JPH1051004A5 - - Google Patents

Info

Publication number
JPH1051004A5
JPH1051004A5 JP1996219313A JP21931396A JPH1051004A5 JP H1051004 A5 JPH1051004 A5 JP H1051004A5 JP 1996219313 A JP1996219313 A JP 1996219313A JP 21931396 A JP21931396 A JP 21931396A JP H1051004 A5 JPH1051004 A5 JP H1051004A5
Authority
JP
Japan
Prior art keywords
regions
thin film
film transistor
active layer
source regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996219313A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1051004A (ja
JP4176164B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP21931396A priority Critical patent/JP4176164B2/ja
Priority claimed from JP21931396A external-priority patent/JP4176164B2/ja
Publication of JPH1051004A publication Critical patent/JPH1051004A/ja
Publication of JPH1051004A5 publication Critical patent/JPH1051004A5/ja
Application granted granted Critical
Publication of JP4176164B2 publication Critical patent/JP4176164B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP21931396A 1996-08-01 1996-08-01 半導体装置 Expired - Lifetime JP4176164B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21931396A JP4176164B2 (ja) 1996-08-01 1996-08-01 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21931396A JP4176164B2 (ja) 1996-08-01 1996-08-01 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006028866A Division JP4494344B2 (ja) 2006-02-06 2006-02-06 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JPH1051004A JPH1051004A (ja) 1998-02-20
JPH1051004A5 true JPH1051004A5 (enExample) 2004-08-12
JP4176164B2 JP4176164B2 (ja) 2008-11-05

Family

ID=16733535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21931396A Expired - Lifetime JP4176164B2 (ja) 1996-08-01 1996-08-01 半導体装置

Country Status (1)

Country Link
JP (1) JP4176164B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7193594B1 (en) * 1999-03-18 2007-03-20 Semiconductor Energy Laboratory Co., Ltd. Display device

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