JPH1064979A5 - - Google Patents

Info

Publication number
JPH1064979A5
JPH1064979A5 JP1996235877A JP23587796A JPH1064979A5 JP H1064979 A5 JPH1064979 A5 JP H1064979A5 JP 1996235877 A JP1996235877 A JP 1996235877A JP 23587796 A JP23587796 A JP 23587796A JP H1064979 A5 JPH1064979 A5 JP H1064979A5
Authority
JP
Japan
Prior art keywords
edge portions
photosensitive substrate
alignment device
illumination
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996235877A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1064979A (ja
JP4048385B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP23587796A priority Critical patent/JP4048385B2/ja
Priority claimed from JP23587796A external-priority patent/JP4048385B2/ja
Publication of JPH1064979A publication Critical patent/JPH1064979A/ja
Publication of JPH1064979A5 publication Critical patent/JPH1064979A5/ja
Application granted granted Critical
Publication of JP4048385B2 publication Critical patent/JP4048385B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP23587796A 1996-08-19 1996-08-19 光学式プリアライメント装置および該プリアライメント装置を備えた露光装置 Expired - Fee Related JP4048385B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23587796A JP4048385B2 (ja) 1996-08-19 1996-08-19 光学式プリアライメント装置および該プリアライメント装置を備えた露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23587796A JP4048385B2 (ja) 1996-08-19 1996-08-19 光学式プリアライメント装置および該プリアライメント装置を備えた露光装置

Publications (3)

Publication Number Publication Date
JPH1064979A JPH1064979A (ja) 1998-03-06
JPH1064979A5 true JPH1064979A5 (enrdf_load_stackoverflow) 2004-11-04
JP4048385B2 JP4048385B2 (ja) 2008-02-20

Family

ID=16992573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23587796A Expired - Fee Related JP4048385B2 (ja) 1996-08-19 1996-08-19 光学式プリアライメント装置および該プリアライメント装置を備えた露光装置

Country Status (1)

Country Link
JP (1) JP4048385B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5384219B2 (ja) * 2009-06-19 2014-01-08 東京エレクトロン株式会社 検査装置におけるプリアライメント方法及びプリアライメント用プログラム
DE102009032210B4 (de) * 2009-07-03 2011-06-09 Kleo Ag Bearbeitungsanlage
WO2011024866A1 (ja) * 2009-08-26 2011-03-03 株式会社ニコン 露光装置、露光方法及びデバイス製造方法
CN104111596A (zh) * 2013-04-16 2014-10-22 上海微电子装备有限公司 用于光刻设备的全局调平的装置和方法
JP6916616B2 (ja) * 2016-12-13 2021-08-11 キヤノン株式会社 リソグラフィ装置、物品の製造方法、および計測装置
JP7057655B2 (ja) * 2017-12-15 2022-04-20 キヤノン株式会社 計測装置、リソグラフィ装置、物品の製造方法、および計測方法

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