JPH10282147A - 平板状被検査体の試験用ヘッド - Google Patents

平板状被検査体の試験用ヘッド

Info

Publication number
JPH10282147A
JPH10282147A JP9789097A JP9789097A JPH10282147A JP H10282147 A JPH10282147 A JP H10282147A JP 9789097 A JP9789097 A JP 9789097A JP 9789097 A JP9789097 A JP 9789097A JP H10282147 A JPH10282147 A JP H10282147A
Authority
JP
Japan
Prior art keywords
probe
needle
support base
test head
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9789097A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10282147A5 (enExample
Inventor
Norihide Yamaguchi
憲栄 山口
Motoyasu Kondo
基康 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP9789097A priority Critical patent/JPH10282147A/ja
Publication of JPH10282147A publication Critical patent/JPH10282147A/ja
Publication of JPH10282147A5 publication Critical patent/JPH10282147A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9789097A 1997-04-02 1997-04-02 平板状被検査体の試験用ヘッド Pending JPH10282147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9789097A JPH10282147A (ja) 1997-04-02 1997-04-02 平板状被検査体の試験用ヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9789097A JPH10282147A (ja) 1997-04-02 1997-04-02 平板状被検査体の試験用ヘッド

Publications (2)

Publication Number Publication Date
JPH10282147A true JPH10282147A (ja) 1998-10-23
JPH10282147A5 JPH10282147A5 (enExample) 2005-01-20

Family

ID=14204358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9789097A Pending JPH10282147A (ja) 1997-04-02 1997-04-02 平板状被検査体の試験用ヘッド

Country Status (1)

Country Link
JP (1) JPH10282147A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6634245B1 (en) * 1999-01-29 2003-10-21 Tokyo Electron Limited Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism
US7532020B2 (en) 2006-06-26 2009-05-12 Kabushiki Kaisha Nihon Micronics Probe assembly
JP2009139169A (ja) * 2007-12-05 2009-06-25 Japan Electronic Materials Corp カンチレバー型プローブカード
JP2014022726A (ja) * 2012-07-13 2014-02-03 Mjc Probe Inc プローブ固定構造およびその光学測定装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6634245B1 (en) * 1999-01-29 2003-10-21 Tokyo Electron Limited Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism
US7532020B2 (en) 2006-06-26 2009-05-12 Kabushiki Kaisha Nihon Micronics Probe assembly
JP2009139169A (ja) * 2007-12-05 2009-06-25 Japan Electronic Materials Corp カンチレバー型プローブカード
JP2014022726A (ja) * 2012-07-13 2014-02-03 Mjc Probe Inc プローブ固定構造およびその光学測定装置

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