JP3954714B2 - 基板搬送装置 - Google Patents
基板搬送装置 Download PDFInfo
- Publication number
- JP3954714B2 JP3954714B2 JP4762698A JP4762698A JP3954714B2 JP 3954714 B2 JP3954714 B2 JP 3954714B2 JP 4762698 A JP4762698 A JP 4762698A JP 4762698 A JP4762698 A JP 4762698A JP 3954714 B2 JP3954714 B2 JP 3954714B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- unit
- substrate
- opening
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 48
- 230000002265 prevention Effects 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 12
- 235000012431 wafers Nutrition 0.000 description 43
- 238000012545 processing Methods 0.000 description 36
- 238000001514 detection method Methods 0.000 description 18
- 239000000126 substance Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 238000001035 drying Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000012993 chemical processing Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- 101000579425 Homo sapiens Proto-oncogene tyrosine-protein kinase receptor Ret Proteins 0.000 description 4
- 101150102752 MTC2 gene Proteins 0.000 description 4
- 102100028286 Proto-oncogene tyrosine-protein kinase receptor Ret Human genes 0.000 description 4
- 238000010129 solution processing Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4762698A JP3954714B2 (ja) | 1998-02-27 | 1998-02-27 | 基板搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4762698A JP3954714B2 (ja) | 1998-02-27 | 1998-02-27 | 基板搬送装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11251392A JPH11251392A (ja) | 1999-09-17 |
| JPH11251392A5 JPH11251392A5 (enExample) | 2004-10-21 |
| JP3954714B2 true JP3954714B2 (ja) | 2007-08-08 |
Family
ID=12780438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4762698A Expired - Fee Related JP3954714B2 (ja) | 1998-02-27 | 1998-02-27 | 基板搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3954714B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11094570B2 (en) | 2019-03-29 | 2021-08-17 | Hirata Corporation | Load port having movable member that abuts a pin |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6641350B2 (en) | 2000-04-17 | 2003-11-04 | Hitachi Kokusai Electric Inc. | Dual loading port semiconductor processing equipment |
| JP2014022760A (ja) * | 2012-07-12 | 2014-02-03 | Hitachi High-Technologies Corp | エリアセンサ及びそれを用いた処理システム |
-
1998
- 1998-02-27 JP JP4762698A patent/JP3954714B2/ja not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11094570B2 (en) | 2019-03-29 | 2021-08-17 | Hirata Corporation | Load port having movable member that abuts a pin |
| US11532496B2 (en) | 2019-03-29 | 2022-12-20 | Hirata Corporation | Load port with non-contact sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11251392A (ja) | 1999-09-17 |
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