JPH11200016A - 真空内ガス供給装置 - Google Patents

真空内ガス供給装置

Info

Publication number
JPH11200016A
JPH11200016A JP1790298A JP1790298A JPH11200016A JP H11200016 A JPH11200016 A JP H11200016A JP 1790298 A JP1790298 A JP 1790298A JP 1790298 A JP1790298 A JP 1790298A JP H11200016 A JPH11200016 A JP H11200016A
Authority
JP
Japan
Prior art keywords
gas
width direction
flow rate
gas supply
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1790298A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11200016A5 (enExample
Inventor
充 ▲高▼井
Mitsuru Takai
Kunihiro Ueda
国博 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP1790298A priority Critical patent/JPH11200016A/ja
Publication of JPH11200016A publication Critical patent/JPH11200016A/ja
Publication of JPH11200016A5 publication Critical patent/JPH11200016A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1790298A 1998-01-13 1998-01-13 真空内ガス供給装置 Pending JPH11200016A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1790298A JPH11200016A (ja) 1998-01-13 1998-01-13 真空内ガス供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1790298A JPH11200016A (ja) 1998-01-13 1998-01-13 真空内ガス供給装置

Publications (2)

Publication Number Publication Date
JPH11200016A true JPH11200016A (ja) 1999-07-27
JPH11200016A5 JPH11200016A5 (enExample) 2005-08-04

Family

ID=11956685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1790298A Pending JPH11200016A (ja) 1998-01-13 1998-01-13 真空内ガス供給装置

Country Status (1)

Country Link
JP (1) JPH11200016A (enExample)

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