JPH09512075A - マイクロポンプ - Google Patents
マイクロポンプInfo
- Publication number
- JPH09512075A JPH09512075A JP7518936A JP51893695A JPH09512075A JP H09512075 A JPH09512075 A JP H09512075A JP 7518936 A JP7518936 A JP 7518936A JP 51893695 A JP51893695 A JP 51893695A JP H09512075 A JPH09512075 A JP H09512075A
- Authority
- JP
- Japan
- Prior art keywords
- micropump
- pump chamber
- plate
- pump
- volume
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 54
- 230000007423 decrease Effects 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 13
- 238000005459 micromachining Methods 0.000 claims description 12
- 238000001647 drug administration Methods 0.000 claims description 8
- 230000000737 periodic effect Effects 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 2
- 238000005086 pumping Methods 0.000 abstract description 74
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 39
- 229910052710 silicon Inorganic materials 0.000 abstract description 39
- 239000010703 silicon Substances 0.000 abstract description 39
- 239000011521 glass Substances 0.000 abstract description 21
- 230000009467 reduction Effects 0.000 abstract description 7
- 239000003570 air Substances 0.000 description 24
- 230000008859 change Effects 0.000 description 20
- 238000003466 welding Methods 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 239000010408 film Substances 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 238000000206 photolithography Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000004026 adhesive bonding Methods 0.000 description 4
- 239000007943 implant Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 239000003566 sealing material Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 238000007688 edging Methods 0.000 description 2
- 238000005323 electroforming Methods 0.000 description 2
- 229920006335 epoxy glue Polymers 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1077—Flow resistance valves, e.g. without moving parts
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
- A61M5/142—Pressure infusion, e.g. using pumps
- A61M5/14212—Pumping with an aspiration and an expulsion action
- A61M5/14224—Diaphragm type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/1052—Flap valves the valve being formed by one or more flexible elements two flexible elements oscillating around a fixed point
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/02—General characteristics of the apparatus characterised by a particular materials
- A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/02—General characteristics of the apparatus characterised by a particular materials
- A61M2205/0272—Electro-active or magneto-active materials
- A61M2205/0294—Piezoelectric materials
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Hematology (AREA)
- Heart & Thoracic Surgery (AREA)
- Biomedical Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Anesthesiology (AREA)
- Vascular Medicine (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1. 少なくとも一つのベースプレート(2)と、ベースプレートに結合する第 二プレート(6)とを含み、これらのプレートの少なくとも一つを加工してポン プ室(14)を決定し、またポンプ室(14)をマイクロポンプの少なくとも一 つの吸入口(4)に接続する少なくとも一つの流体吸入制御部品(12)と、ポ ンプ室(14)をマイクロポンプの少なくとも一つの吐出口(5)に接続する少 なくとも一つの流体吐出制御部品(16)とを含み、ポンプ室(14)はプレー トの一方に加工された可動壁(36)を含み、この可動壁は、ポンプ室の吸入口 に流体を吸い込む場合あるいはこの流体がポンプ室から吐出口に排出される場合 の相対する双方向に移動可能であり、さらに該可動壁(36)を移動することに よりポンプ室(14)の容積の周期的な減少および増加を引き起こす作動手段( 50)が備えられ、マイクロポンプの内部容積(Vi)は、ポンプ室(14)の 容積(Vp)と、ポンプ室を吸入制御部品(12)に接続するスペース(22) の容積(Ve)と、ポンプ室を吐出制御部品(16)に接続するスペースの容積 (Vs)とを含むマイクロポンプにおいて、ポンプ室(14)と接続スペース( 22、24)は、ポンプ室の容積の減少(△Vp)によるマイクロポンプの内部 容積の減少が、マイクロポンプの内部容積に含まれる気体が流体吐出制御部品( 16)を開けるのに十分な圧力に少なくとも圧縮されることにより、マイクロポ ンプを自動始動するように構成されることを特徴とするマイクロポンプ。 2. ポンプ室(14)と接続スペース(22、24)は、ポンプ室の容積の増 加によるマイクロポンプの内部容積の増加が、流体吐出制御部品(16)を閉じ た後でマイクロポンプ内に残る気体が十分に低い圧力に減圧されて流体吸入制御 部品(12)を開けるように構成されることを特徴とする請求項1に記載のマイ クロポンプ。 3. ポンプ室の容積の減少(△Vp)は、該内部容積(Vi)の30〜100 %、好適には50%以上であり、ポンプ室(14)を吸入制御部品(12)およ び吐出制御部品(16)へ接続する該スペースの容積(Ve、Vs)は、内部容 積(Vi)の30%未満、好適には15%未満であることを特徴とする請求項1 または2に記載のマイクロポンプ。 4. ポンプ室(14)は、ポンプ室が加工されたプレートの中または上でプレ ート中央面側に配置され、吸入制御部品(12)および吐出制御部品(16)は それぞれ、それらが加工されたプレートのポンプ室に最も近い側の中または上に 配置されることを特徴とする請求項1に記載のマイクロポンプ。 5. 吸入および吐出制御部品(12、16)はバルブであり、一つまたは複数 の吸入制御部品(12)は、それが位置するプレートの外側に開き、一つまたは 複数の吐出制御部品(16)は、それが位置するプレートの内側に開くことを特 徴とする請求項4に記載のマイクロポンプ。 6. 吸入制御部品(12)は、吐出制御部品(16)とは異なる構造を有する ことを特徴とする該請求項のいずれか一項に記載のマイクロポンプ。 7. 可動壁(36)が含む堅い中央部(38)は、この堅い中央部(38)と 一体成形されたそれよりも薄い厚さの弾性の縁(40)に囲まれ、ポンプ室(1 4)と相対する可動壁の面に関して突出し、該作動手段(50)と協働すること を特徴とする該請求項のいずれか一項に記載のマイクロポンプ。 8. 該堅い中央部(38)の幅は、可動壁(36)の幅の20〜90%であり 、好適には50〜80%であることを特徴とする請求項7に記載のマイクロポン プ。 9. 第二プレート(6)に結合する少なくとも一つの第三プレート(8)を有 し、作動手段(50)は、第三プレートに可動装着されたモータ部品(52)を 含み、中間部品(64)は、該堅い中央部(38)とモータ部品(52)との間 に配置されることを特徴とする該請求項のいずれか一項に記載のマイクロポンプ 。 10. モータ部品(52)は、該第三プレート(8)の外面に可動装着され、 該中間部品(64)は、開口部(69)によってこの第三プレート(8)を貫通 することを特徴とする請求項9に記載のマイクロポンプ。 11.モータ部品は圧電素子(52)であり、スペース部品(62)を介して第 三プレート(8)の外面に装着されることを特徴とする請求項10に記載のマイ クロポンプ。 12.中間部品(64)はモータ部品(52)と連結する平らな頭部(66)と 、第三プレート(8)を貫通し、その端部によって可動壁(36)に作用する軸 (68)とを含むことを特徴とする請求項10または11のいずれか一項に記載 のマイクロポンプ。 13.中間部品(164)の下面は、堅い中央部(38)と同様の面を有し、該 堅い中央部(38)と接することを特徴とする請求項9に記載のマイクロポンプ 。 14.第三プレート(208)の外面に装着される作動装置(250)によって 弾性的に変形可能であるような厚さの第三プレート(208)を含み、この第三 プレートの内面は、堅い中央部(38)と協働して可動壁(36)を移動できる ことを特徴とする請求項7に記載のマイクロポンプ。 15.作動手段(350、450)は、該可動壁(336、436)に直接装着 された圧電素子(352、452)を含むことを特徴とする請求項1に記載のマ イクロポンプ。 16.可動壁(36、436)の堅い中央部(38、438)は、該第三プレー ト(8)と接するように配され、可動壁(36、436)の流体吸入動作を制限 するストッパ要素を構成することを特徴とする請求項9または15に記載のマイ クロポンプ。 17.可動壁(436)は、休止位置で、ポンプ室(14)の外側に膨らむ形を 有することを特徴とする該請求項のいずれか一項に記載のマイクロポンプ。 18.膨らんだ形の高さは、可動壁(436)によって行われる吸い込み移動に ほぼ対応することを特徴とする請求項17に記載のマイクロポンプ。 19.可動壁(436)の膨らんだ形は、可動壁(436)の背面にある室(4 60)の圧力を下げ、およびまたは可動壁(436)の面に当たる材料の少なく とも一つの層が変形予応力をもたらすことによって生じることを特徴とする請求 項17に記載のマイクロポンプ。 20.ポンプ室(14)の内側に向いた可動壁(36、436)の面は、向かい 合って位置するプレート(2)と当たることにより、流体の排出動作を制限する ことを特徴とする該請求項のいずれか一項によるマイクロポンプ。 21.可動壁(36)の面は、向かい合って位置するプレート(2、8)に該面 が貼り付かないような材料からなる域(42、44)を含むことを特徴とする請 求項1に記載のマイクロポンプ。 22.流体の吸入およびまたは吐出制御部品は、少なくとも一つのバルブ(12 )からなり、このバルブは、バルブの閉位置でV字形を構成するように第二プレ ート(6)に加工された二つのダイアフラム(18)を含み、これらのダイアフ ラム(18)は、バルブの開位置で中央開口部(20)を形成するように隔たる ことを特徴とする該請求項のいずれか一項に記載のマイクロポンプ。 23.流体の吸入およびまたは吐出制御部品は、面のマイクロ加工によって加工 された材料からなる少なくとも一つのバルブ(412)から構成されることを特 徴とする該請求項のいずれか一項に記載のマイクロポンプ。 24.流体の吸入およびまたは吐出制御部品は、流量断面が制限された流量制限 装置(312)によって構成されることを特徴とする該請求項のいずれか一項に 記載のマイクロポンプ。 25.流体の吐出制御部品はバルブダイアフラム(228)を含み、このダイア フラムは、向かい合って位置するプレート(2)に対する作用を受けるとともに マイクロポンプの出口(5)を囲む環状のリブ(226)を有し、マイクロポン プは、環状のリブ(226)と向かい合ったバルブダイアフラム(228)の面 と、第三プレート(208)またはベースプレートとによって区切られた少なく とも一つの室(229)を含み、この室(229)は、マイクロポンプの作動す なわち制御空洞を形成することを特徴とする請求項9または14によるマイクロ ポンプ。 26.患者の体内に埋め込み可能なマイクロポンプとしての請求項1から25の いずれか一項に記載の薬品投与用マイクロポンプの使用法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH00117/94A CH689836A5 (fr) | 1994-01-14 | 1994-01-14 | Micropompe. |
CH117/94-1 | 1994-01-14 | ||
PCT/IB1995/000028 WO1995019502A1 (fr) | 1994-01-14 | 1995-01-12 | Micropompe |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09512075A true JPH09512075A (ja) | 1997-12-02 |
JP3948493B2 JP3948493B2 (ja) | 2007-07-25 |
Family
ID=4179641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51893695A Expired - Fee Related JP3948493B2 (ja) | 1994-01-14 | 1995-01-12 | マイクロポンプ |
Country Status (9)
Country | Link |
---|---|
US (1) | US5759014A (ja) |
EP (1) | EP0739451B1 (ja) |
JP (1) | JP3948493B2 (ja) |
AU (1) | AU679311B2 (ja) |
CA (1) | CA2181084C (ja) |
CH (1) | CH689836A5 (ja) |
DE (1) | DE69500529T2 (ja) |
ES (1) | ES2107908T3 (ja) |
WO (1) | WO1995019502A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006214494A (ja) * | 2005-02-02 | 2006-08-17 | Sekisui Chem Co Ltd | マイクロバルブの流量調節方法 |
JP2013513066A (ja) * | 2009-12-07 | 2013-04-18 | デバイオテック・ソシエテ・アノニム | マイクロポンプ用の可撓性エレメント |
JP2021073037A (ja) * | 2012-08-15 | 2021-05-13 | ベクトン・ディキンソン・アンド・カンパニーBecton, Dickinson And Company | 液剤を投薬する計量システムを有するポンプ・エンジン |
Families Citing this family (234)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5919582A (en) | 1995-10-18 | 1999-07-06 | Aer Energy Resources, Inc. | Diffusion controlled air vent and recirculation air manager for a metal-air battery |
DE19546570C1 (de) * | 1995-12-13 | 1997-03-27 | Inst Mikro Und Informationstec | Fluidpumpe |
EP0879357B1 (fr) * | 1996-02-09 | 2002-11-13 | Westonbridge International Limited | Micropompe comprenant un filtre micro-usine |
EP0880817B1 (en) * | 1996-02-10 | 2005-04-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bistable microactuator with coupled membranes |
AU717626B2 (en) | 1996-10-03 | 2000-03-30 | Debiotech S.A. | Micro-machined device for fluids and method of manufacture |
DE19648458C1 (de) * | 1996-11-22 | 1998-07-09 | Evotec Biosystems Gmbh | Mikromechanische Ejektionspumpe zum Heraustrennen kleinster Fluidvolumina aus einem strömenden Probenfluid |
ATE218194T1 (de) * | 1996-12-11 | 2002-06-15 | Gesim Ges Fuer Silizium Mikros | Mikroejektionspumpe |
FR2757906A1 (fr) * | 1996-12-31 | 1998-07-03 | Westonbridge Int Ltd | Micropompe avec piece intermediaire integree |
US6520778B1 (en) | 1997-02-18 | 2003-02-18 | Formfactor, Inc. | Microelectronic contact structures, and methods of making same |
DE19802367C1 (de) * | 1997-02-19 | 1999-09-23 | Hahn Schickard Ges | Mikrodosiervorrichtungsarray und Verfahren zum Betreiben desselben |
WO1999009321A1 (fr) * | 1997-08-20 | 1999-02-25 | Westonbridge International Limited | Micropompe comprenant un organe de controle d'entree permettant son auto-amorcage |
US7485263B2 (en) * | 1997-08-26 | 2009-02-03 | Eppendorf Ag | Microproportioning system |
US6833242B2 (en) * | 1997-09-23 | 2004-12-21 | California Institute Of Technology | Methods for detecting and sorting polynucleotides based on size |
US7214298B2 (en) * | 1997-09-23 | 2007-05-08 | California Institute Of Technology | Microfabricated cell sorter |
DE19742439C1 (de) | 1997-09-26 | 1998-10-22 | Boehringer Ingelheim Int | Mikrostrukturiertes Filter |
US6106245A (en) * | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
US5836750A (en) * | 1997-10-09 | 1998-11-17 | Honeywell Inc. | Electrostatically actuated mesopump having a plurality of elementary cells |
DE19802368C1 (de) * | 1998-01-22 | 1999-08-05 | Hahn Schickard Ges | Mikrodosiervorrichtung |
US6807734B2 (en) | 1998-02-13 | 2004-10-26 | Formfactor, Inc. | Microelectronic contact structures, and methods of making same |
JP3543604B2 (ja) * | 1998-03-04 | 2004-07-14 | 株式会社日立製作所 | 送液装置および自動分析装置 |
US6247908B1 (en) * | 1998-03-05 | 2001-06-19 | Seiko Instruments Inc. | Micropump |
US7875440B2 (en) | 1998-05-01 | 2011-01-25 | Arizona Board Of Regents | Method of determining the nucleotide sequence of oligonucleotides and DNA molecules |
US6780591B2 (en) | 1998-05-01 | 2004-08-24 | Arizona Board Of Regents | Method of determining the nucleotide sequence of oligonucleotides and DNA molecules |
US6148635A (en) * | 1998-10-19 | 2000-11-21 | The Board Of Trustees Of The University Of Illinois | Active compressor vapor compression cycle integrated heat transfer device |
KR100841127B1 (ko) * | 1998-12-02 | 2008-06-24 | 폼팩터, 인크. | 리소그래피 접촉 소자 |
US6672875B1 (en) | 1998-12-02 | 2004-01-06 | Formfactor, Inc. | Spring interconnect structures |
US6491968B1 (en) | 1998-12-02 | 2002-12-10 | Formfactor, Inc. | Methods for making spring interconnect structures |
US6255126B1 (en) | 1998-12-02 | 2001-07-03 | Formfactor, Inc. | Lithographic contact elements |
US6268015B1 (en) | 1998-12-02 | 2001-07-31 | Formfactor | Method of making and using lithographic contact springs |
US6436564B1 (en) | 1998-12-18 | 2002-08-20 | Aer Energy Resources, Inc. | Air mover for a battery utilizing a variable volume enclosure |
US6475658B1 (en) | 1998-12-18 | 2002-11-05 | Aer Energy Resources, Inc. | Air manager systems for batteries utilizing a diaphragm or bellows |
JP2000314381A (ja) * | 1999-03-03 | 2000-11-14 | Ngk Insulators Ltd | ポンプ |
US7244396B2 (en) * | 1999-04-06 | 2007-07-17 | Uab Research Foundation | Method for preparation of microarrays for screening of crystal growth conditions |
US7247490B2 (en) * | 1999-04-06 | 2007-07-24 | Uab Research Foundation | Method for screening crystallization conditions in solution crystal growth |
US20030022383A1 (en) * | 1999-04-06 | 2003-01-30 | Uab Research Foundation | Method for screening crystallization conditions in solution crystal growth |
US7214540B2 (en) | 1999-04-06 | 2007-05-08 | Uab Research Foundation | Method for screening crystallization conditions in solution crystal growth |
DE60034033T2 (de) * | 1999-04-06 | 2007-12-06 | University of Alabama, Birmingham Research Foundation, Birmingham | Vorrichtung zum screening von kristallisierungsbedingungen in lösungen zur kristallzüchtung |
US7250305B2 (en) * | 2001-07-30 | 2007-07-31 | Uab Research Foundation | Use of dye to distinguish salt and protein crystals under microcrystallization conditions |
DE60031540T2 (de) * | 1999-06-28 | 2007-05-16 | California Institute Of Technology, Pasadena | Mikromechanische pump- und ventilsysteme |
US7217321B2 (en) * | 2001-04-06 | 2007-05-15 | California Institute Of Technology | Microfluidic protein crystallography techniques |
US7195670B2 (en) | 2000-06-27 | 2007-03-27 | California Institute Of Technology | High throughput screening of crystallization of materials |
US8052792B2 (en) * | 2001-04-06 | 2011-11-08 | California Institute Of Technology | Microfluidic protein crystallography techniques |
US7144616B1 (en) * | 1999-06-28 | 2006-12-05 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US7306672B2 (en) * | 2001-04-06 | 2007-12-11 | California Institute Of Technology | Microfluidic free interface diffusion techniques |
US6818395B1 (en) * | 1999-06-28 | 2004-11-16 | California Institute Of Technology | Methods and apparatus for analyzing polynucleotide sequences |
US7459022B2 (en) * | 2001-04-06 | 2008-12-02 | California Institute Of Technology | Microfluidic protein crystallography |
US8550119B2 (en) * | 1999-06-28 | 2013-10-08 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US6929030B2 (en) * | 1999-06-28 | 2005-08-16 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US8709153B2 (en) | 1999-06-28 | 2014-04-29 | California Institute Of Technology | Microfludic protein crystallography techniques |
US20080277007A1 (en) * | 1999-06-28 | 2008-11-13 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US7244402B2 (en) * | 2001-04-06 | 2007-07-17 | California Institute Of Technology | Microfluidic protein crystallography |
US6899137B2 (en) | 1999-06-28 | 2005-05-31 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US7052545B2 (en) * | 2001-04-06 | 2006-05-30 | California Institute Of Technology | High throughput screening of crystallization of materials |
US6444106B1 (en) | 1999-07-09 | 2002-09-03 | Orchid Biosciences, Inc. | Method of moving fluid in a microfluidic device |
WO2001067369A2 (en) * | 2000-03-03 | 2001-09-13 | California Institute Of Technology | Combinatorial array for nucleic acid analysis |
US7867763B2 (en) * | 2004-01-25 | 2011-01-11 | Fluidigm Corporation | Integrated chip carriers with thermocycler interfaces and methods of using the same |
US20050118073A1 (en) * | 2003-11-26 | 2005-06-02 | Fluidigm Corporation | Devices and methods for holding microfluidic devices |
AU2001272500B2 (en) * | 2000-05-25 | 2005-06-23 | Debiotech Sa | Micromachined fluidic device and method for making same |
US6568286B1 (en) | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
US7420659B1 (en) * | 2000-06-02 | 2008-09-02 | Honeywell Interantional Inc. | Flow control system of a cartridge |
US6837476B2 (en) * | 2002-06-19 | 2005-01-04 | Honeywell International Inc. | Electrostatically actuated valve |
US7351376B1 (en) | 2000-06-05 | 2008-04-01 | California Institute Of Technology | Integrated active flux microfluidic devices and methods |
US6824915B1 (en) | 2000-06-12 | 2004-11-30 | The Gillette Company | Air managing systems and methods for gas depolarized power supplies utilizing a diaphragm |
AU2001273057A1 (en) * | 2000-06-27 | 2002-01-08 | Fluidigm Corporation | A microfluidic design automation method and system |
US7000330B2 (en) * | 2002-08-21 | 2006-02-21 | Honeywell International Inc. | Method and apparatus for receiving a removable media member |
EP2299256A3 (en) | 2000-09-15 | 2012-10-10 | California Institute Of Technology | Microfabricated crossflow devices and methods |
US7258774B2 (en) * | 2000-10-03 | 2007-08-21 | California Institute Of Technology | Microfluidic devices and methods of use |
US7678547B2 (en) * | 2000-10-03 | 2010-03-16 | California Institute Of Technology | Velocity independent analyte characterization |
US7097809B2 (en) * | 2000-10-03 | 2006-08-29 | California Institute Of Technology | Combinatorial synthesis system |
AU1189702A (en) * | 2000-10-13 | 2002-04-22 | Fluidigm Corp | Microfluidic device based sample injection system for analytical devices |
US6644944B2 (en) * | 2000-11-06 | 2003-11-11 | Nanostream, Inc. | Uni-directional flow microfluidic components |
WO2002065005A1 (en) * | 2000-11-06 | 2002-08-22 | California Institute Of Technology | Electrostatic valves for microfluidic devices |
WO2002060582A2 (en) * | 2000-11-16 | 2002-08-08 | Fluidigm Corporation | Microfluidic devices for introducing and dispensing fluids from microfluidic systems |
US7378280B2 (en) * | 2000-11-16 | 2008-05-27 | California Institute Of Technology | Apparatus and methods for conducting assays and high throughput screening |
US20020098122A1 (en) * | 2001-01-22 | 2002-07-25 | Angad Singh | Active disposable microfluidic system with externally actuated micropump |
US20050143789A1 (en) * | 2001-01-30 | 2005-06-30 | Whitehurst Todd K. | Methods and systems for stimulating a peripheral nerve to treat chronic pain |
US20050196785A1 (en) * | 2001-03-05 | 2005-09-08 | California Institute Of Technology | Combinational array for nucleic acid analysis |
JP2004523243A (ja) | 2001-03-12 | 2004-08-05 | カリフォルニア インスティチュート オブ テクノロジー | 非同期性塩基伸長によってポリヌクレオチド配列を分析するための方法および装置 |
US7670429B2 (en) * | 2001-04-05 | 2010-03-02 | The California Institute Of Technology | High throughput screening of crystallization of materials |
US20020164816A1 (en) * | 2001-04-06 | 2002-11-07 | California Institute Of Technology | Microfluidic sample separation device |
EP1384022A4 (en) | 2001-04-06 | 2004-08-04 | California Inst Of Techn | AMPLIFICATION OF NUCLEIC ACID USING MICROFLUIDIC DEVICES |
ATE500051T1 (de) | 2001-04-06 | 2011-03-15 | Fluidigm Corp | Polymeroberflächenmodifikation |
US6752922B2 (en) * | 2001-04-06 | 2004-06-22 | Fluidigm Corporation | Microfluidic chromatography |
TW561223B (en) * | 2001-04-24 | 2003-11-11 | Matsushita Electric Works Ltd | Pump and its producing method |
US6593192B2 (en) | 2001-04-27 | 2003-07-15 | Micron Technology, Inc. | Method of forming a dual-gated semiconductor-on-insulator device |
US6805841B2 (en) | 2001-05-09 | 2004-10-19 | The Provost Fellows And Scholars Of The College Of The Holy And Undivided Trinity Of Queen Elizabeth Near Dublin | Liquid pumping system |
ES2187276B1 (es) * | 2001-05-16 | 2004-08-01 | Quimica Farmaceutica Bayer,S.A. | Composiciones orales para el tratamiento de humanos obesos y no diabeticos. |
US20050149304A1 (en) * | 2001-06-27 | 2005-07-07 | Fluidigm Corporation | Object oriented microfluidic design method and system |
US7075162B2 (en) * | 2001-08-30 | 2006-07-11 | Fluidigm Corporation | Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes |
SG106631A1 (en) * | 2001-08-31 | 2004-10-29 | Agency Science Tech & Res | Liquid delivering device |
US7134486B2 (en) * | 2001-09-28 | 2006-11-14 | The Board Of Trustees Of The Leeland Stanford Junior University | Control of electrolysis gases in electroosmotic pump systems |
US6942018B2 (en) | 2001-09-28 | 2005-09-13 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic microchannel cooling system |
US6729856B2 (en) | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
US7192629B2 (en) | 2001-10-11 | 2007-03-20 | California Institute Of Technology | Devices utilizing self-assembled gel and method of manufacture |
TW498933U (en) * | 2001-10-18 | 2002-08-11 | Ind Tech Res Inst | Negative pressure balance maintaining device for micropump |
US8440093B1 (en) | 2001-10-26 | 2013-05-14 | Fuidigm Corporation | Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels |
WO2003048295A1 (en) | 2001-11-30 | 2003-06-12 | Fluidigm Corporation | Microfluidic device and methods of using same |
US7691333B2 (en) | 2001-11-30 | 2010-04-06 | Fluidigm Corporation | Microfluidic device and methods of using same |
US6921253B2 (en) * | 2001-12-21 | 2005-07-26 | Cornell Research Foundation, Inc. | Dual chamber micropump having checkvalves |
IE20020619A1 (en) * | 2001-12-31 | 2003-07-23 | Provost Fellows And Scholors O | An assay assembly |
US6606251B1 (en) * | 2002-02-07 | 2003-08-12 | Cooligy Inc. | Power conditioning module |
US20030180711A1 (en) * | 2002-02-21 | 2003-09-25 | Turner Stephen W. | Three dimensional microfluidic device having porous membrane |
US7033148B2 (en) * | 2002-03-13 | 2006-04-25 | Cytonome, Inc. | Electromagnetic pump |
US7312085B2 (en) | 2002-04-01 | 2007-12-25 | Fluidigm Corporation | Microfluidic particle-analysis systems |
WO2003085379A2 (en) | 2002-04-01 | 2003-10-16 | Fluidigm Corporation | Microfluidic particle-analysis systems |
US20070026528A1 (en) * | 2002-05-30 | 2007-02-01 | Delucas Lawrence J | Method for screening crystallization conditions in solution crystal growth |
US20050238506A1 (en) * | 2002-06-21 | 2005-10-27 | The Charles Stark Draper Laboratory, Inc. | Electromagnetically-actuated microfluidic flow regulators and related applications |
US6827559B2 (en) * | 2002-07-01 | 2004-12-07 | Ventaira Pharmaceuticals, Inc. | Piezoelectric micropump with diaphragm and valves |
AU2003256469A1 (en) * | 2002-07-10 | 2004-01-23 | Uab Research Foundation | Method for distinguishing between biomolecule and non-biomolecule crystals |
US6874999B2 (en) * | 2002-08-15 | 2005-04-05 | Motorola, Inc. | Micropumps with passive check valves |
US6881039B2 (en) * | 2002-09-23 | 2005-04-19 | Cooligy, Inc. | Micro-fabricated electrokinetic pump |
WO2004036040A1 (en) | 2002-09-23 | 2004-04-29 | Cooligy, Inc. | Micro-fabricated electrokinetic pump with on-frit electrode |
US8220494B2 (en) * | 2002-09-25 | 2012-07-17 | California Institute Of Technology | Microfluidic large scale integration |
CA2500283A1 (en) * | 2002-09-25 | 2004-04-08 | California Institute Of Technology | Microfluidic large scale integration |
WO2004040001A2 (en) | 2002-10-02 | 2004-05-13 | California Institute Of Technology | Microfluidic nucleic acid analysis |
KR20040036173A (ko) * | 2002-10-23 | 2004-04-30 | 김종원 | 피에조 엑츄에이터로 구동되는 마이크로 압축기 |
KR100483079B1 (ko) * | 2002-10-23 | 2005-04-14 | 재단법인서울대학교산학협력재단 | 능동형 마이크로 냉각기 |
US7000684B2 (en) | 2002-11-01 | 2006-02-21 | Cooligy, Inc. | Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device |
US6986382B2 (en) * | 2002-11-01 | 2006-01-17 | Cooligy Inc. | Interwoven manifolds for pressure drop reduction in microchannel heat exchangers |
US6988535B2 (en) | 2002-11-01 | 2006-01-24 | Cooligy, Inc. | Channeled flat plate fin heat exchange system, device and method |
AU2003286855A1 (en) * | 2002-11-01 | 2004-06-07 | Cooligy, Inc. | Method and apparatus for achieving temperature uniformity and hot spot cooling in a heat producing device |
US7017654B2 (en) | 2003-03-17 | 2006-03-28 | Cooligy, Inc. | Apparatus and method of forming channels in a heat-exchanging device |
CA2521171C (en) * | 2003-04-03 | 2013-05-28 | Fluidigm Corp. | Microfluidic devices and methods of using same |
US7604965B2 (en) | 2003-04-03 | 2009-10-20 | Fluidigm Corporation | Thermal reaction device and method for using the same |
US8828663B2 (en) | 2005-03-18 | 2014-09-09 | Fluidigm Corporation | Thermal reaction device and method for using the same |
US20050145496A1 (en) * | 2003-04-03 | 2005-07-07 | Federico Goodsaid | Thermal reaction device and method for using the same |
US7476363B2 (en) | 2003-04-03 | 2009-01-13 | Fluidigm Corporation | Microfluidic devices and methods of using same |
WO2004094020A2 (en) * | 2003-04-17 | 2004-11-04 | Fluidigm Corporation | Crystal growth devices and systems, and methods for using same |
EP1636017A2 (en) * | 2003-05-20 | 2006-03-22 | Fluidigm Corporation | Method and system for microfluidic device and imaging thereof |
US7316543B2 (en) * | 2003-05-30 | 2008-01-08 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic micropump with planar features |
US7021369B2 (en) * | 2003-07-23 | 2006-04-04 | Cooligy, Inc. | Hermetic closed loop fluid system |
US7591302B1 (en) | 2003-07-23 | 2009-09-22 | Cooligy Inc. | Pump and fan control concepts in a cooling system |
US7583853B2 (en) * | 2003-07-28 | 2009-09-01 | Fluidigm Corporation | Image processing method and system for microfluidic devices |
US7413712B2 (en) * | 2003-08-11 | 2008-08-19 | California Institute Of Technology | Microfluidic rotary flow reactor matrix |
US7231839B2 (en) * | 2003-08-11 | 2007-06-19 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic micropumps with applications to fluid dispensing and field sampling |
DE602004003316T2 (de) * | 2003-09-12 | 2007-03-15 | Samsung Electronics Co., Ltd., Suwon | Membranpumpe für Kühlluft |
US7029951B2 (en) * | 2003-09-12 | 2006-04-18 | International Business Machines Corporation | Cooling system for a semiconductor device and method of fabricating same |
US7284966B2 (en) * | 2003-10-01 | 2007-10-23 | Agency For Science, Technology & Research | Micro-pump |
KR100519970B1 (ko) * | 2003-10-07 | 2005-10-13 | 삼성전자주식회사 | 밸브리스 마이크로 공기공급장치 |
US7169560B2 (en) | 2003-11-12 | 2007-01-30 | Helicos Biosciences Corporation | Short cycle methods for sequencing polynucleotides |
US7407799B2 (en) | 2004-01-16 | 2008-08-05 | California Institute Of Technology | Microfluidic chemostat |
SG10202107927VA (en) * | 2004-01-25 | 2021-08-30 | Fluidigm Corp | Crystal forming devices and systems and methods for making and using the same |
US7867194B2 (en) | 2004-01-29 | 2011-01-11 | The Charles Stark Draper Laboratory, Inc. | Drug delivery apparatus |
WO2005072793A1 (en) * | 2004-01-29 | 2005-08-11 | The Charles Stark Draper Laboratory, Inc. | Implantable drug delivery apparatus |
WO2005080605A2 (en) | 2004-02-19 | 2005-09-01 | Helicos Biosciences Corporation | Methods and kits for analyzing polynucleotide sequences |
DE102004011726A1 (de) * | 2004-03-05 | 2005-09-22 | Ing. Erich Pfeiffer Gmbh | Dosiervorrichtung |
US7484940B2 (en) * | 2004-04-28 | 2009-02-03 | Kinetic Ceramics, Inc. | Piezoelectric fluid pump |
DE602005027700D1 (de) | 2004-05-25 | 2011-06-09 | Helicos Biosciences Corp | Verfahren zur nukleinsäureimmobilisierung |
US7476734B2 (en) | 2005-12-06 | 2009-01-13 | Helicos Biosciences Corporation | Nucleotide analogs |
US20060024751A1 (en) * | 2004-06-03 | 2006-02-02 | Fluidigm Corporation | Scale-up methods and systems for performing the same |
US7104767B2 (en) * | 2004-07-19 | 2006-09-12 | Wilson Greatbatch Technologies, Inc. | Diaphragm pump for medical applications |
US20060134510A1 (en) * | 2004-12-21 | 2006-06-22 | Cleopatra Cabuz | Air cell air flow control system and method |
US7222639B2 (en) * | 2004-12-29 | 2007-05-29 | Honeywell International Inc. | Electrostatically actuated gas valve |
US7220549B2 (en) | 2004-12-30 | 2007-05-22 | Helicos Biosciences Corporation | Stabilizing a nucleic acid for nucleic acid sequencing |
US7328882B2 (en) * | 2005-01-06 | 2008-02-12 | Honeywell International Inc. | Microfluidic modulating valve |
US7482120B2 (en) | 2005-01-28 | 2009-01-27 | Helicos Biosciences Corporation | Methods and compositions for improving fidelity in a nucleic acid synthesis reaction |
US7445017B2 (en) * | 2005-01-28 | 2008-11-04 | Honeywell International Inc. | Mesovalve modulator |
US20060194724A1 (en) * | 2005-02-25 | 2006-08-31 | Whitehurst Todd K | Methods and systems for nerve regeneration |
JP4887652B2 (ja) * | 2005-04-21 | 2012-02-29 | ソニー株式会社 | 噴流発生装置及び電子機器 |
US7320338B2 (en) * | 2005-06-03 | 2008-01-22 | Honeywell International Inc. | Microvalve package assembly |
US7517201B2 (en) * | 2005-07-14 | 2009-04-14 | Honeywell International Inc. | Asymmetric dual diaphragm pump |
US7666593B2 (en) | 2005-08-26 | 2010-02-23 | Helicos Biosciences Corporation | Single molecule sequencing of captured nucleic acids |
US20070051415A1 (en) * | 2005-09-07 | 2007-03-08 | Honeywell International Inc. | Microvalve switching array |
US7624755B2 (en) | 2005-12-09 | 2009-12-01 | Honeywell International Inc. | Gas valve with overtravel |
WO2007070642A2 (en) * | 2005-12-15 | 2007-06-21 | Helicos Biosciences Corporation | Methods for increasing accuracy of nucleic acid sequencing |
US20070140875A1 (en) * | 2005-12-16 | 2007-06-21 | Green James S | Piezoelectric pump |
US7815868B1 (en) * | 2006-02-28 | 2010-10-19 | Fluidigm Corporation | Microfluidic reaction apparatus for high throughput screening |
US20080309926A1 (en) * | 2006-03-08 | 2008-12-18 | Aaron Weber | Systems and methods for reducing detected intensity non uniformity in a laser beam |
US7397546B2 (en) * | 2006-03-08 | 2008-07-08 | Helicos Biosciences Corporation | Systems and methods for reducing detected intensity non-uniformity in a laser beam |
US7523762B2 (en) | 2006-03-22 | 2009-04-28 | Honeywell International Inc. | Modulating gas valves and systems |
JP2009532868A (ja) | 2006-03-30 | 2009-09-10 | クーリギー インコーポレイテッド | 冷却装置及び冷却装置製造方法 |
US7715194B2 (en) | 2006-04-11 | 2010-05-11 | Cooligy Inc. | Methodology of cooling multiple heat sources in a personal computer through the use of multiple fluid-based heat exchanging loops coupled via modular bus-type heat exchangers |
US8007704B2 (en) * | 2006-07-20 | 2011-08-30 | Honeywell International Inc. | Insert molded actuator components |
US7543604B2 (en) * | 2006-09-11 | 2009-06-09 | Honeywell International Inc. | Control valve |
US8202267B2 (en) * | 2006-10-10 | 2012-06-19 | Medsolve Technologies, Inc. | Method and apparatus for infusing liquid to a body |
US7644731B2 (en) | 2006-11-30 | 2010-01-12 | Honeywell International Inc. | Gas valve with resilient seat |
US20080161754A1 (en) * | 2006-12-29 | 2008-07-03 | Medsolve Technologies, Inc. | Method and apparatus for infusing liquid to a body |
WO2008094672A2 (en) | 2007-01-31 | 2008-08-07 | Charles Stark Draper Laboratory, Inc. | Membrane-based fluid control in microfluidic devices |
US20080186801A1 (en) * | 2007-02-06 | 2008-08-07 | Qisda Corporation | Bubble micro-pump and two-way fluid-driving device, particle-sorting device, fluid-mixing device, ring-shaped fluid-mixing device and compound-type fluid-mixing device using the same |
US8746130B2 (en) * | 2007-10-22 | 2014-06-10 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Diaphragm pump |
US8708961B2 (en) | 2008-01-28 | 2014-04-29 | Medsolve Technologies, Inc. | Apparatus for infusing liquid to a body |
US9297571B1 (en) | 2008-03-10 | 2016-03-29 | Liebert Corporation | Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door |
US20090225514A1 (en) | 2008-03-10 | 2009-09-10 | Adrian Correa | Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door |
JP5169693B2 (ja) * | 2008-09-29 | 2013-03-27 | 株式会社村田製作所 | 圧電ポンプ |
EP2343456B1 (en) | 2008-09-29 | 2018-08-15 | Murata Manufacturing Co., Ltd. | Piezoelectric pump |
CN102143775B (zh) | 2008-10-22 | 2017-03-08 | 生物技术公司 | 具有用于功能异常检测的集成式压力传感器的微电子机械系统流体阀 |
WO2011094577A2 (en) | 2010-01-29 | 2011-08-04 | Micronics, Inc. | Sample-to-answer microfluidic cartridge |
CN102884352B (zh) | 2010-03-05 | 2014-06-18 | 弗兰霍菲尔运输应用研究公司 | 弯曲换能器、微型泵和微型阀的制造方法以及微型泵和微型阀 |
US20110223253A1 (en) * | 2010-03-15 | 2011-09-15 | Artimplant Ab | Physically stabilized biodegradable osteochondral implant and methods for its manufacture and implantation |
DE102010040169A1 (de) * | 2010-09-02 | 2012-03-08 | Robert Bosch Gmbh | Vorrichtung zur Drosselung einer Fluidströmung und korrespondierende Kolbenpumpe zur Förderung von Fluiden |
EP2469089A1 (en) | 2010-12-23 | 2012-06-27 | Debiotech S.A. | Electronic control method and system for a piezo-electric pump |
WO2012106501A1 (en) | 2011-02-02 | 2012-08-09 | The Charles Stark Draper Laboratory, Inc. | Drug delivery apparatus |
CN103635213B (zh) | 2011-06-23 | 2016-11-02 | 生物技术公司 | 用于检测mems微泵的故障的方法和系统 |
EP2543404A1 (en) | 2011-07-04 | 2013-01-09 | Debiotech S.A. | Method and system for detecting malfunction of a mems micropump |
EP2551523A1 (en) | 2011-07-29 | 2013-01-30 | Debiotech S.A. | Method and device for accurate and low-consumption mems micropump actuation |
US9074770B2 (en) | 2011-12-15 | 2015-07-07 | Honeywell International Inc. | Gas valve with electronic valve proving system |
US8839815B2 (en) | 2011-12-15 | 2014-09-23 | Honeywell International Inc. | Gas valve with electronic cycle counter |
US9846440B2 (en) | 2011-12-15 | 2017-12-19 | Honeywell International Inc. | Valve controller configured to estimate fuel comsumption |
US8899264B2 (en) | 2011-12-15 | 2014-12-02 | Honeywell International Inc. | Gas valve with electronic proof of closure system |
US9557059B2 (en) | 2011-12-15 | 2017-01-31 | Honeywell International Inc | Gas valve with communication link |
US8947242B2 (en) | 2011-12-15 | 2015-02-03 | Honeywell International Inc. | Gas valve with valve leakage test |
US8905063B2 (en) | 2011-12-15 | 2014-12-09 | Honeywell International Inc. | Gas valve with fuel rate monitor |
US9835265B2 (en) | 2011-12-15 | 2017-12-05 | Honeywell International Inc. | Valve with actuator diagnostics |
US9851103B2 (en) | 2011-12-15 | 2017-12-26 | Honeywell International Inc. | Gas valve with overpressure diagnostics |
US9995486B2 (en) | 2011-12-15 | 2018-06-12 | Honeywell International Inc. | Gas valve with high/low gas pressure detection |
US9234661B2 (en) | 2012-09-15 | 2016-01-12 | Honeywell International Inc. | Burner control system |
US10422531B2 (en) | 2012-09-15 | 2019-09-24 | Honeywell International Inc. | System and approach for controlling a combustion chamber |
KR20150097764A (ko) | 2012-12-21 | 2015-08-26 | 마이크로닉스 인코포레이티드. | 휴대형 형광 검출 시스템 및 미량분석 카트리지 |
CN107824233B (zh) | 2012-12-21 | 2020-06-30 | 珀金埃尔默健康科学有限公司 | 用于微流体用途的低弹性膜 |
JP5770391B2 (ja) | 2012-12-21 | 2015-08-26 | フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ | 安全弁装置を含むポンプ装置 |
WO2014100732A1 (en) | 2012-12-21 | 2014-06-26 | Micronics, Inc. | Fluidic circuits and related manufacturing methods |
US9903508B2 (en) | 2013-03-07 | 2018-02-27 | Debiotech S.A. | Microfluidic valve having improved tolerance to particles |
EP2994543B1 (en) | 2013-05-07 | 2018-08-15 | Micronics, Inc. | Device for preparation and analysis of nucleic acids |
WO2014182844A1 (en) | 2013-05-07 | 2014-11-13 | Micronics, Inc. | Microfluidic devices and methods for performing serum separation and blood cross-matching |
WO2014182831A1 (en) | 2013-05-07 | 2014-11-13 | Micronics, Inc. | Methods for preparation of nucleic acid-containing samples using clay minerals and alkaline solutions |
TWI539076B (zh) * | 2013-09-25 | 2016-06-21 | 馬小康 | 腔體分離式薄膜幫浦 |
EP2868970B1 (en) | 2013-10-29 | 2020-04-22 | Honeywell Technologies Sarl | Regulating device |
US10024439B2 (en) | 2013-12-16 | 2018-07-17 | Honeywell International Inc. | Valve over-travel mechanism |
US9841122B2 (en) | 2014-09-09 | 2017-12-12 | Honeywell International Inc. | Gas valve with electronic valve proving system |
US9645584B2 (en) | 2014-09-17 | 2017-05-09 | Honeywell International Inc. | Gas valve with electronic health monitoring |
US10503181B2 (en) | 2016-01-13 | 2019-12-10 | Honeywell International Inc. | Pressure regulator |
EP3510284B1 (en) * | 2016-09-07 | 2021-04-28 | Robert Bosch GmbH | Micropumps |
JP2019528904A (ja) | 2016-09-29 | 2019-10-17 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 液体注入用圧電膜ポンプ |
US10564062B2 (en) | 2016-10-19 | 2020-02-18 | Honeywell International Inc. | Human-machine interface for gas valve |
TWI658211B (zh) * | 2016-10-27 | 2019-05-01 | Nitto Kohki Co., Ltd. | Liquid pump |
TWI625462B (zh) * | 2017-01-05 | 2018-06-01 | 研能科技股份有限公司 | 微型氣壓動力裝置 |
US11073281B2 (en) | 2017-12-29 | 2021-07-27 | Honeywell International Inc. | Closed-loop programming and control of a combustion appliance |
US10697815B2 (en) | 2018-06-09 | 2020-06-30 | Honeywell International Inc. | System and methods for mitigating condensation in a sensor module |
CN111151311B (zh) * | 2018-11-07 | 2021-10-12 | 研能科技股份有限公司 | 微流道结构的制造方法 |
WO2021072729A1 (en) * | 2019-10-18 | 2021-04-22 | Healtell (Guangzhou) Medical Technology Co., Ltd. | Microfluidic chip pumps and methods thereof |
CN111692069B (zh) * | 2020-06-19 | 2021-04-09 | 燕山大学 | 一种驱动与阀控融合式流体驱动装置 |
NL2026780B1 (en) | 2020-10-27 | 2022-06-21 | Univ Delft Tech | Precise fluid manipulation in the femtolitre range |
CN113464410B (zh) * | 2021-08-19 | 2022-03-22 | 浙江大学 | 一种压力无级可调的大流量压电泵 |
WO2023158618A1 (en) * | 2022-02-17 | 2023-08-24 | Aita Bio Inc. | Mems micropump with piezoelectric active valve that remains closed following micropump power loss |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2933799C3 (de) * | 1979-08-18 | 1982-05-19 | Schaldach, Max, Prof. Dr.-Ing., 8520 Erlangen | Vorrichtung zur Förderung und Dosierung kleinster Flüssigkeitsmengen |
FR2516606B1 (fr) * | 1981-11-19 | 1986-05-16 | Bessman Samuel | Pompe a diaphragme a commande piezo-electrique, notamment micro-pompe pour implantation dans le corps humain |
DE3320443C2 (de) * | 1983-06-06 | 1994-08-18 | Siemens Ag | Flüssigkeitspumpe |
ES2061042T3 (es) * | 1989-06-14 | 1994-12-01 | Westonbridge Int Ltd | Microbomba perfeccionada. |
ES2075459T3 (es) * | 1990-08-31 | 1995-10-01 | Westonbridge Int Ltd | Valvula equipada con detector de posicion y microbomba que incorpora dicha valvula. |
GB2248891A (en) * | 1990-10-18 | 1992-04-22 | Westonbridge Int Ltd | Membrane micropump |
-
1994
- 1994-01-14 CH CH00117/94A patent/CH689836A5/fr not_active IP Right Cessation
-
1995
- 1995-01-12 CA CA002181084A patent/CA2181084C/en not_active Expired - Fee Related
- 1995-01-12 JP JP51893695A patent/JP3948493B2/ja not_active Expired - Fee Related
- 1995-01-12 US US08/676,146 patent/US5759014A/en not_active Expired - Lifetime
- 1995-01-12 AU AU13263/95A patent/AU679311B2/en not_active Ceased
- 1995-01-12 ES ES95904674T patent/ES2107908T3/es not_active Expired - Lifetime
- 1995-01-12 EP EP95904674A patent/EP0739451B1/fr not_active Expired - Lifetime
- 1995-01-12 WO PCT/IB1995/000028 patent/WO1995019502A1/fr active IP Right Grant
- 1995-01-12 DE DE69500529T patent/DE69500529T2/de not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006214494A (ja) * | 2005-02-02 | 2006-08-17 | Sekisui Chem Co Ltd | マイクロバルブの流量調節方法 |
JP4668635B2 (ja) * | 2005-02-02 | 2011-04-13 | 積水化学工業株式会社 | マイクロバルブの流量調節方法 |
JP2013513066A (ja) * | 2009-12-07 | 2013-04-18 | デバイオテック・ソシエテ・アノニム | マイクロポンプ用の可撓性エレメント |
JP2021073037A (ja) * | 2012-08-15 | 2021-05-13 | ベクトン・ディキンソン・アンド・カンパニーBecton, Dickinson And Company | 液剤を投薬する計量システムを有するポンプ・エンジン |
Also Published As
Publication number | Publication date |
---|---|
CA2181084C (en) | 2004-09-14 |
AU679311B2 (en) | 1997-06-26 |
AU1326395A (en) | 1995-08-01 |
WO1995019502A1 (fr) | 1995-07-20 |
EP0739451B1 (fr) | 1997-08-06 |
US5759014A (en) | 1998-06-02 |
CH689836A5 (fr) | 1999-12-15 |
CA2181084A1 (en) | 1995-07-20 |
JP3948493B2 (ja) | 2007-07-25 |
EP0739451A1 (fr) | 1996-10-30 |
DE69500529D1 (de) | 1997-09-11 |
DE69500529T2 (de) | 1998-03-12 |
ES2107908T3 (es) | 1997-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH09512075A (ja) | マイクロポンプ | |
JP3718724B2 (ja) | マイクロポンプ | |
US5085562A (en) | Micropump having a constant output | |
Smits | Piezoelectric micropump with three valves working peristaltically | |
EP1998829B1 (en) | Mems device for delivery of therapeutic agents | |
US6948918B2 (en) | Membrane pump with stretchable pump membrane | |
Maillefer et al. | A high-performance silicon micropump for disposable drug delivery systems | |
Su et al. | A high frequency high flow rate piezoelectrically driven MEMS micropump | |
Ma et al. | A PZT insulin pump integrated with a silicon micro needle array for transdermal drug delivery | |
JP5027930B2 (ja) | 安全弁を含むポンプ装置 | |
JPH05502090A (ja) | 位置検出器を備えた弁及び前記弁を組み込んだマイクロポンプ | |
JPH07324680A (ja) | 流動体供給方法および装置 | |
US20160000602A1 (en) | Mems device and method for delivery of therapeutic agents | |
Schneeberger et al. | Drug delivery micropump with built-in monitoring | |
Kang et al. | A self-priming, high performance, check valve diaphragm micropump made from SOI wafers | |
JPH03199682A (ja) | マイクロポンプ | |
JPH09170560A (ja) | 液体吐出装置 | |
JPH03225086A (ja) | マイクロポンプ | |
Veenstra et al. | A simple selfpriming bubble-tolerant peristaltic micropump | |
TTVEENSTRA et al. | MESA-*-Research Institute, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands | |
JPH0463974A (ja) | マイクロポンプにおける検出装置 | |
JP2005076479A (ja) | ポンプ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20050810 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20051108 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20060202 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20060320 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060424 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060808 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061107 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070320 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070410 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |