JPS6390842U - - Google Patents
Info
- Publication number
- JPS6390842U JPS6390842U JP18635586U JP18635586U JPS6390842U JP S6390842 U JPS6390842 U JP S6390842U JP 18635586 U JP18635586 U JP 18635586U JP 18635586 U JP18635586 U JP 18635586U JP S6390842 U JPS6390842 U JP S6390842U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- box
- semiconductor wafer
- electrostatic electrode
- holding jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18635586U JPS6390842U (enExample) | 1986-12-02 | 1986-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18635586U JPS6390842U (enExample) | 1986-12-02 | 1986-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390842U true JPS6390842U (enExample) | 1988-06-13 |
Family
ID=31135836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18635586U Pending JPS6390842U (enExample) | 1986-12-02 | 1986-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390842U (enExample) |
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1986
- 1986-12-02 JP JP18635586U patent/JPS6390842U/ja active Pending