JPH10232197A - レーザー耐久性評価方法 - Google Patents

レーザー耐久性評価方法

Info

Publication number
JPH10232197A
JPH10232197A JP9034705A JP3470597A JPH10232197A JP H10232197 A JPH10232197 A JP H10232197A JP 9034705 A JP9034705 A JP 9034705A JP 3470597 A JP3470597 A JP 3470597A JP H10232197 A JPH10232197 A JP H10232197A
Authority
JP
Japan
Prior art keywords
light
absorption
sample
film
fluctuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9034705A
Other languages
English (en)
Japanese (ja)
Inventor
Satoru Oshikawa
識 押川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9034705A priority Critical patent/JPH10232197A/ja
Priority to EP98102804A priority patent/EP0866331A3/fr
Publication of JPH10232197A publication Critical patent/JPH10232197A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
    • G01N17/004—Investigating resistance of materials to the weather, to corrosion, or to light to light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Ecology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Environmental Sciences (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
JP9034705A 1997-02-19 1997-02-19 レーザー耐久性評価方法 Pending JPH10232197A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9034705A JPH10232197A (ja) 1997-02-19 1997-02-19 レーザー耐久性評価方法
EP98102804A EP0866331A3 (fr) 1997-02-19 1998-02-18 Appareil et procédé pour l'évaluation de résistance d'un matàriau optique à la détérioration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9034705A JPH10232197A (ja) 1997-02-19 1997-02-19 レーザー耐久性評価方法

Publications (1)

Publication Number Publication Date
JPH10232197A true JPH10232197A (ja) 1998-09-02

Family

ID=12421782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9034705A Pending JPH10232197A (ja) 1997-02-19 1997-02-19 レーザー耐久性評価方法

Country Status (2)

Country Link
EP (1) EP0866331A3 (fr)
JP (1) JPH10232197A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10225842A1 (de) * 2002-06-04 2003-12-24 Zeiss Carl Smt Ag Verfahren und Vorrichtung zur Bestimmung der Strahlungsbeständigkeit eines optischen Materials

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10331589B3 (de) 2003-07-09 2005-03-24 Schott Ag Verfahren zur quantitativen Bestimmung der Pulslaserbeständigkeit von synthetischem Quarzglas

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD293891A5 (de) * 1990-04-17 1991-09-12 Carl Zeiss Jena Gmbh,De Anordnung zur bestimmung der absorption und der laserfestigkeit von optischen schichten

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10225842A1 (de) * 2002-06-04 2003-12-24 Zeiss Carl Smt Ag Verfahren und Vorrichtung zur Bestimmung der Strahlungsbeständigkeit eines optischen Materials
US6734970B2 (en) 2002-06-04 2004-05-11 Carl Zeiss Semiconductor Manufacturing Technologuies Ag Method and a device for determining the radiation-damage resistance of an optical material

Also Published As

Publication number Publication date
EP0866331A2 (fr) 1998-09-23
EP0866331A3 (fr) 1999-01-20

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