JPH09266167A5 - - Google Patents

Info

Publication number
JPH09266167A5
JPH09266167A5 JP1996099320A JP9932096A JPH09266167A5 JP H09266167 A5 JPH09266167 A5 JP H09266167A5 JP 1996099320 A JP1996099320 A JP 1996099320A JP 9932096 A JP9932096 A JP 9932096A JP H09266167 A5 JPH09266167 A5 JP H09266167A5
Authority
JP
Japan
Prior art keywords
heat
main body
space
device main
heat generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996099320A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09266167A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8099320A priority Critical patent/JPH09266167A/ja
Priority claimed from JP8099320A external-priority patent/JPH09266167A/ja
Priority to KR1019970010872A priority patent/KR100477960B1/ko
Publication of JPH09266167A publication Critical patent/JPH09266167A/ja
Priority to US09/905,079 priority patent/US20010048513A1/en
Priority to US10/289,296 priority patent/US6753942B2/en
Publication of JPH09266167A5 publication Critical patent/JPH09266167A5/ja
Pending legal-status Critical Current

Links

JP8099320A 1996-03-28 1996-03-28 環境制御チヤンバ Pending JPH09266167A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8099320A JPH09266167A (ja) 1996-03-28 1996-03-28 環境制御チヤンバ
KR1019970010872A KR100477960B1 (ko) 1996-03-28 1997-03-27 노광장치의제조방법
US09/905,079 US20010048513A1 (en) 1996-03-28 2001-07-16 Environmental control chamber
US10/289,296 US6753942B2 (en) 1996-03-28 2002-11-07 Environmental control chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8099320A JPH09266167A (ja) 1996-03-28 1996-03-28 環境制御チヤンバ

Publications (2)

Publication Number Publication Date
JPH09266167A JPH09266167A (ja) 1997-10-07
JPH09266167A5 true JPH09266167A5 (enExample) 2004-07-29

Family

ID=14244353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8099320A Pending JPH09266167A (ja) 1996-03-28 1996-03-28 環境制御チヤンバ

Country Status (3)

Country Link
US (2) US20010048513A1 (enExample)
JP (1) JPH09266167A (enExample)
KR (1) KR100477960B1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001284210A (ja) * 2000-03-30 2001-10-12 Canon Inc 露光装置、デバイス製造方法、半導体製造工場および露光装置の保守方法
US6621554B1 (en) * 2000-05-01 2003-09-16 Xerox Corporation Method and apparatus for controlling humidity in a copying device
JP2004158510A (ja) * 2002-11-01 2004-06-03 Canon Inc デバイス製造装置
US7253383B2 (en) * 2002-12-03 2007-08-07 Samsung Electronics Co., Ltd. Transformer assembly for microwave oven, method for manufacturing the same, and microwave oven having the same
US7329308B2 (en) * 2003-07-09 2008-02-12 Entegris, Inc. Air handling and chemical filtration system and method
US7150964B2 (en) * 2004-06-07 2006-12-19 Konica Minolta Medical & Graphic, Inc. Process for treating photothermographic dry imaging material
JP4689308B2 (ja) * 2005-03-18 2011-05-25 キヤノン株式会社 露光装置およびデバイス製造方法
US8170225B2 (en) * 2007-02-14 2012-05-01 Integrated Dynamics Engineering Gmbh Method for adapting a vibration isolation system
US7817262B2 (en) * 2007-06-27 2010-10-19 Vistec Semiconductor Systems Gmbh Device for measuring positions of structures on a substrate
US7572976B1 (en) * 2008-02-06 2009-08-11 Victor Merrill Quick connect electrical box
DE102010030260A1 (de) * 2010-06-18 2011-12-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Prüfung der Haftfestigkeit einer Beschichtung auf einem Substrat
TW201346205A (zh) * 2012-01-13 2013-11-16 尼康股份有限公司 箱室裝置及隔熱板
KR20140105239A (ko) * 2013-02-22 2014-09-01 삼성디스플레이 주식회사 레이저 빔을 이용한 마스크 제조 방법 및 마스크 제조 장치
CN109427635B (zh) * 2017-08-29 2020-09-11 创意电子股份有限公司 半导体元件的测试设备及其搬运装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4690528A (en) 1983-10-05 1987-09-01 Nippon Kogaku K. K. Projection exposure apparatus
JPS61160934A (ja) 1985-01-10 1986-07-21 Canon Inc 投影光学装置
EP0295860B1 (en) 1987-06-15 1994-04-06 Canon Kabushiki Kaisha An exposure apparatus
US4989031A (en) 1990-01-29 1991-01-29 Nikon Corporation Projection exposure apparatus
US5326316A (en) 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
JP2746125B2 (ja) * 1994-06-17 1998-04-28 日本電気株式会社 電子線露光装置の装置較正用基準マーク及び装置較正方法。
US6002987A (en) * 1996-03-26 1999-12-14 Nikon Corporation Methods to control the environment and exposure apparatus

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