JPH10158866A - Transportation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transportation device with which the generation of a liquid pool is prevented, the contact of transporting rollers with circuit forming surfaces is averted, medicinal liquids, etc., are extremely uniformly injected and the mingling of the liquid between stages is prevented. SOLUTION: This transportation device 11 is used in a production stage for thin panels E formed with the circuits on the substrate surfaces. While the panels E are transported, the panels are subjected to a medicinal liquid treatment and washing treatment. The panels E are slightly inclined from perpendicular and the circuit forming surfaces D on the front surfaces are directed upward and rear surfaces P of the panels are directed downward. While the rear surfaces P and bottom ends Q are held by a transporting device 12, the medicinal liquids, water, etc., are injected from spraying nozzles 13 toward the panels. The spraying nozzles 13 are arranged to incline vertically and make oscillation motion. Slit-like air nozzles which inject air respectively upstream and downstream are interposed between the two transportation treating devices 11 on the upstream and the downstream.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a transport processing apparatus. That is, the present invention relates to a transport processing apparatus that performs processing using a liquid such as a chemical solution while transporting a thin panel.

[0002]

2. Description of the Related Art First, the technical background will be described. FIG.
FIG. 0 (1) is a plan view of the printed wiring board, and FIG. 10 (2) is an enlarged sectional explanatory view of the liquid crystal display. The printed wiring board A has recently become increasingly thinner and more dense. That is, the printed wiring board A
Is 550mm × 550mm or 500mm × 30
It has a dimension of about 0 mm, and its thickness is becoming extremely thin, from about 1.0 mm to about 0.8 mm, and even about 0.4 mm. The printed wiring board A is cut, drilled, polished, through-hole plated, polished, coated with an etching resist, dried or adhered, exposed, phenomena, etching, resist stripping of a circuit portion, and the like. It is manufactured by following. In a manufacturing process such as the phenomenon, etching, and peeling of the printed wiring board A, a chemical solution such as a developing solution, a corrosive solution, and a stripping solution is jetted while the printed wiring board A is being conveyed. (Chemical treatment) is performed, and a rinsing process and a drying process are performed by spraying water, so that a panel as a printed wiring board A on which a circuit B is formed on a circuit forming surface D on the surface of the insulating substrate C E is obtained.

A panel E of an LCD / liquid crystal display H or a circuit forming surface of a glass substrate F provided with a color filter G on which a circuit B such as a colored layer or an electrode is formed on a circuit forming surface D of the glass substrate F. The panel E for PDP / plasma display, etc., in which a circuit B such as a partition wall or an electrode is formed on D, is also extremely thin and large. For example, as typified by liquid crystal color televisions and personal computers, liquid crystal displays H and plasma displays have recently become ultra-thin for the purpose of weight reduction, and have become increasingly larger in size.
Those having sizes such as 0 inches and 50 inches are also increasing. The circuit B is mounted on a thin glass substrate F used for such a liquid crystal display H or a plasma display.
E formed of a color filter G on which a circuit B is formed, or a panel E formed of a circuit B formed on a thin glass substrate F.
Are manufactured by performing processes such as development, etching, washing with water, and drying by a manufacturing process according to the panel E as the printed wiring board A, and performing a chemical solution treatment and a washing process, respectively. The technical background is as described above.

[0004] By the way, such a chemical solution treatment and a water washing treatment of the panel E have been conventionally performed as follows. FIG.
FIG. 9 is a side view illustrating an example of a conventional transport processing apparatus of this type, and FIG. 9 is a front view illustrating another example. Conventionally, a liquid J such as a developing solution, a corrosive liquid, a stripping liquid, or a liquid such as water K is jetted while a thin panel E is transported by using such a transport processing apparatus 1 or 2 to perform a chemical processing (chemical treatment). Process) and a rinsing process, thereby producing a panel E in which various circuits B are formed on a circuit forming surface D such as an insulating substrate C or a glass substrate F.

[0005] First, the conventional example shown in FIG. That is, in the transport processing apparatus 1, the transport rollers 4 are horizontally arranged as the transport apparatus 3 and are rotationally driven, so that the printed wiring board A and other panels E are horizontally moved on the transport rollers 4. In other words, while being transported in the horizontal posture,
The chemical solution J and water K are sprayed from a large number of spray nozzles 5 onto the circuit forming surface D on the surface, and the chemical solution treatment and the water washing process are performed.

[0009] The conventional example shown in FIG. 9 comprises a vertical and vertical transport processing apparatus 2 and has been recently developed. In the transport processing device 2, the transport rollers 4 of the transport device 6 are disposed vertically along the transport direction, and are disposed so as to face left and right, and are rotationally driven. The printed wiring board A and the other panels E are sandwiched from both sides by the respective transport rollers 4 and transported in a vertically standing vertical posture, and a large number of the rotation-forming surfaces D on the surface thereof. The chemical solution J and the water K are jetted from the spray nozzle 5 of, and the chemical solution treatment and the water washing process are performed. In the figure, 7 is a motor, 8 is a drive transmission mechanism, 9 is a vertical shaft on which the transport roller 4 is disposed, and 10 is a lower roller that holds the lower end of the panel E to be transported.

[0007]

The following problems have been pointed out in such a conventional example.
First, in the horizontal / horizontal-type transport processing apparatus 1 shown in FIG. That is, in the transport processing apparatus 1, the printed circuit board A and other panels E which are transported in a horizontal or horizontal posture by the transport rollers 4 of the transport apparatus 3, and the circuit forming surface D which is the upper surface thereof, Since the chemical solution J, water K, and the like are sprayed from the spray nozzle 5, the printed wiring board A to be conveyed
Pool L is likely to be generated and retained on the circuit forming surface D on the panel E and on the other part, especially on the central portion thereof. And
Due to such a liquid pool L, a large amount of the chemical liquid J and water K to be used is required, and at the same time, the chemical liquid processing and the washing processing of the printed wiring board A and other panels E are performed. Efficiency in which time is extended
Efficiency issues were pointed out.

Further, due to such a liquid pool L,
For example, the uniformity of the chemical solution treatment in each of the development, etching, and stripping steps is hindered, and thus the width of the circuit B to be formed may be excessive, insufficient, error, uneven, or defective, and the electric resistance value may not be constant. A problem has arisen in the accuracy of the circuit B, which has been increasing in density, complexity, and miniaturization, and the yield of products has also deteriorated. Further, in the water washing step, it is difficult to perform the water washing itself smoothly due to such a liquid pool L. Further, in the next drying step, the water removal / drying of the liquid pool L portion is not smoothly performed, Drying unevenness occurs and the circuit forming surface D
Then, it was pointed out that a halftone dot pattern was formed on the circuit B. Thus, from such a viewpoint, a problem arises in the accuracy of the circuit B, and the product yield is deteriorated.

Second, in the vertical and vertical transport processing apparatus 2 shown in FIG.
Have contacted and adversely affect the formed circuit B. That is, in the transport processing device 2, the printed wiring board A and the other panel E are sandwiched from both sides by the transport rollers 4 of the transport device 6, and are transported in a vertically standing vertical posture, and the one-sided surface thereof. A chemical solution J, water K, or the like is sprayed from the spray nozzle 5 to the circuit forming surface D of FIG. As described above, since the transport roller 4 is always in contact with the circuit forming surface D of the printed wiring board A or the other panel E and with the circuit B to be formed, the circuit B
Often had a physical adverse effect. In addition, since the transport roller 4 is interposed between each spray nozzle 5 and the circuit forming surface D and the circuit B, the portion shaded by the transport roller 4 has the chemical J from the spray nozzle 5 and the like. It was pointed out that water K would be blocked and blocked. Therefore, even from these aspects, the uniformity of chemical solution treatment is hindered, and the smooth execution of water washing is hindered,
As a result, a problem arises in the accuracy of the circuit B, which has been increased in density, complexity, and miniaturization, and the product yield has deteriorated.

In view of such circumstances, the present invention has been made as a result of intense research efforts of the inventor in order to solve the above-mentioned problems of the prior art. A liquid such as a chemical liquid is sprayed from the spray nozzle onto the circuit forming surface while the lower end is held and conveyed.
Thirdly, it is an object of the present invention to propose a transport processing device in which a transport roller does not come into contact with a circuit forming surface, and thirdly, these can be easily and easily realized. Furthermore, in the fifth aspect, by arranging the spray nozzles at an angle and performing the swing operation, fourthly, in particular, uniformity of the chemical solution treatment and smooth execution of the water washing are ensured. In 6, the slit-shaped air nozzles directed to the upstream side and the downstream side are interposed between the continuously disposed transfer processing devices. It is also an object to propose a transport processing device which is prevented.

[0011]

The technical means of the present invention for achieving this object is as follows. First, claim 1
Is as follows. That is, the transport processing apparatus according to the first aspect is used in a manufacturing process of a thin panel having a circuit formed on the surface of a substrate, and performs processing using a liquid such as a chemical solution while transporting the panel. The panel is tilted with the front side of the circuit forming surface upward and the back side downward, and a transfer device for holding and transferring the back surface and the lower end, and a position facing the circuit forming surface of the panel to be transferred. And a number of spray nozzles for performing predetermined processing by ejecting the liquid.

Next, claim 2 is as follows. That is, in the transport processing apparatus according to the second aspect of the present invention, in the transport processing apparatus according to the first aspect, the panel is a printed circuit board having a circuit formed on a circuit forming surface of an insulating substrate or a glass substrate circuit. A panel for a liquid crystal display provided with a color filter in which a circuit such as a colored layer or an electrode is formed on a formation surface, or a panel for a plasma display in which a circuit such as a partition or an electrode is formed on a circuit formation surface of a glass substrate, Etc. are targeted. Claim 3 is as follows. That is, the transport processing apparatus according to the third aspect is the transport processing apparatus according to the first aspect,
The panel is characterized by being inclined at a slight inclination angle with respect to the vertical.

Next, claim 4 is as follows. That is, the transport processing apparatus according to claim 4 is the transport processing apparatus according to claim 1, wherein the transport apparatus includes an inclined vertical conveyor that leans and holds the rear surface of the inclined panel, and an inclined vertical conveyor. And a lower conveyor for supporting and holding the lower end of the panel. Claim 5 is as follows. That is, in the transport processing apparatus according to the fifth aspect, in the transport processing apparatus according to the first aspect, a large number of the spray nozzles are linearly arranged in the transport direction, and the spray nozzles are vertically displaced from each other. And an up-down swinging motion is performed.

Next, claim 6 is as follows. That is, the transport processing apparatus according to claim 6 is the transport processing apparatus according to claim 1, wherein two sets are continuously disposed so as to be used sequentially, and a slit-shaped air is provided therebetween. Nozzles are installed vertically and parallel. The air nozzle is provided with a height dimension for injecting air to the entire upper and lower sides of the panel to be conveyed, and the upstream nozzles are directed to the upstream side in the conveying direction from a right angle to the panel, Is directed downstream from the right angle in the transport direction, and injects air in two directions. Claim 7 is as follows. That is,
In the transfer processing device according to claim 7, in the transfer processing device according to claim 4, the vertical conveyor and the lower conveyor are both roller conveyors having transfer rollers, and at least the vertical conveyor is driven to rotate. And the lower conveyor is inclined with respect to the horizontal at the same angle as the inclination of the vertical conveyor with respect to the vertical.

As described above, this transport processing apparatus is used in a process of manufacturing a thin panel having a circuit formed on the surface of a substrate, such as a printed wiring board, a panel having a color filter for a liquid crystal display, and a panel for a plasma display. Used to carry out chemical solution treatment and water washing treatment while transporting the panel. Then, the panel is slightly inclined, for example, from the vertical, the circuit forming surface on the front surface is inclined upward with the back surface downward, and the conveyance device holds and conveys the back surface and the lower end. This transport device is, for example, a roller conveyor that is provided with transport rollers and is inclined, and a vertical conveyor that leans and holds the back surface of the panel and a lower conveyor that supports and holds the lower end of the panel are used. Then, a liquid such as a chemical solution or water is sprayed from a large number of spray nozzles onto the circuit forming surface on the surface of the panel to be transported. As the spray nozzle, for example, a nozzle that is arranged so as to be vertically inclined along the transport direction and that swings vertically is used. Further, a slit-shaped air nozzle is interposed between such continuously arranged transfer processing devices, and jets air in two directions, an upstream side and a downstream side.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on embodiments of the invention shown in the drawings. FIG. 1, FIG. 2,
3, 4, 5, 6, 7, etc. are provided for describing the embodiment of the present invention.

FIG. 1 is a front view, FIG. 2 is an upstream side view, FIG. 3 is a downstream side view, and FIG. 4 is a plan view. FIG. 5 (1) is a front view of the main part, FIG. 5 (2) is a side view of the main part, FIG. 6 (1) is a plan view of the main part, and FIG. The figure is an enlarged view of the figure.
FIG. 7A is an explanatory front view showing an air nozzle and the like, and FIG. 7B is an explanatory plan view showing an air nozzle and the like.

The transfer processing apparatus 11 is used in a manufacturing process of a thin panel E in which a circuit B is formed on the surface of a substrate such as an insulating substrate C or a glass substrate F.
Processing with a liquid such as a chemical solution J is performed. As such a panel E, for example, as shown in FIG. 10A, a printed wiring board A in which a circuit B is formed on a circuit forming surface D of an insulating substrate C, or FIG. , A panel E for a liquid crystal display H having a color filter G in which a circuit B such as a colored layer or an electrode is formed on a circuit forming surface D of a glass substrate F, or a circuit forming surface D of a glass substrate F
A panel E for a plasma display in which a circuit B such as a partition wall and an electrode is formed, and other panels E are targeted.

First, a printed wiring board A (see FIG. 10A), which is an example of the panel E, will be described. The printed wiring board A has a wide variety of uses, such as a board for various OA equipment, a multilayer board for a computer, a flexible board for a computer, and the like, and its manufacturing process is also diverse. In recent years, the printed wiring board A has been increasingly reduced in size and weight, ultra-thin, flexible, multi-layered, high-density, miniaturized, highly accurate, and the like of the circuit B. Then, such a printed wiring board A is manufactured, for example, as follows. That is, the printed wiring board A
Include laminating, polishing, cutting, drilling for through holes, polishing, plating, polishing, applying / drying / adhering an etching resist, exposing, developing, etching, etching resist of a circuit B portion; It is manufactured by following steps such as peeling.

These will be described in more detail. First, after copper foil is bonded and laminated on the insulating substrate C by hot pressing or the like, cleaning and polishing are performed, and then the insulating substrate C, which is a copper foil-clad laminate obtained through such a pretreatment step, is obtained. However, after the workpiece is cut into a short piece having the size of the work, and then a through hole is formed, washing and polishing are performed, and then plating is performed. After that, washing, polishing, washing, drying, etc. are performed again, and then, an etching resist, that is, a photosensitive resist serving as an alkali-resistant or acid-resistant protective film is applied and dried to form a coating film. And the circuit B on the circuit forming surface D
After exposure by exposure to a circuit photograph, which is a negative film, the etching resist is exposed and cured to leave a portion of the circuit B, and other unnecessary portions are dissolved and removed by spraying a developing solution.

Thereafter, after washing and drying, the etching resist is hardened by the etching machine, leaving the protected copper foil in the portion of the circuit B, and the etching resist is dissolved and removed as described above. Unnecessary portions of the copper foil are dissolved and removed by spraying the etchant. Then, after the remaining etching resist of the above-described cured circuit B portion is dissolved and removed by spraying the stripping liquid, cleaning and cleaning are performed.
The printed circuit board A on which the predetermined circuit B is formed is obtained after drying. The printed wiring board A is, for example, 550 mm × 550 mm in length and width or 500 mm × 300 mm.
The thickness is about 1.0 mm to 0.8 mm, and more preferably about 0.4 mm.

As described above, in the manufacturing process of the printed wiring board A, which is an example of the panel E, for example, in the steps of development, etching, peeling, etc., the developer, the corrosive liquid, A chemical solution J such as a stripping liquid is sprayed to perform a chemical treatment (chemical treatment), and a water washing process and a drying process by spraying water are performed. Thus, the circuit B is formed on the circuit forming surface D on the surface of the insulating substrate C.
Printed wiring board A as an example of panel E on which is formed
Is obtained. The printed wiring board A is manufactured by following such a process.

Next, as an example of the panel E, a panel E of an LCD / liquid crystal display H having a color filter G on which a circuit B such as a colored layer or an electrode is formed on a circuit forming surface D of a glass substrate F is shown. (FIG. 10 (1)) will be described. As is well known, the LCD / liquid crystal display H has a 2
It has a basic structure in which a liquid crystal W is sealed between two glass substrates F, and the optical properties of the liquid crystal W change according to the applied voltage.
Display characters etc. It has been widely used for liquid crystal color televisions, personal computers, display of various instruments, and the like.
Those with 0 inches and 1 m square are also increasing.

In such a liquid crystal display H, circuits B such as a large number of grids, colored layers, switches, and transparent electrodes (circuits B in a broad sense in the present specification) are formed on the circuit forming surface D of the glass substrate F. However, a panel E having a color filter G embedded and printed is used. Such a panel E is also manufactured by following the steps of phenomena, etching, washing with water, drying and the like by the manufacturing process according to the printed wiring board A, which is the same kind of panel E as described above. Processing is performed. The thickness of the panel E is less than about 1 mm. In FIG. 10 (2), M indicates a polarizing plate, and N indicates a pixel electrode. The panel E for the liquid crystal display H is manufactured by following such a process.

Next, a panel E for a plasma display, which is an example of the panel E, in which a circuit B such as a partition or an electrode is formed on a circuit forming surface D of a glass substrate F will be described. As is well known, a PDP / plasma display is one type of display discharge tube, and has a basic structure in which many partitions, cell spaces, transparent electrodes, switches, resistors, and the like are interposed between two glass substrates F. Each of the enclosed gases is discharged by the applied voltage to form a pixel and display characters and the like. Development for high-definition televisions is underway, and large-size televisions such as 40 inches have been developed. As described above, in the plasma display, many circuits B such as switches, resistors, and transparent electrodes (also referred to as circuits B in a broad sense in the present specification) are printed and formed on the circuit forming surface D of the glass substrate F. Panel E is used. Such a panel E is also manufactured by following the steps of development, etching, washing with water, drying and the like by the manufacturing process according to the printed wiring board A which is the same kind of panel E as described above, and the same chemical treatment and washing with water. Processing is performed. The panel E for a plasma display is manufactured by following such a process.

The transfer processing apparatus 11 includes an insulating substrate C such as a printed wiring board A, a panel E for a liquid crystal display H, and a panel E for a plasma display.
Circuit B is formed on the surface of a substrate such as glass substrate F or
Used in the manufacturing process of the thin panel E. The apparatus further includes a transfer device 12, a spray nozzle 13, an air nozzle 14 interposed between the transfer processing devices 11, and the like, which will be described in detail below.

First, the transfer device 1 of the transfer processing device 11
2 will be described. The transfer device 12 includes a panel E
Is tilted with the front side of the circuit forming surface D facing upward and the back surface P facing downward, and is transported while holding the back surface P and the lower end Q. Panel E has a slight inclination angle θ with respect to the vertical (FIG. 5).
(See FIG. 1A)). The transport device 12 includes an inclined vertical conveyor 15 that leans and holds the back surface P of the inclined panel E and a lower conveyor 16 that supports and holds the lower end Q of the inclined panel E.
And Vertical conveyor 15 and lower conveyor 1
6 comprises a roller conveyor having transport rollers 17 and 18, and at least the vertical conveyor 15 is driven to rotate, and the lower conveyor 16 is at the same angle as the inclination angle θ of the vertical conveyor 15 with respect to the vertical, and It is inclined.

Such a vertical conveyor 15 and the lower conveyor 1
6 is further described in detail. In FIG. 5 and FIG. 6, reference numeral 19 denotes a drive shaft. The drive shaft 19 has an end connected to a drive source such as a motor (not shown) and arranged along the transport direction R. And drive shaft 1
9, a large number of screw gears 20 are fixedly provided at regular intervals. In the illustrated example, the screw gears 20 are alternately fixed to a screw gear 22 fixed to a vertical shaft 21 and a horizontal shaft 23. The fixedly mounted screw gear 24 is screwed and meshed. Each vertical shaft 21 and horizontal shaft 23
Are rotatably supported by the frame 25 via bearings, and are vertically and horizontally erected. Each of the vertical shafts 21 is fixedly provided with a large number of transport rollers 17 made of, for example, wheels, and each of the horizontal shafts 23 is fixedly provided with one transport roller 18.

Thus, as shown in FIGS. 1, 2 and 3 in addition to FIGS. 5 and 6, the vertical conveyor 15 is constituted by such vertical shafts 21 and the transport rollers 17.
The lower conveyor 16 is constituted by each of the horizontal shafts 23 and the transport rollers 18. In the illustrated example, the vertical conveyor 1
Not only 5 but also the lower conveyor 16 is driven to rotate.

As shown in FIGS. 1 and 5 (1) and the like, the vertical conveyor 15, that is, each vertical shaft 21 and the transport roller 17 are inclined at a slight inclination angle θ with respect to the vertical.
It is arranged at an angle. In other words, in the drawing, the panel E is tilted to the right by about 10 degrees with respect to the vertical, and the tilt angle θ is set to an angle sufficient to hold the panel E leaning. Therefore, the vertical conveyor 15 has the panel E
Is tilted, the back surface P facing downward is brought into contact with each of the transport rollers 17, and is held lean on the transport rollers 17, and each of the transport rollers 17 is driven to rotate.
The panel E is transported in the transport direction R.

As shown in FIGS. 1 and 5 (1), the lower conveyor 16, that is, the horizontal shafts 23 and the transport rollers 18 are slightly inclined with respect to the horizontal at the above-mentioned inclination angle θ. Have been. That is, in the drawing, it is inclined to the lower right, and is set so as to be perpendicular to the vertical conveyor 15, the vertical shafts 21, the transport rollers 17, and the like. The lower conveyor 16 abuts the lower end Q of the inclined panel E so as to rest on the respective transport rollers 18, supports and holds the lower end Q, and rotates and drives the respective transport rollers 18, thereby causing the above-described vertical conveyor E to rotate. The panel E is transported in the transport direction R together with the transport rollers 17 of the conveyor 15. In the illustrated example, the lower conveyor 16 and its horizontal shaft 23, the transport roller 18 and the like have such a slanted configuration. A groove such as a V-groove is formed on the surface of the panel E, and the lower end Q of the panel E is supported and held by the groove. The transfer device 12 of the transfer processing device 11 includes such a vertical conveyor 15 and a lower conveyor 16.

In the examples shown in FIG. 2, FIG. 3, FIG. 4, etc., two sets, that is, two transfer processing devices 11 are arranged continuously so that they can be used sequentially. And FIG.
In the transport processing device 11 on the upstream side in the transport direction R shown in FIG.
The chemical treatment with the chemical J is performed, and in the downstream transfer processing device 11 shown in FIG. That is, in the upstream transfer processing device 11, a chemical solution J such as a developing solution, a corrosive solution, and a stripping solution is injected, and a chemical solution process (chemical process) such as development, etching, and stripping is performed. On the other hand, the water K
Is sprayed, and the washing process is performed. 26 in FIG.
Is an input section located at the most upstream, and 27 in FIG. 3 is a receiving section located at the most downstream. Then, the above-described transport device 1 is passed through the two transport processing devices 11, the input unit 26, the receiving unit 27, and the air knife units 28 and 29 described later.
2 are arranged continuously (note that in FIGS. 2 and 3, the transfer device 12 is not shown with respect to the transfer processing device 11 and the air knives 28 and 29). The transfer device 12
It looks like this.

Next, the spray nozzle 13 of the transfer processing device 11 will be described with reference to FIGS. 1, 2, 3, 4 and the like. The spray nozzle 13 is formed in a hole shape, is opposed to the circuit forming surface D of the panel E to be conveyed, and is provided in a large number to spray a liquid such as a chemical solution J or water K to perform a predetermined process. . A large number of spray nozzles 13 of the transport processing device 11 for injecting the chemical J are arranged in a straight line along the transport direction R, are vertically shifted from each other, and are arranged so as to be totally inclined, and vertically. Swinging motion is performed.

With respect to such a spray nozzle 13,
Further details will be described. First, the spray nozzle 13 of the upstream transfer processing device 11 shown in FIGS. 2 and 1 will be described. The spray nozzle 13 sprays a chemical solution J onto a circuit forming surface D of a panel E transported by the transport device 12 to perform a chemical solution process. That is, as shown in FIG. 1 and the like, a chemical solution tank 30 is provided below the transport processing device 11 and stores a chemical solution J such as a developing solution, a corrosive solution, and a stripping solution. The chemical solution J in the chemical solution tank 30 is branched by a pump 31 through a filter 32, a main pipe 33, etc., to a plurality of vertically arranged spray pipes 34 in a multi-stage manner, and is pressure-fed. Are sprayed from the spray nozzles 13 formed in a large number on the circuit forming surface D of the panel E which is conveyed vertically and conveyed by the conveying device 12. After flowing down the circuit forming surface D of the panel E, the chemical solution J is collected again in the lower chemical solution tank 30, and is circulated again afterwards. Reference numeral 35 in FIG. 1 and FIG. 2 denotes a pressure gauge attached to each spray pipe 34.

The spray pipes 34 of the transport processing device 11 are arranged in parallel with each other and in multiple vertical stages so as to face the circuit forming surface D of the panel E. At the same time, each spray pipe 34 moves in the transport direction R in the illustrated example.
At a high angle on the upstream side and at a low angle on the downstream side.
It is set to rotate. Thus, the spray nozzles 13 arranged in a straight line with respect to each spray pipe 34 are also vertically inclined with respect to each other and arranged in an inclined manner as a whole, and are all arranged vertically. The swinging swing motion is performed. Upstream transfer processing device 11 shown in FIGS. 1 and 2
Of the spray nozzle 13 is as described above.

On the other hand, the spray nozzle 13 of the downstream transfer processing device 11 shown in FIG. 3 and the like is as follows. The spray nozzle 13 sprays water K onto the circuit forming surface D of the panel E transported by the transport device 12 to perform a water washing process. That is, a washing tank 36 is provided below the transfer processing device 11 and stores water K for washing. Then, the water K in the washing tank 36 is as shown in FIG.
After being branched and pressure-fed to a plurality of vertically arranged spray pipes 39 via a pipe 38 by a pump 37 shown in FIG. The liquid is ejected toward a circuit forming surface D (not shown in FIG. 3) of the panel E which is conveyed vertically and inclined by the conveyance device 12. Then, the jetted water K flows down the circuit forming surface D of the panel E, is collected again in the lower washing tank 36, and is thereafter appropriately circulated and used. The downstream-side transfer processing device 11 shown in FIG.
Of the spray nozzle 13 is as described above. The spray nozzle 13 is configured as described above.

Next, the air knife section 28 will be described. In FIG. 4, reference numeral 40 denotes a blower, that is, a blower. The blown air from the blower 40 is supplied via an air pipe (not shown) to the air knife section 28 shown in FIGS.
To the wind tube 41. The air knife section 28 and the air tube 41 are interposed between the upstream transfer processing device 11 shown in FIG. 2 and the downstream transfer processing device 11 shown in FIG. In the air knife section 28, slit-shaped air nozzles 14 are vertically formed in parallel at the upstream end and the downstream end in the transport direction R of the air duct 41, respectively. The two air nozzles 14 have a height dimension for injecting air to the entire upper and lower sides of the panel E to be conveyed, and the air nozzle 14 closer to the panel E is located at a right angle to the upstream side in the conveying direction R from the right angle. The air nozzles 14 that are directed downstream are directed from the right angle to the downstream side in the transport direction R, and thereby inject air in two directions. In the illustrated example, the air knife section 28 including the air tube 41 and the air nozzle 14 is used.
Although one set is installed, two or more sets, such as two sets, may be connected and interposed, and three or more air nozzles 14 may be provided in one air tube 41. May be provided and used separately for upstream and downstream. The air knife 28 mainly functions to prevent the chemical solution J and the water K from being mixed between the two transfer processing devices 11. The air knife section 28 is configured as described above.

On the other hand, the air knife section 29 is as follows. In FIG. 4, reference numeral 42 denotes a blower, that is, a blower. The blower blows from the blower 42 via an air pipe (not shown), as shown in FIG. It reaches an air chamber-like air knife portion 29 interposed between 27. In the illustrated example, a plurality of vertically slit air nozzles 43 (a plurality of vertically aligned hole-shaped air nozzles are also possible, not shown) may be provided in the air knife section 29 in parallel. Has been established,
Air is sprayed on the circuit forming surface D of the panel E. This air knife portion 29 mainly drains the circuit forming surface D,
Functions for drying. The air knife section 29 is configured as described above.

The present invention is configured as described above. Then, it becomes as follows. As described above, the transfer processing apparatus 11 includes, for example, the printed wiring board A shown in FIG. 10, the panel E provided with the color filter G for the liquid crystal display H, the panel E for the plasma display, etc. It is used in a manufacturing process of a thin panel E in which a circuit B is formed on the surface of a substrate such as F, and performs a chemical solution treatment, a water washing process, and the like while transporting such a panel E. Then, as shown in FIG. 1 and FIG.
The panel E is slightly inclined from the vertical at an inclination angle θ, the circuit forming surface D on the front surface is inclined upward with the rear surface P facing downward, and the transport device 12 holds only the rear surface P and the lower end Q of the panel E. Transport.

In the illustrated example, the transfer device 12 is constituted by a roller conveyor having transfer rollers 17 and 18 and having a slanted roller conveyer. A lower conveyor 16 that supports and holds the lower end Q is used. As shown in FIG. 1, FIG. 2, FIG. 3, etc., the panel E which is conveyed at an angle by such a conveying device 12 is disposed so as to face the circuit forming surface D on the front surface thereof. From a large number of spray nozzles 13, a chemical solution J such as a developing solution, a corrosive solution, and a stripping solution.
And a liquid such as water K. As the spray nozzle 13, for example, as shown in FIG. 2, a spray nozzle that is arranged so as to be vertically inclined as a whole along the transport direction R and that performs a swinging swing operation vertically is used. Further, an air knife section 28 having slit-shaped air nozzles 14 respectively directed to the upstream side and the downstream side is provided between both the upstream and downstream transfer processing apparatuses 11 which are sequentially and sequentially arranged. It is interposed, and is configured to inject air in two directions, the upstream side and the downstream side.

In the illustrated example, as shown in FIG. 2, FIG. 3, and FIG.
An input section 26, a transport processing apparatus 11 for performing a chemical solution process, an air knife section 28, a transport processing apparatus 11 for performing a washing process, an air knife section 29, and a receiving section 27 are arranged in this order.
Then, in this transport processing apparatus 11, the following first, second, third, fourth, and fifth are performed.

First, in the transfer processing device 11,
A thin panel E such as a printed wiring board A, a panel E having a color filter G for a liquid crystal display H, and a panel E for a plasma display is transported while being inclined.
A liquid such as a chemical solution J or water K is jetted onto the circuit forming surface D. The ejected liquid hits the circuit forming surface D of the inclined panel E, and then flows down from above to below along the inclination, so that the liquid is generated when the panel E is transported in a horizontal horizontal posture. The liquid pool L (see FIG. 8) does not occur. Further, since the panel E is transported in a slightly inclined vertical state as described above, the panel E is transported in a horizontal lateral posture with respect to the panel E, which is becoming extremely thin while trying to reduce its weight while increasing its size. The slack which tends to occur on the surface is also prevented.

Second, in the transfer processing device 11,
The panel E is conveyed while being held by the vertical conveyor 15 of the conveying device 12 and the conveying rollers 17 and 18 of the lower conveyor 16 only on the back surface P and the lower end Q thereof. Then, a liquid such as a chemical solution J or water K is ejected from the spray nozzle 13 to the circuit forming surface D which is not held by the transport rollers 17 and 18 or the like and is in a non-contact state and an open state. As described above, the circuit forming surface D and the circuit B are maintained in the non-contact state and the open state during the chemical solution treatment and the water washing process, and the chemical solution J and the water K are completely shut off and injected without being blocked.

Third, the transport processing device 11
Transport roller 1 for holding back surface P and lower end Q of panel E
It has a simple configuration including a transfer processing device 12 including a vertical conveyor 15 and a lower conveyor 16 having an inclined structure 7 and 18 and a plurality of spray nozzles 13 positioned opposite the circuit forming surface D of the panel E.

Fourthly, the spray nozzles 13 of the transport processing device 11 for further performing the chemical solution processing are arranged so as to be vertically inclined along the transport direction R, and perform a swinging swing operation up and down. Therefore, the chemical liquid J is sprayed very uniformly on the circuit forming surface D of the panel E, and thus the chemical liquid processing is performed very uniformly.

Fifth, the slit-shaped air nozzles 14 of the air knife section 28 are further provided with a transfer processing device 11 for continuously performing an upstream chemical solution treatment and a transfer processing device 11 for performing a water washing process. It is interposed between. Then, with the air jetted from the air nozzle 14 toward the upstream side, the chemical solution J remaining on the circuit forming surface D of the panel E in the upstream side transfer processing device 11 is removed, and
Chemical solution J which is injected by the upstream transfer processing device 11 and is likely to flow downstream via the circuit forming surface D of the panel E
Is pushed back. On the other hand, with the air jetted from the air nozzle 14 directed to the downstream side, the air is jetted by the downstream transfer processing device 11 and tends to flow backward from the downstream side to the upstream side via the circuit forming surface D of the panel E. Water K is also pushed back. In this way, mixing of the chemical solution J and the water K between the upstream and downstream transport processing apparatuses 11 is reliably prevented.

[0047]

As described above, the transport processing apparatus according to the present invention uses the transport apparatus to transport the panel while tilting the panel and holding the rear surface and the lower end of the panel.
The following effects are exhibited by ejecting a liquid such as a chemical liquid onto the circuit forming surface.

First, liquid accumulation is prevented. That is, in this transfer processing apparatus, a liquid such as a chemical solution or water is ejected while a printed wiring board, a panel having a color filter for a liquid crystal display, a panel for a plasma display, and other thin panels are conveyed at an angle. Is done. Accordingly, the injected liquid flows down along the circuit forming surface of the inclined panel, so that liquid pool does not occur.

Therefore, compared with the above-described conventional horizontal and horizontal type transfer processing apparatus in which liquid pools have been generated, the amount of chemicals and water used can be significantly reduced. For example, the amount of water required for washing is required. Can be reduced to less than half, and the processing time of the chemical solution treatment and the water washing treatment can be greatly shortened, resulting in excellent efficiency and efficiency. Further, due to the elimination of the liquid pool, the uniformity of the chemical solution treatment in, for example, each of the development, etching, and stripping steps is ensured. The occurrence of over / shortage, errors, unevenness, defects, and the like of the circuit width is prevented, and the electric resistance value is also stabilized.
As a result, the circuit accuracy of printed wiring boards, panels with color filters for liquid crystal displays, panels for plasma displays, etc., which are becoming denser, more complex, and finer, is improving, and the product's process is improved. Even better.

Further, also in the water washing step, the water washing is smoothly performed due to the elimination of the liquid pool, and in the next drying step, the water removal and drying are performed smoothly. And drying unevenness is avoided. Therefore, a situation in which a spot-like half-point pattern is formed on the circuit forming surface or the circuit, which was pointed out in the above-described conventional example, does not occur. From this aspect, the accuracy of the circuit is improved and the product yield is improved. improves.

Second, the transport roller does not come into contact with the circuit forming surface. That is, in this transport processing apparatus, a printed wiring board, a panel having a color filter for a liquid crystal display, a panel for a plasma display, and other thin panels are transported while holding only the back surface and the lower end, and are transported to transport rollers and the like. Liquids such as chemicals and water are sprayed from a spray nozzle onto a circuit forming surface which is a surface in a non-contact state and an open state which is not held at all.

Therefore, as in the above-described conventional vertical and vertical transport processing apparatus, the transport roller is always in contact with the surface of the circuit forming surface, so that the formed circuit is physically adversely affected. Is surely avoided.
Also, there is no intervening roller between the spray nozzles, the circuit forming surface and the circuit, so that the liquid medicine and water from the spray nozzles are not shut off and blocked. Therefore, from this aspect, uniformity of chemical solution treatment and smooth implementation of water washing are ensured,
In a panel such as a printed wiring board, a panel provided with a color filter for a liquid crystal display, a panel for a plasma display, and the like, which is becoming more complicated and miniaturized, the accuracy of the circuit is improved and the product yield is also improved.

Third, and yet they are easily and easily realized. That is, this transport processing device is a transport device that transports while holding only the back surface or lower end while tilting the panel,
For example, it has a simple configuration including a vertical conveyor composed of an inclined roller conveyor, a lower conveyor, and a large number of spray nozzles opposed to the circuit forming surface on the panel surface. Therefore, the first and second points described above are easily realized.

Further, in the fifth aspect, the spray nozzles are arranged so as to be vertically inclined while being entirely along the transport direction, and the swing nozzle is operated to swing vertically. The following effects are exhibited.

Fourth, in particular, uniformity of chemical solution treatment and smooth implementation of water washing are ensured. That is, in this transport processing apparatus, a liquid such as a chemical liquid is ejected extremely uniformly to the circuit forming surface of the panel due to the inclination and swing of the spray nozzle. Therefore, from this aspect, in particular, the uniformity of the chemical solution treatment is ensured, the accuracy of the circuit is improved, and the product yield is improved.

According to the present invention, a slit-shaped air nozzle directed to the upstream side and the downstream side is interposed between the two continuously disposed transfer processing devices, so that air is supplied in two directions. The following effects are exhibited in addition to the above-mentioned effects.

Fifth, mixing of liquids between steps is prevented. That is, the liquid such as a chemical remaining on the circuit forming surface, which is the surface of the panel, is removed and jetted by the air jetted from the air nozzle toward the upstream side between the transfer processing devices. A liquid such as a chemical liquid which is going to flow downstream via the circuit forming surface of the panel is pushed back. Further, a liquid such as a chemical liquid which is sprayed and flows backward from the downstream side toward the upstream side through the circuit forming surface of the panel is pushed back by the air sprayed from the air nozzle toward the downstream side. Thus, the liquid used in the upstream transfer processing device and the liquid used in the downstream transfer processing device are reliably prevented from being mixed via the circuit forming surface of the panel. From this point of view, uniformity of chemical solution treatment and smooth execution of water washing are ensured, circuit accuracy is improved, and product yield is improved.
As described above, the effects exhibited by the present invention are remarkable and large, for example, all the problems existing in this type of conventional example are solved.

[Brief description of the drawings]

FIG. 1 is an explanatory front view for explaining an embodiment of a transport processing apparatus according to the present invention;

FIG. 2 is an explanatory side view of an upstream side for explaining the embodiment of the present invention;

FIG. 3 is an explanatory side view of a downstream side for explaining the embodiment of the present invention;

FIG. 4 is an explanatory plan view for explaining the embodiment of the present invention;

FIGS. 5A and 5B are explanatory views of an embodiment of the present invention, in which FIG. 1A is an explanatory front view of a main part, and FIG.

FIGS. 6A and 6B are views for explaining the embodiment of the present invention, wherein FIG. 1A is an explanatory plan view of a main part, and FIG.

FIGS. 7A and 7B are views for explaining the embodiment of the present invention, in which FIG. 1A is a front view showing an air nozzle and the like, and FIG. 7B is a plan view showing the air nozzle and the like.

FIG. 8 is an explanatory side view of an example of this type of conventional transport processing apparatus.

FIG. 9 is an explanatory front view of another example of the conventional transport processing apparatus of this type.

FIG. 10 is a plan view of a printed wiring board;
FIG. 2 is an enlarged cross-sectional explanatory view of the liquid crystal display.

[Explanation of symbols]

 Reference Signs List 11 transport processing device 12 transport device 13 spray nozzle 14 air nozzle 15 vertical conveyor 16 lower conveyor 17 transport roller 18 transport roller A printed wiring board B circuit C insulating substrate D circuit forming surface E panel F glass substrate G color filter H liquid crystal display J Chemical liquid P Back side Q Lower end R Transport direction θ Tilt angle

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁶ Identification code FI // H01L 21/027 H01L 21/30 569D

Claims (7)

[Claims] 1. A transport processing apparatus used in a manufacturing process of a thin panel having a circuit formed on a surface of a substrate, wherein the panel is processed by a liquid such as a chemical solution while transporting the panel. The circuit forming surface is inclined upward with the back surface facing downward, and a conveying device that holds and conveys the rear surface and the lower end, and is located opposite the circuit forming surface of the panel to be conveyed, and ejects the liquid. And a plurality of spray nozzles for performing a predetermined process. 2. The transfer processing apparatus according to claim 1, wherein the panel is a printed wiring board on which a circuit is formed on a circuit forming surface of an insulating substrate, or a colored layer or an electrode is formed on a circuit forming surface of a glass substrate. A panel for a liquid crystal display provided with a color filter on which a circuit such as a circuit is formed, or a panel for a plasma display in which a circuit such as a partition or an electrode is formed on a circuit forming surface of a glass substrate. A transport processing device. 3. The transport processing apparatus according to claim 1, wherein the panel is inclined at a slight angle with respect to the vertical. 4. The transport processing device according to claim 1, wherein the transport device supports an inclined vertical conveyor which leans and holds the back surface of the inclined panel, and supports a lower end of the inclined panel. And a lower conveyor for holding. 5. The transport processing apparatus according to claim 1, wherein the spray nozzles are arranged in a large number in a straight line along the transport direction, and the spray nozzles are vertically displaced from each other and are arranged so as to be entirely inclined. And swinging up and down,
A conveyance processing device characterized by the above-mentioned. 6. The transport processing apparatus according to claim 1, wherein two sets are arranged continuously so that they can be used sequentially, and a slit-shaped air nozzle is interposed between the two sets in a vertically parallel manner. The air nozzle is provided with a height dimension for injecting air to the entire upper and lower sides of the panel to be conveyed, and the one closer to the panel with respect to the upstream is directed from the right angle to the upstream side in the conveying direction. The downstream processing device is directed to the downstream side in the transport direction from a right angle, and injects air in two directions. 7. The transport processing apparatus according to claim 4, wherein the vertical conveyor and the lower conveyor are both roller conveyors having transport rollers, and at least the vertical conveyor is driven to rotate, and the lower conveyor is Is inclined with respect to the horizontal at the same angle as the inclination of the vertical conveyor with respect to the vertical.