JPH10135168A - 紫外線照射装置 - Google Patents

紫外線照射装置

Info

Publication number
JPH10135168A
JPH10135168A JP28996696A JP28996696A JPH10135168A JP H10135168 A JPH10135168 A JP H10135168A JP 28996696 A JP28996696 A JP 28996696A JP 28996696 A JP28996696 A JP 28996696A JP H10135168 A JPH10135168 A JP H10135168A
Authority
JP
Japan
Prior art keywords
substrate
ultraviolet
carry
housing
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28996696A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10135168A5 (enExample
Inventor
Naoki Wajima
直樹 輪島
Akira Hara
暁 原
Naoaki Sakurai
直明 桜井
Hisashi Nishigaki
寿 西垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Mechatronics Corp
Original Assignee
Toshiba Corp
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Shibaura Engineering Works Co Ltd filed Critical Toshiba Corp
Priority to JP28996696A priority Critical patent/JPH10135168A/ja
Publication of JPH10135168A publication Critical patent/JPH10135168A/ja
Publication of JPH10135168A5 publication Critical patent/JPH10135168A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP28996696A 1996-10-31 1996-10-31 紫外線照射装置 Pending JPH10135168A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28996696A JPH10135168A (ja) 1996-10-31 1996-10-31 紫外線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28996696A JPH10135168A (ja) 1996-10-31 1996-10-31 紫外線照射装置

Publications (2)

Publication Number Publication Date
JPH10135168A true JPH10135168A (ja) 1998-05-22
JPH10135168A5 JPH10135168A5 (enExample) 2004-10-21

Family

ID=17750039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28996696A Pending JPH10135168A (ja) 1996-10-31 1996-10-31 紫外線照射装置

Country Status (1)

Country Link
JP (1) JPH10135168A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002104333A (ja) * 2000-09-25 2002-04-10 Ishikawajima Harima Heavy Ind Co Ltd 容器の殺菌方法及び装置
JP2003295786A (ja) * 2002-02-01 2003-10-15 Matsushita Electric Ind Co Ltd プラズマディスプレイ装置の製造方法
JP2006511300A (ja) * 2002-12-20 2006-04-06 ステリス インク 対象物をオゾンで処理する方法および装置
KR100831293B1 (ko) * 2000-02-24 2008-05-22 엘지디스플레이 주식회사 드라이 세정기 인라인 반송 시스템
JP2009196720A (ja) * 2009-05-28 2009-09-03 Iwasaki Electric Co Ltd 光パルス殺菌装置
WO2015098387A1 (ja) * 2013-12-25 2015-07-02 ウシオ電機株式会社 光照射装置
JP2020203244A (ja) * 2019-06-14 2020-12-24 株式会社日本フォトサイエンス 有機物汚れ除去装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100831293B1 (ko) * 2000-02-24 2008-05-22 엘지디스플레이 주식회사 드라이 세정기 인라인 반송 시스템
JP2002104333A (ja) * 2000-09-25 2002-04-10 Ishikawajima Harima Heavy Ind Co Ltd 容器の殺菌方法及び装置
JP2003295786A (ja) * 2002-02-01 2003-10-15 Matsushita Electric Ind Co Ltd プラズマディスプレイ装置の製造方法
JP2006511300A (ja) * 2002-12-20 2006-04-06 ステリス インク 対象物をオゾンで処理する方法および装置
JP2009196720A (ja) * 2009-05-28 2009-09-03 Iwasaki Electric Co Ltd 光パルス殺菌装置
WO2015098387A1 (ja) * 2013-12-25 2015-07-02 ウシオ電機株式会社 光照射装置
JP2015120129A (ja) * 2013-12-25 2015-07-02 ウシオ電機株式会社 光照射装置
JP2020203244A (ja) * 2019-06-14 2020-12-24 株式会社日本フォトサイエンス 有機物汚れ除去装置

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