JPH10284401A - 露光装置 - Google Patents

露光装置

Info

Publication number
JPH10284401A
JPH10284401A JP9102506A JP10250697A JPH10284401A JP H10284401 A JPH10284401 A JP H10284401A JP 9102506 A JP9102506 A JP 9102506A JP 10250697 A JP10250697 A JP 10250697A JP H10284401 A JPH10284401 A JP H10284401A
Authority
JP
Japan
Prior art keywords
substrate
optical system
illuminance distribution
telecentricity
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9102506A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10284401A5 (enExample
Inventor
Yuuki Yoshikawa
勇希 吉川
Toshihiro Katsume
智弘 勝目
Kenji Shimizu
賢二 清水
Noriyoshi Takemura
典美 武村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9102506A priority Critical patent/JPH10284401A/ja
Publication of JPH10284401A publication Critical patent/JPH10284401A/ja
Publication of JPH10284401A5 publication Critical patent/JPH10284401A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9102506A 1997-04-03 1997-04-03 露光装置 Pending JPH10284401A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9102506A JPH10284401A (ja) 1997-04-03 1997-04-03 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9102506A JPH10284401A (ja) 1997-04-03 1997-04-03 露光装置

Publications (2)

Publication Number Publication Date
JPH10284401A true JPH10284401A (ja) 1998-10-23
JPH10284401A5 JPH10284401A5 (enExample) 2005-02-24

Family

ID=14329293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9102506A Pending JPH10284401A (ja) 1997-04-03 1997-04-03 露光装置

Country Status (1)

Country Link
JP (1) JPH10284401A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050078413A (ko) * 2004-01-29 2005-08-05 삼성에스디아이 주식회사 조도측정장치
JP2006049730A (ja) * 2004-08-06 2006-02-16 Sharp Corp 露光装置、露光量制御方法、露光量制御プログラムとその記録媒体
KR101051691B1 (ko) * 2009-11-27 2011-07-25 주식회사 옵티레이 노광 장치
JP2012182281A (ja) * 2011-03-01 2012-09-20 Ushio Inc 光照射装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050078413A (ko) * 2004-01-29 2005-08-05 삼성에스디아이 주식회사 조도측정장치
JP2006049730A (ja) * 2004-08-06 2006-02-16 Sharp Corp 露光装置、露光量制御方法、露光量制御プログラムとその記録媒体
KR101051691B1 (ko) * 2009-11-27 2011-07-25 주식회사 옵티레이 노광 장치
JP2012182281A (ja) * 2011-03-01 2012-09-20 Ushio Inc 光照射装置

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