JPH10135168A5 - - Google Patents

Info

Publication number
JPH10135168A5
JPH10135168A5 JP1996289966A JP28996696A JPH10135168A5 JP H10135168 A5 JPH10135168 A5 JP H10135168A5 JP 1996289966 A JP1996289966 A JP 1996289966A JP 28996696 A JP28996696 A JP 28996696A JP H10135168 A5 JPH10135168 A5 JP H10135168A5
Authority
JP
Japan
Prior art keywords
substrate
housing
ultraviolet
irradiation
irradiating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996289966A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10135168A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28996696A priority Critical patent/JPH10135168A/ja
Priority claimed from JP28996696A external-priority patent/JPH10135168A/ja
Publication of JPH10135168A publication Critical patent/JPH10135168A/ja
Publication of JPH10135168A5 publication Critical patent/JPH10135168A5/ja
Pending legal-status Critical Current

Links

JP28996696A 1996-10-31 1996-10-31 紫外線照射装置 Pending JPH10135168A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28996696A JPH10135168A (ja) 1996-10-31 1996-10-31 紫外線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28996696A JPH10135168A (ja) 1996-10-31 1996-10-31 紫外線照射装置

Publications (2)

Publication Number Publication Date
JPH10135168A JPH10135168A (ja) 1998-05-22
JPH10135168A5 true JPH10135168A5 (enExample) 2004-10-21

Family

ID=17750039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28996696A Pending JPH10135168A (ja) 1996-10-31 1996-10-31 紫外線照射装置

Country Status (1)

Country Link
JP (1) JPH10135168A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100831293B1 (ko) * 2000-02-24 2008-05-22 엘지디스플레이 주식회사 드라이 세정기 인라인 반송 시스템
JP2002104333A (ja) * 2000-09-25 2002-04-10 Ishikawajima Harima Heavy Ind Co Ltd 容器の殺菌方法及び装置
JP2003295786A (ja) * 2002-02-01 2003-10-15 Matsushita Electric Ind Co Ltd プラズマディスプレイ装置の製造方法
US6814931B2 (en) * 2002-12-20 2004-11-09 Steris Inc. Method and apparatus for treating an object with ozone
JP2009196720A (ja) * 2009-05-28 2009-09-03 Iwasaki Electric Co Ltd 光パルス殺菌装置
JP5895929B2 (ja) * 2013-12-25 2016-03-30 ウシオ電機株式会社 光照射装置
JP7285554B2 (ja) * 2019-06-14 2023-06-02 株式会社日本フォトサイエンス 有機物汚れ除去装置

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