JPH11209898A - メッキ用アノード電極 - Google Patents

メッキ用アノード電極

Info

Publication number
JPH11209898A
JPH11209898A JP2639798A JP2639798A JPH11209898A JP H11209898 A JPH11209898 A JP H11209898A JP 2639798 A JP2639798 A JP 2639798A JP 2639798 A JP2639798 A JP 2639798A JP H11209898 A JPH11209898 A JP H11209898A
Authority
JP
Japan
Prior art keywords
anode electrode
plating
anode
wafer
plated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2639798A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11209898A5 (enrdf_load_stackoverflow
Inventor
Junichiro Yoshioka
潤一郎 吉岡
Hiroaki Inoue
裕章 井上
Yoshitaka Mukoyama
佳孝 向山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2639798A priority Critical patent/JPH11209898A/ja
Publication of JPH11209898A publication Critical patent/JPH11209898A/ja
Publication of JPH11209898A5 publication Critical patent/JPH11209898A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
JP2639798A 1998-01-23 1998-01-23 メッキ用アノード電極 Pending JPH11209898A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2639798A JPH11209898A (ja) 1998-01-23 1998-01-23 メッキ用アノード電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2639798A JPH11209898A (ja) 1998-01-23 1998-01-23 メッキ用アノード電極

Publications (2)

Publication Number Publication Date
JPH11209898A true JPH11209898A (ja) 1999-08-03
JPH11209898A5 JPH11209898A5 (enrdf_load_stackoverflow) 2004-11-11

Family

ID=12192431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2639798A Pending JPH11209898A (ja) 1998-01-23 1998-01-23 メッキ用アノード電極

Country Status (1)

Country Link
JP (1) JPH11209898A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008057011A (ja) * 2006-08-31 2008-03-13 National Univ Corp Shizuoka Univ 成膜装置及び成膜方法
JP2008202065A (ja) * 2007-02-16 2008-09-04 Mitsubishi Materials Corp 電解メッキ用アノード電極取付構造
JP2010185122A (ja) * 2009-02-13 2010-08-26 Ebara Corp アノードホルダ用通電部材およびアノードホルダ
JP2012107343A (ja) * 2007-08-20 2012-06-07 Ebara Corp アノードホルダ及びめっき装置
JP2014185371A (ja) * 2013-03-25 2014-10-02 Toyota Motor Corp 金属被膜の成膜装置および成膜方法
WO2015050192A1 (ja) * 2013-10-03 2015-04-09 トヨタ自動車株式会社 成膜用ニッケル溶液およびこれを用いた成膜方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008057011A (ja) * 2006-08-31 2008-03-13 National Univ Corp Shizuoka Univ 成膜装置及び成膜方法
JP2008202065A (ja) * 2007-02-16 2008-09-04 Mitsubishi Materials Corp 電解メッキ用アノード電極取付構造
JP2012107343A (ja) * 2007-08-20 2012-06-07 Ebara Corp アノードホルダ及びめっき装置
JP2010185122A (ja) * 2009-02-13 2010-08-26 Ebara Corp アノードホルダ用通電部材およびアノードホルダ
JP2014185371A (ja) * 2013-03-25 2014-10-02 Toyota Motor Corp 金属被膜の成膜装置および成膜方法
WO2014156310A1 (ja) * 2013-03-25 2014-10-02 トヨタ自動車株式会社 金属被膜の成膜装置および成膜方法
CN105102691A (zh) * 2013-03-25 2015-11-25 丰田自动车株式会社 金属被膜的成膜装置和成膜方法
EP2980281A4 (en) * 2013-03-25 2016-02-03 Toyota Motor Co Ltd DEVICE AND METHOD FOR PRODUCING A METAL COATING FILM
US20160076162A1 (en) * 2013-03-25 2016-03-17 Toyota Jidosha Kabushiki Kaisha Film formation apparatus and film formation method for forming metal film
US9677185B2 (en) * 2013-03-25 2017-06-13 Toyota Jidosha Kabushiki Kaisha Film formation apparatus and film formation method for forming metal film
WO2015050192A1 (ja) * 2013-10-03 2015-04-09 トヨタ自動車株式会社 成膜用ニッケル溶液およびこれを用いた成膜方法
JP2015092012A (ja) * 2013-10-03 2015-05-14 トヨタ自動車株式会社 成膜用ニッケル溶液およびこれを用いた成膜方法

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