device by the heat treatment. Curing the semiconductor device and connecting the substrate to the substrate.