JPH10284401A5 - - Google Patents

Info

Publication number
JPH10284401A5
JPH10284401A5 JP1997102506A JP10250697A JPH10284401A5 JP H10284401 A5 JPH10284401 A5 JP H10284401A5 JP 1997102506 A JP1997102506 A JP 1997102506A JP 10250697 A JP10250697 A JP 10250697A JP H10284401 A5 JPH10284401 A5 JP H10284401A5
Authority
JP
Japan
Prior art keywords
substrate
telecentricity
adjusting means
optical system
illuminance distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997102506A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10284401A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9102506A priority Critical patent/JPH10284401A/ja
Priority claimed from JP9102506A external-priority patent/JPH10284401A/ja
Publication of JPH10284401A publication Critical patent/JPH10284401A/ja
Publication of JPH10284401A5 publication Critical patent/JPH10284401A5/ja
Pending legal-status Critical Current

Links

JP9102506A 1997-04-03 1997-04-03 露光装置 Pending JPH10284401A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9102506A JPH10284401A (ja) 1997-04-03 1997-04-03 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9102506A JPH10284401A (ja) 1997-04-03 1997-04-03 露光装置

Publications (2)

Publication Number Publication Date
JPH10284401A JPH10284401A (ja) 1998-10-23
JPH10284401A5 true JPH10284401A5 (enExample) 2005-02-24

Family

ID=14329293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9102506A Pending JPH10284401A (ja) 1997-04-03 1997-04-03 露光装置

Country Status (1)

Country Link
JP (1) JPH10284401A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050078413A (ko) * 2004-01-29 2005-08-05 삼성에스디아이 주식회사 조도측정장치
JP4485282B2 (ja) * 2004-08-06 2010-06-16 シャープ株式会社 露光装置、露光量制御方法、露光量制御プログラムとその記録媒体
KR101051691B1 (ko) * 2009-11-27 2011-07-25 주식회사 옵티레이 노광 장치
JP5541198B2 (ja) * 2011-03-01 2014-07-09 ウシオ電機株式会社 光照射装置

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