JPS6390840U - - Google Patents
Info
- Publication number
- JPS6390840U JPS6390840U JP18635386U JP18635386U JPS6390840U JP S6390840 U JPS6390840 U JP S6390840U JP 18635386 U JP18635386 U JP 18635386U JP 18635386 U JP18635386 U JP 18635386U JP S6390840 U JPS6390840 U JP S6390840U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- box
- drive mechanism
- holding jig
- electric motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 15
- 230000033001 locomotion Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
Landscapes
- Drying Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18635386U JPS6390840U (enExample) | 1986-12-02 | 1986-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18635386U JPS6390840U (enExample) | 1986-12-02 | 1986-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390840U true JPS6390840U (enExample) | 1988-06-13 |
Family
ID=31135832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18635386U Pending JPS6390840U (enExample) | 1986-12-02 | 1986-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390840U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021106197A (ja) * | 2019-12-26 | 2021-07-26 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
-
1986
- 1986-12-02 JP JP18635386U patent/JPS6390840U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021106197A (ja) * | 2019-12-26 | 2021-07-26 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0297524U (enExample) | ||
| JPS6390840U (enExample) | ||
| JP2567034B2 (ja) | 産業用ロボット | |
| JPH0723188Y2 (ja) | 旋回ア−ム装置 | |
| JPH078454U (ja) | スイベルジョイント | |
| JPH0333420Y2 (enExample) | ||
| JPH01148286U (enExample) | ||
| JPS62199284U (enExample) | ||
| JPS6134952B2 (enExample) | ||
| JPH0171440U (enExample) | ||
| JPS6317670Y2 (enExample) | ||
| JPH02150189U (enExample) | ||
| JP2910238B2 (ja) | 球面作業ロボット | |
| JPH01177847A (ja) | ２軸駆動用モータ | |
| JPS6390842U (enExample) | ||
| JPH11160244A5 (enExample) | ||
| JPS6017988U (ja) | 産業ロボツト用ギヤ−ドモ−タ | |
| JPS62150087U (enExample) | ||
| JPS60131354U (ja) | 研削加工装置 | |
| JPS62100854U (enExample) | ||
| JPS649054U (enExample) | ||
| JPH03106728U (enExample) | ||
| JPS61151802U (enExample) | ||
| JPS58169992U (ja) | ロボツトにおける手首駆動装置 | |
| JPH0168161U (enExample) |