JPH11254378A5 - - Google Patents

Info

Publication number
JPH11254378A5
JPH11254378A5 JP1998082548A JP8254898A JPH11254378A5 JP H11254378 A5 JPH11254378 A5 JP H11254378A5 JP 1998082548 A JP1998082548 A JP 1998082548A JP 8254898 A JP8254898 A JP 8254898A JP H11254378 A5 JPH11254378 A5 JP H11254378A5
Authority
JP
Japan
Prior art keywords
substrate
vacuum chamber
arms
handling robot
hollow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998082548A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11254378A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8254898A priority Critical patent/JPH11254378A/ja
Priority claimed from JP8254898A external-priority patent/JPH11254378A/ja
Priority to US09/266,893 priority patent/US6313469B1/en
Publication of JPH11254378A publication Critical patent/JPH11254378A/ja
Publication of JPH11254378A5 publication Critical patent/JPH11254378A5/ja
Pending legal-status Critical Current

Links

JP8254898A 1998-03-13 1998-03-13 基板ハンドリングロボット Pending JPH11254378A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8254898A JPH11254378A (ja) 1998-03-13 1998-03-13 基板ハンドリングロボット
US09/266,893 US6313469B1 (en) 1998-03-13 1999-03-12 Substrate handling apparatus and ion implantation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8254898A JPH11254378A (ja) 1998-03-13 1998-03-13 基板ハンドリングロボット

Publications (2)

Publication Number Publication Date
JPH11254378A JPH11254378A (ja) 1999-09-21
JPH11254378A5 true JPH11254378A5 (enExample) 2004-12-16

Family

ID=13777567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8254898A Pending JPH11254378A (ja) 1998-03-13 1998-03-13 基板ハンドリングロボット

Country Status (1)

Country Link
JP (1) JPH11254378A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004130462A (ja) * 2002-10-11 2004-04-30 Tokai Techno Kk 多関節ロボット
KR100482009B1 (ko) * 2002-10-22 2005-04-14 삼성전자주식회사 반도체 웨이퍼 이송장치
JP4719562B2 (ja) * 2005-12-05 2011-07-06 日本電産サンキョー株式会社 ロボットアーム及びロボット
JP5545287B2 (ja) * 2011-10-17 2014-07-09 日新イオン機器株式会社 エネルギー線照射装置及びワーク搬送機構
JP6499826B2 (ja) * 2014-01-29 2019-04-10 日本電産サンキョー株式会社 産業用ロボット
KR20220090883A (ko) * 2020-12-23 2022-06-30 삼성전자주식회사 이물질 배출 저감 구조가 적용된 산업용 로봇

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