JPH1126773A - 半導体装置及びその製造方法 - Google Patents

半導体装置及びその製造方法

Info

Publication number
JPH1126773A
JPH1126773A JP9182165A JP18216597A JPH1126773A JP H1126773 A JPH1126773 A JP H1126773A JP 9182165 A JP9182165 A JP 9182165A JP 18216597 A JP18216597 A JP 18216597A JP H1126773 A JPH1126773 A JP H1126773A
Authority
JP
Japan
Prior art keywords
semiconductor device
region
wiring
insulating film
connection region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9182165A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1126773A5 (enExample
Inventor
Mikio Mukai
幹雄 向井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP9182165A priority Critical patent/JPH1126773A/ja
Publication of JPH1126773A publication Critical patent/JPH1126773A/ja
Publication of JPH1126773A5 publication Critical patent/JPH1126773A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Thin Film Transistor (AREA)
JP9182165A 1997-07-08 1997-07-08 半導体装置及びその製造方法 Withdrawn JPH1126773A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9182165A JPH1126773A (ja) 1997-07-08 1997-07-08 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9182165A JPH1126773A (ja) 1997-07-08 1997-07-08 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JPH1126773A true JPH1126773A (ja) 1999-01-29
JPH1126773A5 JPH1126773A5 (enExample) 2005-03-17

Family

ID=16113496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9182165A Withdrawn JPH1126773A (ja) 1997-07-08 1997-07-08 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JPH1126773A (enExample)

Similar Documents

Publication Publication Date Title
US6084289A (en) Semiconductor processing method of forming a contact opening to a region adjacent a field isolation mass, and a semiconductor structure
JP3123092B2 (ja) 半導体装置の製造方法
JPH11274290A (ja) 半導体素子の製造方法
JPH09283751A (ja) 半導体装置およびその製造方法
US6368956B2 (en) Method of manufacturing a semiconductor device
JP2003101012A (ja) 半導体装置およびその製造方法
JP2002217128A (ja) 半導体素子の製造方法
JP2000514241A (ja) 自己整合されたコンタクトおよびフィールド絶縁物を伴ったトランジスタおよび該トランジスタのための製造プロセス
JP3458611B2 (ja) Ｓｏｉ型半導体装置の製造方法
JPH1126773A (ja) 半導体装置及びその製造方法
JP3483090B2 (ja) 半導体装置の製造方法
JP3576144B2 (ja) 半導体装置の製造方法
JPH07273182A (ja) 半導体装置の製造方法
JPH06140428A (ja) Ｓｏｉ構造を持つトランジスタおよびその製造方法
JP2001284204A (ja) 半導体装置及びその製造方法
JPH10214795A (ja) 半導体装置及びその製造方法
JP2000091340A (ja) 半導体装置の配線形成方法
JP3845957B2 (ja) 半導体装置及びその製造方法
JP2000031489A (ja) 半導体装置の製造方法
US6323540B1 (en) Semiconductor processing method of forming a contact opening to a region adjacent a field isolation mass, and a semiconductor structure
JP2001007341A (ja) 半導体装置およびその製造方法
JPH09321133A (ja) 半導体装置の製造方法
JPH03177072A (ja) 半導体装置及びその製造方法
JPH11121613A (ja) 半導体装置およびその製造方法
JP2709200B2 (ja) 半導体装置の製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040416

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040416

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20051130

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20051213

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20060213