JPH11103028A - 半導体集積回路装置 - Google Patents

半導体集積回路装置

Info

Publication number
JPH11103028A
JPH11103028A JP9263495A JP26349597A JPH11103028A JP H11103028 A JPH11103028 A JP H11103028A JP 9263495 A JP9263495 A JP 9263495A JP 26349597 A JP26349597 A JP 26349597A JP H11103028 A JPH11103028 A JP H11103028A
Authority
JP
Japan
Prior art keywords
dummy
memory cell
memory cells
film
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9263495A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11103028A5 (enExample
Inventor
Koji Arai
公司 荒井
Tsutomu Takahashi
勉 高橋
Atsuya Tanaka
敦也 田中
Yasushi Takahashi
康 高橋
Shunichi Sukegawa
俊一 助川
Shinji Bessho
真次 別所
Masayuki Taira
雅之 平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Texas Instruments Japan Ltd
Original Assignee
Hitachi Ltd
Texas Instruments Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Texas Instruments Japan Ltd filed Critical Hitachi Ltd
Priority to JP9263495A priority Critical patent/JPH11103028A/ja
Publication of JPH11103028A publication Critical patent/JPH11103028A/ja
Publication of JPH11103028A5 publication Critical patent/JPH11103028A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP9263495A 1997-09-29 1997-09-29 半導体集積回路装置 Pending JPH11103028A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9263495A JPH11103028A (ja) 1997-09-29 1997-09-29 半導体集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9263495A JPH11103028A (ja) 1997-09-29 1997-09-29 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPH11103028A true JPH11103028A (ja) 1999-04-13
JPH11103028A5 JPH11103028A5 (enExample) 2005-06-09

Family

ID=17390324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9263495A Pending JPH11103028A (ja) 1997-09-29 1997-09-29 半導体集積回路装置

Country Status (1)

Country Link
JP (1) JPH11103028A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100353553B1 (ko) * 2000-09-04 2002-09-27 주식회사 하이닉스반도체 반도체장치의 캐패시터 레이아웃
KR100412536B1 (ko) * 2001-12-04 2003-12-31 주식회사 하이닉스반도체 반도체 소자의 제조 방법
KR101306672B1 (ko) * 2002-12-24 2013-09-10 르네사스 일렉트로닉스 가부시키가이샤 반도체기억장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100353553B1 (ko) * 2000-09-04 2002-09-27 주식회사 하이닉스반도체 반도체장치의 캐패시터 레이아웃
KR100412536B1 (ko) * 2001-12-04 2003-12-31 주식회사 하이닉스반도체 반도체 소자의 제조 방법
KR101306672B1 (ko) * 2002-12-24 2013-09-10 르네사스 일렉트로닉스 가부시키가이샤 반도체기억장치

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