JPH10340920A5 - - Google Patents
Info
- Publication number
- JPH10340920A5 JPH10340920A5 JP1997151749A JP15174997A JPH10340920A5 JP H10340920 A5 JPH10340920 A5 JP H10340920A5 JP 1997151749 A JP1997151749 A JP 1997151749A JP 15174997 A JP15174997 A JP 15174997A JP H10340920 A5 JPH10340920 A5 JP H10340920A5
- Authority
- JP
- Japan
- Prior art keywords
- pad portion
- opening
- conductive
- wiring
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15174997A JP3906522B2 (ja) | 1997-06-10 | 1997-06-10 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15174997A JP3906522B2 (ja) | 1997-06-10 | 1997-06-10 | 半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10340920A JPH10340920A (ja) | 1998-12-22 |
| JPH10340920A5 true JPH10340920A5 (OSRAM) | 2005-03-17 |
| JP3906522B2 JP3906522B2 (ja) | 2007-04-18 |
Family
ID=15525454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15174997A Expired - Fee Related JP3906522B2 (ja) | 1997-06-10 | 1997-06-10 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3906522B2 (OSRAM) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW426980B (en) * | 1999-01-23 | 2001-03-21 | Lucent Technologies Inc | Wire bonding to copper |
| JP2003031575A (ja) | 2001-07-17 | 2003-01-31 | Nec Corp | 半導体装置及びその製造方法 |
| JP2003303848A (ja) * | 2002-04-12 | 2003-10-24 | Nec Compound Semiconductor Devices Ltd | 半導体装置 |
| KR20040045109A (ko) * | 2002-11-22 | 2004-06-01 | 주식회사 하이닉스반도체 | 반도체 소자의 제조 방법 |
| JP2004221098A (ja) | 2003-01-09 | 2004-08-05 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| JP2008091454A (ja) * | 2006-09-29 | 2008-04-17 | Rohm Co Ltd | 半導体装置及び半導体装置の製造方法 |
| US7485564B2 (en) * | 2007-02-12 | 2009-02-03 | International Business Machines Corporation | Undercut-free BLM process for Pb-free and Pb-reduced C4 |
| JP4701264B2 (ja) * | 2008-04-18 | 2011-06-15 | ルネサスエレクトロニクス株式会社 | 半導体装置、および半導体装置の製造方法 |
| JP5582879B2 (ja) * | 2010-06-09 | 2014-09-03 | 株式会社東芝 | 半導体装置及びその製造方法 |
| JP5621712B2 (ja) * | 2011-06-06 | 2014-11-12 | 株式会社デンソー | 半導体チップ |
| JP2014222742A (ja) * | 2013-05-14 | 2014-11-27 | トヨタ自動車株式会社 | 半導体装置 |
| DE102016101801B4 (de) * | 2016-02-02 | 2021-01-14 | Infineon Technologies Ag | Lastanschluss eines leistungshalbleiterbauelements, leistungshalbleitermodul damit und herstellungsverfahren dafür |
| JP7379845B2 (ja) * | 2019-03-28 | 2023-11-15 | セイコーエプソン株式会社 | 半導体装置、半導体装置の製造方法、電子デバイス、電子機器および移動体 |
-
1997
- 1997-06-10 JP JP15174997A patent/JP3906522B2/ja not_active Expired - Fee Related
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