JPH10270333A - 露光装置 - Google Patents

露光装置

Info

Publication number
JPH10270333A
JPH10270333A JP9075355A JP7535597A JPH10270333A JP H10270333 A JPH10270333 A JP H10270333A JP 9075355 A JP9075355 A JP 9075355A JP 7535597 A JP7535597 A JP 7535597A JP H10270333 A JPH10270333 A JP H10270333A
Authority
JP
Japan
Prior art keywords
gas
lens
airtight chamber
optical system
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9075355A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10270333A5 (enExample
Inventor
Shigeru Hagiwara
茂 萩原
Masato Hamaya
正人 濱谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9075355A priority Critical patent/JPH10270333A/ja
Priority to US09/047,478 priority patent/US6222610B1/en
Priority to EP98302390A priority patent/EP0867774A3/en
Publication of JPH10270333A publication Critical patent/JPH10270333A/ja
Priority to US09/781,993 priority patent/US20010019400A1/en
Priority to US10/084,352 priority patent/US6686989B2/en
Publication of JPH10270333A5 publication Critical patent/JPH10270333A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70933—Purge, e.g. exchanging fluid or gas to remove pollutants
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G03F7/70891—Temperature

Landscapes

  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9075355A 1997-03-27 1997-03-27 露光装置 Pending JPH10270333A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP9075355A JPH10270333A (ja) 1997-03-27 1997-03-27 露光装置
US09/047,478 US6222610B1 (en) 1997-03-27 1998-03-25 Exposure apparatus
EP98302390A EP0867774A3 (en) 1997-03-27 1998-03-27 Exposure apparatus
US09/781,993 US20010019400A1 (en) 1997-03-27 2001-02-14 Exposure apparatus
US10/084,352 US6686989B2 (en) 1997-03-27 2002-02-28 Exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9075355A JPH10270333A (ja) 1997-03-27 1997-03-27 露光装置

Publications (2)

Publication Number Publication Date
JPH10270333A true JPH10270333A (ja) 1998-10-09
JPH10270333A5 JPH10270333A5 (enExample) 2005-08-11

Family

ID=13573853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9075355A Pending JPH10270333A (ja) 1997-03-27 1997-03-27 露光装置

Country Status (3)

Country Link
US (3) US6222610B1 (enExample)
EP (1) EP0867774A3 (enExample)
JP (1) JPH10270333A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030012297A (ko) * 2001-07-31 2003-02-12 주식회사 하이닉스반도체 반도체 스테퍼 설비의 렌즈 온도 조절 장치
JP2008252117A (ja) * 1999-11-05 2008-10-16 Asml Netherlands Bv リソグラフィ装置
JP2019057640A (ja) * 2017-09-21 2019-04-11 株式会社Ｓｃｒｅｅｎホールディングス 露光装置、基板処理装置、露光方法および基板処理方法

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0997761A4 (en) 1997-06-10 2000-09-13 Nippon Kogaku Kk OPTICAL DEVICE, ITS CLEANING METHOD, PROJECTION ALIGNING DEVICE, AND ITS MANUFACTURING METHOD
JPH11224839A (ja) 1998-02-04 1999-08-17 Canon Inc 露光装置とデバイス製造方法、ならびに該露光装置の光学素子クリーニング方法
JP3832984B2 (ja) * 1998-10-27 2006-10-11 キヤノン株式会社 露光装置およびデバイス製造方法
KR20010112265A (ko) 1999-02-12 2001-12-20 시마무라 테루오 노광방법 및 장치
US6762412B1 (en) 1999-05-10 2004-07-13 Nikon Corporation Optical apparatus, exposure apparatus using the same, and gas introduction method
WO2001011665A1 (en) * 1999-08-05 2001-02-15 Nikon Corporation Optical device for illumination, exposure device, container of optical part, method of assembling exposure device, method of evaluating material, and method and device for evaluating filter
US6654095B1 (en) 1999-10-18 2003-11-25 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
JP2001144003A (ja) * 1999-11-16 2001-05-25 Canon Inc 露光装置およびデバイス製造方法
US6907058B2 (en) 2000-01-25 2005-06-14 Lambda Physik Ag Energy monitor for molecular fluorine laser
JP2001274054A (ja) * 2000-03-24 2001-10-05 Canon Inc 露光装置、半導体デバイス製造方法および半導体デバイス製造工場
US6571057B2 (en) * 2000-03-27 2003-05-27 Nikon Corporation Optical instrument, gas replacement method and cleaning method of optical instrument, exposure apparatus, exposure method and manufacturing method for devices
AU4459701A (en) * 2000-03-31 2001-10-15 Nikon Corporation Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing method
JP2001345248A (ja) * 2000-05-31 2001-12-14 Canon Inc 露光装置、デバイス製造方法、半導体製造工場および露光装置の保守方法
JP2002260999A (ja) 2000-12-08 2002-09-13 Carl-Zeiss-Stiftung Trading As Carl Zeiss 対物レンズの少なくとも１つの内部空間を気体洗浄するシステム
US6998620B2 (en) 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
JP4258840B2 (ja) * 2002-04-22 2009-04-30 株式会社ニコン 支持装置、光学装置及び露光装置、並びにデバイス製造方法
US7050149B2 (en) * 2002-06-11 2006-05-23 Nikon Corporation Exposure apparatus and exposure method
JP4004895B2 (ja) * 2002-08-29 2007-11-07 株式会社フジクラ 光学装置
US6757112B1 (en) * 2002-10-22 2004-06-29 Raytheon Company Lens assembly and method for its preparation
US6847431B2 (en) * 2003-03-10 2005-01-25 Nikon Corporation Method and device for controlling fluid flow in an optical assembly
JP2004281697A (ja) * 2003-03-14 2004-10-07 Canon Inc 露光装置及び収差補正方法
WO2004109357A1 (ja) † 2003-06-06 2004-12-16 Nikon Corporation 光学素子保持装置、鏡筒、露光装置、及びデバイスの製造方法
WO2005006417A1 (ja) * 2003-07-09 2005-01-20 Nikon Corporation 露光装置及びデバイス製造方法
EP1503243A1 (en) * 2003-07-31 2005-02-02 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
US7446849B2 (en) * 2004-07-22 2008-11-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4245577B2 (ja) * 2005-03-22 2009-03-25 シャープ株式会社 レンズ位置制御装置及び撮像モジュール
US7265815B2 (en) * 2005-05-19 2007-09-04 Asml Holding N.V. System and method utilizing an illumination beam adjusting system
KR101353868B1 (ko) 2005-09-13 2014-01-20 칼 짜이스 에스엠테 게엠베하 노출 공정을 위한 광학 요소 유닛
JP2009010232A (ja) * 2007-06-28 2009-01-15 Canon Inc 光学装置、露光装置およびデバイス製造方法
TWI534494B (zh) * 2012-07-12 2016-05-21 鴻海精密工業股份有限公司 鏡頭模組組裝平臺、組裝裝置及組裝方法
WO2016089449A1 (en) * 2014-12-01 2016-06-09 Kla-Tencor Corporation Apparatus and method for providing a humidity-controlled environment in which to perform optical contacting
DE102015202844A1 (de) 2015-02-17 2015-04-09 Carl Zeiss Smt Gmbh Druckanpassungseinrichtung für eine Projektionsbelichtungsanlage
TWI712865B (zh) * 2017-09-21 2020-12-11 日商斯庫林集團股份有限公司 曝光裝置、基板處理裝置、曝光方法及基板處理方法
JP7058177B2 (ja) * 2018-05-22 2022-04-21 東京エレクトロン株式会社 基板処理装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4690528A (en) * 1983-10-05 1987-09-01 Nippon Kogaku K. K. Projection exposure apparatus
JP2516194B2 (ja) * 1984-06-11 1996-07-10 株式会社日立製作所 投影露光方法
JPS6179228A (ja) 1984-09-26 1986-04-22 Nippon Kogaku Kk <Nikon> 投影光学装置
JPS6232613A (ja) * 1985-08-05 1987-02-12 Canon Inc 投影露光装置
JPH0712012B2 (ja) * 1985-12-11 1995-02-08 株式会社ニコン 投影露光装置
US5337097A (en) * 1985-12-26 1994-08-09 Nippon Kogaku K.K. Projection optical apparatus
US4825247A (en) 1987-02-16 1989-04-25 Canon Kabushiki Kaisha Projection exposure apparatus
JPH0628227B2 (ja) * 1987-10-06 1994-04-13 株式会社日立製作所 半導体露光装置
JP3084332B2 (ja) 1993-01-19 2000-09-04 キヤノン株式会社 露光装置
US5559584A (en) * 1993-03-08 1996-09-24 Nikon Corporation Exposure apparatus
US5696623A (en) 1993-08-05 1997-12-09 Fujitsu Limited UV exposure with elongated service lifetime
FR2708757B1 (fr) 1993-08-05 1997-05-09 Fujitsu Ltd Procédé et appareil d'exposition par de la lumière ultraviolette.
JP3500619B2 (ja) * 1993-10-28 2004-02-23 株式会社ニコン 投影露光装置
JP3365571B2 (ja) * 1993-11-10 2003-01-14 株式会社ニコン 光学式計測装置及び露光装置
DE69535412D1 (de) * 1994-04-08 2007-04-12 Canon Kk Verarbeitungssystem zur Herstellung von Halbleiterbauelementen
US5986744A (en) * 1995-02-17 1999-11-16 Nikon Corporation Projection optical system, illumination apparatus, and exposure apparatus
JP3402850B2 (ja) 1995-05-09 2003-05-06 キヤノン株式会社 投影露光装置及びそれを用いたデバイスの製造方法
JP4011643B2 (ja) * 1996-01-05 2007-11-21 キヤノン株式会社 半導体製造装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008252117A (ja) * 1999-11-05 2008-10-16 Asml Netherlands Bv リソグラフィ装置
KR20030012297A (ko) * 2001-07-31 2003-02-12 주식회사 하이닉스반도체 반도체 스테퍼 설비의 렌즈 온도 조절 장치
JP2019057640A (ja) * 2017-09-21 2019-04-11 株式会社Ｓｃｒｅｅｎホールディングス 露光装置、基板処理装置、露光方法および基板処理方法

Also Published As

Publication number Publication date
US6222610B1 (en) 2001-04-24
US6686989B2 (en) 2004-02-03
US20020135744A1 (en) 2002-09-26
US20010019400A1 (en) 2001-09-06
EP0867774A2 (en) 1998-09-30
EP0867774A3 (en) 2000-05-17

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