JPH10133706A - ロボット搬送方法 - Google Patents

ロボット搬送方法

Info

Publication number
JPH10133706A
JPH10133706A JP30548196A JP30548196A JPH10133706A JP H10133706 A JPH10133706 A JP H10133706A JP 30548196 A JP30548196 A JP 30548196A JP 30548196 A JP30548196 A JP 30548196A JP H10133706 A JPH10133706 A JP H10133706A
Authority
JP
Japan
Prior art keywords
robot
host computer
lot
transfer
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30548196A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10133706A5 (enExample
Inventor
Riichi Sotono
利一 外野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UMC Japan Co Ltd
Original Assignee
Nippon Steel Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Semiconductor Corp filed Critical Nippon Steel Semiconductor Corp
Priority to JP30548196A priority Critical patent/JPH10133706A/ja
Publication of JPH10133706A publication Critical patent/JPH10133706A/ja
Publication of JPH10133706A5 publication Critical patent/JPH10133706A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control By Computers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP30548196A 1996-11-01 1996-11-01 ロボット搬送方法 Pending JPH10133706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30548196A JPH10133706A (ja) 1996-11-01 1996-11-01 ロボット搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30548196A JPH10133706A (ja) 1996-11-01 1996-11-01 ロボット搬送方法

Publications (2)

Publication Number Publication Date
JPH10133706A true JPH10133706A (ja) 1998-05-22
JPH10133706A5 JPH10133706A5 (enExample) 2004-11-25

Family

ID=17945685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30548196A Pending JPH10133706A (ja) 1996-11-01 1996-11-01 ロボット搬送方法

Country Status (1)

Country Link
JP (1) JPH10133706A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6298274B1 (en) 1998-11-19 2001-10-02 Oki Electric Industry Co., Ltd. Conveyance system in a semiconductor manufacturing process and method for processing semiconductor wafer therein
KR100538812B1 (ko) * 1999-06-22 2005-12-23 주식회사 하이닉스반도체 반도체 제조를 위한 확산공정에서 자동반송 로봇의 큐 생성시 문제점 해결방법 및 기록매체
KR100603591B1 (ko) 1999-06-30 2006-07-24 주식회사 하이닉스반도체 웨이퍼 카세트의 장비간 반송방법
JP2007251198A (ja) * 2007-05-16 2007-09-27 Oki Electric Ind Co Ltd 半導体ウエハの搬送方法
JP2013016704A (ja) * 2011-07-05 2013-01-24 Canon Inc パターン形成装置、塗布現像装置、それらを用いた基板搬送方法およびデバイスの製造方法
JP2016040631A (ja) * 2015-12-08 2016-03-24 キヤノン株式会社 パターン形成装置、塗布現像装置、それらを用いた基板搬送方法およびデバイスの製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6298274B1 (en) 1998-11-19 2001-10-02 Oki Electric Industry Co., Ltd. Conveyance system in a semiconductor manufacturing process and method for processing semiconductor wafer therein
KR100538812B1 (ko) * 1999-06-22 2005-12-23 주식회사 하이닉스반도체 반도체 제조를 위한 확산공정에서 자동반송 로봇의 큐 생성시 문제점 해결방법 및 기록매체
KR100603591B1 (ko) 1999-06-30 2006-07-24 주식회사 하이닉스반도체 웨이퍼 카세트의 장비간 반송방법
JP2007251198A (ja) * 2007-05-16 2007-09-27 Oki Electric Ind Co Ltd 半導体ウエハの搬送方法
JP2013016704A (ja) * 2011-07-05 2013-01-24 Canon Inc パターン形成装置、塗布現像装置、それらを用いた基板搬送方法およびデバイスの製造方法
JP2016040631A (ja) * 2015-12-08 2016-03-24 キヤノン株式会社 パターン形成装置、塗布現像装置、それらを用いた基板搬送方法およびデバイスの製造方法

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