JPH11251392A5 - - Google Patents

Info

Publication number
JPH11251392A5
JPH11251392A5 JP1998047626A JP4762698A JPH11251392A5 JP H11251392 A5 JPH11251392 A5 JP H11251392A5 JP 1998047626 A JP1998047626 A JP 1998047626A JP 4762698 A JP4762698 A JP 4762698A JP H11251392 A5 JPH11251392 A5 JP H11251392A5
Authority
JP
Japan
Prior art keywords
cassette
substrate transport
section
substrate
placement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998047626A
Other languages
English (en)
Japanese (ja)
Other versions
JP3954714B2 (ja
JPH11251392A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP4762698A priority Critical patent/JP3954714B2/ja
Priority claimed from JP4762698A external-priority patent/JP3954714B2/ja
Publication of JPH11251392A publication Critical patent/JPH11251392A/ja
Publication of JPH11251392A5 publication Critical patent/JPH11251392A5/ja
Application granted granted Critical
Publication of JP3954714B2 publication Critical patent/JP3954714B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP4762698A 1998-02-27 1998-02-27 基板搬送装置 Expired - Fee Related JP3954714B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4762698A JP3954714B2 (ja) 1998-02-27 1998-02-27 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4762698A JP3954714B2 (ja) 1998-02-27 1998-02-27 基板搬送装置

Publications (3)

Publication Number Publication Date
JPH11251392A JPH11251392A (ja) 1999-09-17
JPH11251392A5 true JPH11251392A5 (enExample) 2004-10-21
JP3954714B2 JP3954714B2 (ja) 2007-08-08

Family

ID=12780438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4762698A Expired - Fee Related JP3954714B2 (ja) 1998-02-27 1998-02-27 基板搬送装置

Country Status (1)

Country Link
JP (1) JP3954714B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6641350B2 (en) 2000-04-17 2003-11-04 Hitachi Kokusai Electric Inc. Dual loading port semiconductor processing equipment
JP2014022760A (ja) * 2012-07-12 2014-02-03 Hitachi High-Technologies Corp エリアセンサ及びそれを用いた処理システム
US11094570B2 (en) 2019-03-29 2021-08-17 Hirata Corporation Load port having movable member that abuts a pin

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