JPH10133123A - 透過照明型微分干渉顕微鏡 - Google Patents

透過照明型微分干渉顕微鏡

Info

Publication number
JPH10133123A
JPH10133123A JP9208613A JP20861397A JPH10133123A JP H10133123 A JPH10133123 A JP H10133123A JP 9208613 A JP9208613 A JP 9208613A JP 20861397 A JP20861397 A JP 20861397A JP H10133123 A JPH10133123 A JP H10133123A
Authority
JP
Japan
Prior art keywords
birefringent
prism
light
lens
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9208613A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10133123A5 (enExample
Inventor
Tatsuro Otaki
達朗 大瀧
Kumiko Otaki
久美子 大瀧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9208613A priority Critical patent/JPH10133123A/ja
Priority to US08/923,424 priority patent/US6549334B1/en
Publication of JPH10133123A publication Critical patent/JPH10133123A/ja
Publication of JPH10133123A5 publication Critical patent/JPH10133123A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Polarising Elements (AREA)
JP9208613A 1996-09-04 1997-07-16 透過照明型微分干渉顕微鏡 Pending JPH10133123A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9208613A JPH10133123A (ja) 1996-09-04 1997-07-16 透過照明型微分干渉顕微鏡
US08/923,424 US6549334B1 (en) 1996-09-04 1997-09-04 Transmission illumination type differential interference microscope

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP8-255504 1996-09-04
JP25550496 1996-09-04
JP9208613A JPH10133123A (ja) 1996-09-04 1997-07-16 透過照明型微分干渉顕微鏡

Publications (2)

Publication Number Publication Date
JPH10133123A true JPH10133123A (ja) 1998-05-22
JPH10133123A5 JPH10133123A5 (enExample) 2005-05-19

Family

ID=26516935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9208613A Pending JPH10133123A (ja) 1996-09-04 1997-07-16 透過照明型微分干渉顕微鏡

Country Status (2)

Country Link
US (1) US6549334B1 (enExample)
JP (1) JPH10133123A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008058852A (ja) * 2006-09-04 2008-03-13 Nikon Corp 微分干渉顕微鏡

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3868168A (en) * 1973-01-16 1975-02-25 American Optical Corp Combination of birefringent elements for polarizing interferential systems
JPH02151825A (ja) * 1988-12-05 1990-06-11 Olympus Optical Co Ltd 微分干渉顕微鏡
JPH05232384A (ja) * 1992-02-18 1993-09-10 Olympus Optical Co Ltd 干渉顕微鏡
JPH0771918A (ja) 1993-06-14 1995-03-17 Nikon Corp 寸法測定装置
JP3656252B2 (ja) * 1993-07-15 2005-06-08 株式会社ニコン 微分干渉顕微鏡

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008058852A (ja) * 2006-09-04 2008-03-13 Nikon Corp 微分干渉顕微鏡

Also Published As

Publication number Publication date
US6549334B1 (en) 2003-04-15

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