JPH11254378A - 基板ハンドリングロボット - Google Patents

基板ハンドリングロボット

Info

Publication number
JPH11254378A
JPH11254378A JP8254898A JP8254898A JPH11254378A JP H11254378 A JPH11254378 A JP H11254378A JP 8254898 A JP8254898 A JP 8254898A JP 8254898 A JP8254898 A JP 8254898A JP H11254378 A JPH11254378 A JP H11254378A
Authority
JP
Japan
Prior art keywords
arm
substrate
handling robot
substrate handling
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8254898A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11254378A5 (enExample
Inventor
Tadamoto Tamai
忠素 玉井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP8254898A priority Critical patent/JPH11254378A/ja
Priority to US09/266,893 priority patent/US6313469B1/en
Publication of JPH11254378A publication Critical patent/JPH11254378A/ja
Publication of JPH11254378A5 publication Critical patent/JPH11254378A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP8254898A 1998-03-13 1998-03-13 基板ハンドリングロボット Pending JPH11254378A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8254898A JPH11254378A (ja) 1998-03-13 1998-03-13 基板ハンドリングロボット
US09/266,893 US6313469B1 (en) 1998-03-13 1999-03-12 Substrate handling apparatus and ion implantation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8254898A JPH11254378A (ja) 1998-03-13 1998-03-13 基板ハンドリングロボット

Publications (2)

Publication Number Publication Date
JPH11254378A true JPH11254378A (ja) 1999-09-21
JPH11254378A5 JPH11254378A5 (enExample) 2004-12-16

Family

ID=13777567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8254898A Pending JPH11254378A (ja) 1998-03-13 1998-03-13 基板ハンドリングロボット

Country Status (1)

Country Link
JP (1) JPH11254378A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004130462A (ja) * 2002-10-11 2004-04-30 Tokai Techno Kk 多関節ロボット
KR100482009B1 (ko) * 2002-10-22 2005-04-14 삼성전자주식회사 반도체 웨이퍼 이송장치
JP2007152496A (ja) * 2005-12-05 2007-06-21 Nidec Sankyo Corp ロボットアーム及びロボット
JP2013101898A (ja) * 2011-10-17 2013-05-23 Nissin Ion Equipment Co Ltd エネルギー線照射装置及びワーク搬送機構
CN110808225A (zh) * 2014-01-29 2020-02-18 日本电产三协株式会社 工业用机器人
WO2022139308A1 (ko) * 2020-12-23 2022-06-30 삼성전자 주식회사 이물질 배출 저감 구조가 적용된 산업용 로봇

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004130462A (ja) * 2002-10-11 2004-04-30 Tokai Techno Kk 多関節ロボット
KR100482009B1 (ko) * 2002-10-22 2005-04-14 삼성전자주식회사 반도체 웨이퍼 이송장치
JP2007152496A (ja) * 2005-12-05 2007-06-21 Nidec Sankyo Corp ロボットアーム及びロボット
JP2013101898A (ja) * 2011-10-17 2013-05-23 Nissin Ion Equipment Co Ltd エネルギー線照射装置及びワーク搬送機構
CN110808225A (zh) * 2014-01-29 2020-02-18 日本电产三协株式会社 工业用机器人
WO2022139308A1 (ko) * 2020-12-23 2022-06-30 삼성전자 주식회사 이물질 배출 저감 구조가 적용된 산업용 로봇

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