JPH11160244A5 - - Google Patents
Info
- Publication number
- JPH11160244A5 JPH11160244A5 JP1997329226A JP32922697A JPH11160244A5 JP H11160244 A5 JPH11160244 A5 JP H11160244A5 JP 1997329226 A JP1997329226 A JP 1997329226A JP 32922697 A JP32922697 A JP 32922697A JP H11160244 A5 JPH11160244 A5 JP H11160244A5
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- inspection device
- macro inspection
- coupling means
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32922697A JPH11160244A (ja) | 1997-11-28 | 1997-11-28 | マクロ検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32922697A JPH11160244A (ja) | 1997-11-28 | 1997-11-28 | マクロ検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11160244A JPH11160244A (ja) | 1999-06-18 |
| JPH11160244A5 true JPH11160244A5 (enExample) | 2005-07-21 |
Family
ID=18219068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32922697A Pending JPH11160244A (ja) | 1997-11-28 | 1997-11-28 | マクロ検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11160244A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10121115A1 (de) * | 2001-04-28 | 2002-10-31 | Leica Microsystems | Haltevorrichtung für Wafer |
| JP4922334B2 (ja) * | 2009-03-31 | 2012-04-25 | 株式会社東芝 | パターン検査装置およびパターン検査方法 |
-
1997
- 1997-11-28 JP JP32922697A patent/JPH11160244A/ja active Pending
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