ES2107908T3 - Microbomba. - Google Patents

Microbomba.

Info

Publication number
ES2107908T3
ES2107908T3 ES95904674T ES95904674T ES2107908T3 ES 2107908 T3 ES2107908 T3 ES 2107908T3 ES 95904674 T ES95904674 T ES 95904674T ES 95904674 T ES95904674 T ES 95904674T ES 2107908 T3 ES2107908 T3 ES 2107908T3
Authority
ES
Spain
Prior art keywords
pumping
micropump
outlet
chamber
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95904674T
Other languages
English (en)
Inventor
Lintel Harald Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westonbridge International Ltd
Original Assignee
Westonbridge International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Application granted granted Critical
Publication of ES2107908T3 publication Critical patent/ES2107908T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1077—Flow resistance valves, e.g. without moving parts
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • A61M5/14212—Pumping with an aspiration and an expulsion action
    • A61M5/14224—Diaphragm type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/1052—Flap valves the valve being formed by one or more flexible elements two flexible elements oscillating around a fixed point
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00—General characteristics of the apparatus
    • A61M2205/02—General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00—General characteristics of the apparatus
    • A61M2205/02—General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0272—Electro-active or magneto-active materials
    • A61M2205/0294—Piezoelectric materials

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biomedical Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Anesthesiology (AREA)
  • Vascular Medicine (AREA)
  • Reciprocating Pumps (AREA)

Abstract

LA MICROBOMBA COMPRENDE DOS PLACAS DE VIDRIO (2,8) ENTRE LAS CUALES ESTA INTERCALADA DE MANERA ESTANCA UNA PLACA (6) DE SILICIO MECANIZADA. UNAS CHAPALETAS DE ENTRADA (12), UNA CAMARA DE BOMBEO (14) Y UNA CHAPALETA DE SALIDA (16) ESTAN DISPUESTAS ENTRE UN CONDUCTO DE ENTRADA (4) Y DE SALIDA (5). UNA MEMBRANA DE BOMBEO (36) QUE FORMA UNA PARED DE LA CAMARA DE BOMBEO LLEVA UNA PARTE CENTRAL MAS ESPESA (38) DESTINADA A FUNCIONAR A MODO DE PISTON. UN ELEMENTO PIEZOELECTRICO (52) ACTUA MEDIANTE UNA PIEZA INTERMEDIA (64) SOBRE LA MEMBRANA DE MANERA QUE EFECTUE EL MOVIMIENTO DE BOMBEO. LA CAMARA DE BOMBEO (14) Y LOS ESPACIOS (22, 24) QUE CONECTAN ESTA ULTIMA CON LAS CHAPALETAS DE ENTRADA Y DE SALIDA ESTAN CONFORMADOS DE MANERA QUE LA REDUCCION DEL VOLUMEN INTERNO DE LA MICROBOMBA DEBIDA A LA REDUCCION DEL VOLUMEN DE LA CAMARA DE BOMBEO DURANTE UN MOVIMIENTO DE BOMBEO ES TAL QUE EL AIRE CONTENIDO EN LA MICROBOMBA ES COMPRIMIDO A UNA PRESION SUFICIENTE PARA PROVOCAR LA ABERTURA DE LA CHAPALETA DE SALIDA DE MANERA QUE LA MICROBOMBA ES AUTOCEBADORA.
ES95904674T 1994-01-14 1995-01-12 Microbomba. Expired - Lifetime ES2107908T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH00117/94A CH689836A5 (fr) 1994-01-14 1994-01-14 Micropompe.

Publications (1)

Publication Number Publication Date
ES2107908T3 true ES2107908T3 (es) 1997-12-01

Family

ID=4179641

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95904674T Expired - Lifetime ES2107908T3 (es) 1994-01-14 1995-01-12 Microbomba.

Country Status (9)

Country Link
US (1) US5759014A (es)
EP (1) EP0739451B1 (es)
JP (1) JP3948493B2 (es)
AU (1) AU679311B2 (es)
CA (1) CA2181084C (es)
CH (1) CH689836A5 (es)
DE (1) DE69500529T2 (es)
ES (1) ES2107908T3 (es)
WO (1) WO1995019502A1 (es)

Families Citing this family (237)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5919582A (en) 1995-10-18 1999-07-06 Aer Energy Resources, Inc. Diffusion controlled air vent and recirculation air manager for a metal-air battery
DE19546570C1 (de) * 1995-12-13 1997-03-27 Inst Mikro Und Informationstec Fluidpumpe
DE69717075T2 (de) * 1996-02-09 2003-07-24 Westonbridge Internat Ltd Mikropumpe mit einem mikrobearbeiteten filter
US6168395B1 (en) * 1996-02-10 2001-01-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bistable microactuator with coupled membranes
CN1134596C (zh) 1996-10-03 2004-01-14 威斯顿布里奇国际有限公司 微加工流体装置及制造方法
DE19648458C1 (de) * 1996-11-22 1998-07-09 Evotec Biosystems Gmbh Mikromechanische Ejektionspumpe zum Heraustrennen kleinster Fluidvolumina aus einem strömenden Probenfluid
ATE218194T1 (de) * 1996-12-11 2002-06-15 Gesim Ges Fuer Silizium Mikros Mikroejektionspumpe
FR2757906A1 (fr) * 1996-12-31 1998-07-03 Westonbridge Int Ltd Micropompe avec piece intermediaire integree
US6520778B1 (en) 1997-02-18 2003-02-18 Formfactor, Inc. Microelectronic contact structures, and methods of making same
DE19802367C1 (de) * 1997-02-19 1999-09-23 Hahn Schickard Ges Mikrodosiervorrichtungsarray und Verfahren zum Betreiben desselben
WO1999009321A1 (fr) * 1997-08-20 1999-02-25 Westonbridge International Limited Micropompe comprenant un organe de controle d'entree permettant son auto-amorcage
US7485263B2 (en) * 1997-08-26 2009-02-03 Eppendorf Ag Microproportioning system
US6833242B2 (en) * 1997-09-23 2004-12-21 California Institute Of Technology Methods for detecting and sorting polynucleotides based on size
US7214298B2 (en) * 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
DE19742439C1 (de) * 1997-09-26 1998-10-22 Boehringer Ingelheim Int Mikrostrukturiertes Filter
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
DE19802368C1 (de) * 1998-01-22 1999-08-05 Hahn Schickard Ges Mikrodosiervorrichtung
US6807734B2 (en) * 1998-02-13 2004-10-26 Formfactor, Inc. Microelectronic contact structures, and methods of making same
JP3543604B2 (ja) * 1998-03-04 2004-07-14 株式会社日立製作所 送液装置および自動分析装置
US6247908B1 (en) * 1998-03-05 2001-06-19 Seiko Instruments Inc. Micropump
US6780591B2 (en) 1998-05-01 2004-08-24 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
US7875440B2 (en) 1998-05-01 2011-01-25 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
US6148635A (en) * 1998-10-19 2000-11-21 The Board Of Trustees Of The University Of Illinois Active compressor vapor compression cycle integrated heat transfer device
US6268015B1 (en) 1998-12-02 2001-07-31 Formfactor Method of making and using lithographic contact springs
US6491968B1 (en) 1998-12-02 2002-12-10 Formfactor, Inc. Methods for making spring interconnect structures
AU2038000A (en) * 1998-12-02 2000-06-19 Formfactor, Inc. Lithographic contact elements
US6255126B1 (en) 1998-12-02 2001-07-03 Formfactor, Inc. Lithographic contact elements
US6672875B1 (en) 1998-12-02 2004-01-06 Formfactor, Inc. Spring interconnect structures
US6436564B1 (en) 1998-12-18 2002-08-20 Aer Energy Resources, Inc. Air mover for a battery utilizing a variable volume enclosure
US6475658B1 (en) 1998-12-18 2002-11-05 Aer Energy Resources, Inc. Air manager systems for batteries utilizing a diaphragm or bellows
JP2000314381A (ja) * 1999-03-03 2000-11-14 Ngk Insulators Ltd ポンプ
US7244396B2 (en) * 1999-04-06 2007-07-17 Uab Research Foundation Method for preparation of microarrays for screening of crystal growth conditions
DE60034033T2 (de) * 1999-04-06 2007-12-06 University of Alabama, Birmingham Research Foundation, Birmingham Vorrichtung zum screening von kristallisierungsbedingungen in lösungen zur kristallzüchtung
US7247490B2 (en) * 1999-04-06 2007-07-24 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7250305B2 (en) * 2001-07-30 2007-07-31 Uab Research Foundation Use of dye to distinguish salt and protein crystals under microcrystallization conditions
US7214540B2 (en) 1999-04-06 2007-05-08 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US20020164812A1 (en) * 1999-04-06 2002-11-07 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US6899137B2 (en) 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7217321B2 (en) * 2001-04-06 2007-05-15 California Institute Of Technology Microfluidic protein crystallography techniques
US7195670B2 (en) * 2000-06-27 2007-03-27 California Institute Of Technology High throughput screening of crystallization of materials
US7144616B1 (en) * 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7306672B2 (en) * 2001-04-06 2007-12-11 California Institute Of Technology Microfluidic free interface diffusion techniques
US7459022B2 (en) * 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6929030B2 (en) * 1999-06-28 2005-08-16 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US8052792B2 (en) * 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US7052545B2 (en) * 2001-04-06 2006-05-30 California Institute Of Technology High throughput screening of crystallization of materials
US7244402B2 (en) * 2001-04-06 2007-07-17 California Institute Of Technology Microfluidic protein crystallography
DK1065378T3 (da) 1999-06-28 2002-07-29 California Inst Of Techn Elastomere mikropumpe- og mikroventilsystemer
US6818395B1 (en) * 1999-06-28 2004-11-16 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences
US6444106B1 (en) 1999-07-09 2002-09-03 Orchid Biosciences, Inc. Method of moving fluid in a microfluidic device
WO2001067369A2 (en) * 2000-03-03 2001-09-13 California Institute Of Technology Combinatorial array for nucleic acid analysis
US20050118073A1 (en) * 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
US7867763B2 (en) * 2004-01-25 2011-01-11 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
EP1283957B1 (fr) * 2000-05-25 2005-10-26 Debiotech S.A. Dispositif fluidique micro-usine et son procede de fabrication
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6837476B2 (en) 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7351376B1 (en) * 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
US6824915B1 (en) 2000-06-12 2004-11-30 The Gillette Company Air managing systems and methods for gas depolarized power supplies utilizing a diaphragm
US7062418B2 (en) * 2000-06-27 2006-06-13 Fluidigm Corporation Computer aided design method and system for developing a microfluidic system
US7000330B2 (en) * 2002-08-21 2006-02-21 Honeywell International Inc. Method and apparatus for receiving a removable media member
EP1334347A1 (en) * 2000-09-15 2003-08-13 California Institute Of Technology Microfabricated crossflow devices and methods
US7097809B2 (en) * 2000-10-03 2006-08-29 California Institute Of Technology Combinatorial synthesis system
US7678547B2 (en) * 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
WO2002029106A2 (en) * 2000-10-03 2002-04-11 California Institute Of Technology Microfluidic devices and methods of use
AU1189702A (en) * 2000-10-13 2002-04-22 Fluidigm Corp Microfluidic device based sample injection system for analytical devices
US6644944B2 (en) * 2000-11-06 2003-11-11 Nanostream, Inc. Uni-directional flow microfluidic components
US7232109B2 (en) * 2000-11-06 2007-06-19 California Institute Of Technology Electrostatic valves for microfluidic devices
WO2002060582A2 (en) * 2000-11-16 2002-08-08 Fluidigm Corporation Microfluidic devices for introducing and dispensing fluids from microfluidic systems
AU2002230524A1 (en) 2000-11-16 2002-05-27 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
US20020098122A1 (en) * 2001-01-22 2002-07-25 Angad Singh Active disposable microfluidic system with externally actuated micropump
US20050143789A1 (en) * 2001-01-30 2005-06-30 Whitehurst Todd K. Methods and systems for stimulating a peripheral nerve to treat chronic pain
US20050196785A1 (en) * 2001-03-05 2005-09-08 California Institute Of Technology Combinational array for nucleic acid analysis
WO2002072892A1 (en) 2001-03-12 2002-09-19 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences by asynchronous base extension
US7670429B2 (en) * 2001-04-05 2010-03-02 The California Institute Of Technology High throughput screening of crystallization of materials
ATE500051T1 (de) 2001-04-06 2011-03-15 Fluidigm Corp Polymeroberflächenmodifikation
US6752922B2 (en) * 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
US20020164816A1 (en) * 2001-04-06 2002-11-07 California Institute Of Technology Microfluidic sample separation device
EP1384022A4 (en) 2001-04-06 2004-08-04 California Inst Of Techn AMPLIFICATION OF NUCLEIC ACID USING MICROFLUIDIC DEVICES
TW561223B (en) * 2001-04-24 2003-11-11 Matsushita Electric Works Ltd Pump and its producing method
US6593192B2 (en) 2001-04-27 2003-07-15 Micron Technology, Inc. Method of forming a dual-gated semiconductor-on-insulator device
US6805841B2 (en) 2001-05-09 2004-10-19 The Provost Fellows And Scholars Of The College Of The Holy And Undivided Trinity Of Queen Elizabeth Near Dublin Liquid pumping system
ES2187276B1 (es) * 2001-05-16 2004-08-01 Quimica Farmaceutica Bayer,S.A. Composiciones orales para el tratamiento de humanos obesos y no diabeticos.
US20050149304A1 (en) * 2001-06-27 2005-07-07 Fluidigm Corporation Object oriented microfluidic design method and system
US7075162B2 (en) * 2001-08-30 2006-07-11 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
SG106631A1 (en) * 2001-08-31 2004-10-29 Agency Science Tech & Res Liquid delivering device
US7134486B2 (en) * 2001-09-28 2006-11-14 The Board Of Trustees Of The Leeland Stanford Junior University Control of electrolysis gases in electroosmotic pump systems
US6942018B2 (en) 2001-09-28 2005-09-13 The Board Of Trustees Of The Leland Stanford Junior University Electroosmotic microchannel cooling system
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
WO2003031066A1 (en) 2001-10-11 2003-04-17 California Institute Of Technology Devices utilizing self-assembled gel and method of manufacture
TW498933U (en) * 2001-10-18 2002-08-11 Ind Tech Res Inst Negative pressure balance maintaining device for micropump
US8440093B1 (en) 2001-10-26 2013-05-14 Fuidigm Corporation Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels
US7691333B2 (en) 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
US7118910B2 (en) 2001-11-30 2006-10-10 Fluidigm Corporation Microfluidic device and methods of using same
US6921253B2 (en) * 2001-12-21 2005-07-26 Cornell Research Foundation, Inc. Dual chamber micropump having checkvalves
ATE429482T1 (de) * 2001-12-31 2009-05-15 Trinity College Dublin Vorrichtung zur durchführung von auf zellen basierende analyseverfahren
US6606251B1 (en) * 2002-02-07 2003-08-12 Cooligy Inc. Power conditioning module
US20030180711A1 (en) * 2002-02-21 2003-09-25 Turner Stephen W. Three dimensional microfluidic device having porous membrane
US7033148B2 (en) * 2002-03-13 2006-04-25 Cytonome, Inc. Electromagnetic pump
EP2666849A3 (en) 2002-04-01 2014-05-28 Fluidigm Corporation Microfluidic particle-analysis systems
US7312085B2 (en) 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
US20070026528A1 (en) * 2002-05-30 2007-02-01 Delucas Lawrence J Method for screening crystallization conditions in solution crystal growth
US7867193B2 (en) * 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US20050238506A1 (en) * 2002-06-21 2005-10-27 The Charles Stark Draper Laboratory, Inc. Electromagnetically-actuated microfluidic flow regulators and related applications
US6827559B2 (en) * 2002-07-01 2004-12-07 Ventaira Pharmaceuticals, Inc. Piezoelectric micropump with diaphragm and valves
US20040007672A1 (en) * 2002-07-10 2004-01-15 Delucas Lawrence J. Method for distinguishing between biomolecule and non-biomolecule crystals
US6874999B2 (en) * 2002-08-15 2005-04-05 Motorola, Inc. Micropumps with passive check valves
AU2003270882A1 (en) 2002-09-23 2004-05-04 Cooligy, Inc. Micro-fabricated electrokinetic pump with on-frit electrode
US6881039B2 (en) * 2002-09-23 2005-04-19 Cooligy, Inc. Micro-fabricated electrokinetic pump
US8220494B2 (en) * 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
EP1551753A2 (en) * 2002-09-25 2005-07-13 California Institute Of Technology Microfluidic large scale integration
EP1546412B1 (en) 2002-10-02 2014-05-21 California Institute Of Technology Microfluidic nucleic acid analysis
KR20040036173A (ko) * 2002-10-23 2004-04-30 김종원 피에조 엑츄에이터로 구동되는 마이크로 압축기
KR100483079B1 (ko) * 2002-10-23 2005-04-14 재단법인서울대학교산학협력재단 능동형 마이크로 냉각기
US6986382B2 (en) * 2002-11-01 2006-01-17 Cooligy Inc. Interwoven manifolds for pressure drop reduction in microchannel heat exchangers
DE10393618T5 (de) * 2002-11-01 2005-11-17 Cooligy, Inc., Mountain View Verfahren und Vorrichtung zum Erreichen von Temperaturgleichförmigkeit und zur Kühlung von Überhitzungspunkten in einer Wärmeerzeugungsvorrichtung
JP2006522463A (ja) 2002-11-01 2006-09-28 クーリギー インコーポレイテッド 流体により冷却される超小型熱交換のための最適なスプレッダシステム、装置及び方法
US7000684B2 (en) 2002-11-01 2006-02-21 Cooligy, Inc. Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device
US7017654B2 (en) 2003-03-17 2006-03-28 Cooligy, Inc. Apparatus and method of forming channels in a heat-exchanging device
US7476363B2 (en) 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
EP2340890B1 (en) * 2003-04-03 2016-10-19 Fluidigm Corporation Method of performimg digital PCR
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
WO2004094020A2 (en) * 2003-04-17 2004-11-04 Fluidigm Corporation Crystal growth devices and systems, and methods for using same
AU2004240944A1 (en) 2003-05-20 2004-12-02 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
US7316543B2 (en) * 2003-05-30 2008-01-08 The Board Of Trustees Of The Leland Stanford Junior University Electroosmotic micropump with planar features
US7591302B1 (en) 2003-07-23 2009-09-22 Cooligy Inc. Pump and fan control concepts in a cooling system
US7021369B2 (en) * 2003-07-23 2006-04-04 Cooligy, Inc. Hermetic closed loop fluid system
SG145697A1 (en) * 2003-07-28 2008-09-29 Fluidigm Corp Image processing method and system for microfluidic devices
US7231839B2 (en) * 2003-08-11 2007-06-19 The Board Of Trustees Of The Leland Stanford Junior University Electroosmotic micropumps with applications to fluid dispensing and field sampling
US7413712B2 (en) 2003-08-11 2008-08-19 California Institute Of Technology Microfluidic rotary flow reactor matrix
US7029951B2 (en) * 2003-09-12 2006-04-18 International Business Machines Corporation Cooling system for a semiconductor device and method of fabricating same
EP1515043B1 (en) * 2003-09-12 2006-11-22 Samsung Electronics Co., Ltd. Diaphram pump for cooling air
US7284966B2 (en) * 2003-10-01 2007-10-23 Agency For Science, Technology & Research Micro-pump
KR100519970B1 (ko) * 2003-10-07 2005-10-13 삼성전자주식회사 밸브리스 마이크로 공기공급장치
US7169560B2 (en) 2003-11-12 2007-01-30 Helicos Biosciences Corporation Short cycle methods for sequencing polynucleotides
US7407799B2 (en) 2004-01-16 2008-08-05 California Institute Of Technology Microfluidic chemostat
MXPA06008399A (es) * 2004-01-25 2008-03-07 Fluidigm Corp Dispositivos formadores de cristal y sistemas y metodos para hacer y utilizar los mismos.
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
CA2557177A1 (en) 2004-02-19 2005-09-01 Stephen Quake Methods and kits for analyzing polynucleotide sequences
DE102004011726A1 (de) * 2004-03-05 2005-09-22 Ing. Erich Pfeiffer Gmbh Dosiervorrichtung
US7484940B2 (en) * 2004-04-28 2009-02-03 Kinetic Ceramics, Inc. Piezoelectric fluid pump
US7476734B2 (en) 2005-12-06 2009-01-13 Helicos Biosciences Corporation Nucleotide analogs
JP2008512084A (ja) 2004-05-25 2008-04-24 ヘリコス バイオサイエンシーズ コーポレイション 核酸の配列決定のための方法およびデバイス
US20060024751A1 (en) * 2004-06-03 2006-02-02 Fluidigm Corporation Scale-up methods and systems for performing the same
US7104767B2 (en) * 2004-07-19 2006-09-12 Wilson Greatbatch Technologies, Inc. Diaphragm pump for medical applications
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7220549B2 (en) 2004-12-30 2007-05-22 Helicos Biosciences Corporation Stabilizing a nucleic acid for nucleic acid sequencing
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7482120B2 (en) 2005-01-28 2009-01-27 Helicos Biosciences Corporation Methods and compositions for improving fidelity in a nucleic acid synthesis reaction
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
JP4668635B2 (ja) * 2005-02-02 2011-04-13 積水化学工業株式会社 マイクロバルブの流量調節方法
US20060194724A1 (en) * 2005-02-25 2006-08-31 Whitehurst Todd K Methods and systems for nerve regeneration
JP4887652B2 (ja) * 2005-04-21 2012-02-29 ソニー株式会社 噴流発生装置及び電子機器
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7666593B2 (en) 2005-08-26 2010-02-23 Helicos Biosciences Corporation Single molecule sequencing of captured nucleic acids
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
WO2007070642A2 (en) * 2005-12-15 2007-06-21 Helicos Biosciences Corporation Methods for increasing accuracy of nucleic acid sequencing
US20070140875A1 (en) * 2005-12-16 2007-06-21 Green James S Piezoelectric pump
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US7397546B2 (en) * 2006-03-08 2008-07-08 Helicos Biosciences Corporation Systems and methods for reducing detected intensity non-uniformity in a laser beam
US20080309926A1 (en) * 2006-03-08 2008-12-18 Aaron Weber Systems and methods for reducing detected intensity non uniformity in a laser beam
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
US8157001B2 (en) 2006-03-30 2012-04-17 Cooligy Inc. Integrated liquid to air conduction module
US7715194B2 (en) 2006-04-11 2010-05-11 Cooligy Inc. Methodology of cooling multiple heat sources in a personal computer through the use of multiple fluid-based heat exchanging loops coupled via modular bus-type heat exchangers
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US8202267B2 (en) * 2006-10-10 2012-06-19 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US20080161754A1 (en) * 2006-12-29 2008-07-03 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US9046192B2 (en) 2007-01-31 2015-06-02 The Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
US20080186801A1 (en) * 2007-02-06 2008-08-07 Qisda Corporation Bubble micro-pump and two-way fluid-driving device, particle-sorting device, fluid-mixing device, ring-shaped fluid-mixing device and compound-type fluid-mixing device using the same
WO2009052842A1 (de) * 2007-10-22 2009-04-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Membranpumpe
US8708961B2 (en) 2008-01-28 2014-04-29 Medsolve Technologies, Inc. Apparatus for infusing liquid to a body
US8250877B2 (en) 2008-03-10 2012-08-28 Cooligy Inc. Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
US9297571B1 (en) 2008-03-10 2016-03-29 Liebert Corporation Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
JP5169693B2 (ja) * 2008-09-29 2013-03-27 株式会社村田製作所 圧電ポンプ
CN102165193B (zh) * 2008-09-29 2014-07-16 株式会社村田制作所 压电泵
JP2012506279A (ja) 2008-10-22 2012-03-15 デビオテック ソシエテ アノニム ポンプ機能不全検出用の一体型圧力センサを有する微小電気機械流体ポンプ
EP2333340A1 (fr) * 2009-12-07 2011-06-15 Debiotech S.A. Elément flexible pour micro-pompe
KR101851117B1 (ko) 2010-01-29 2018-04-23 마이크로닉스 인코포레이티드. 샘플-투-앤서 마이크로유체 카트리지
WO2011107162A1 (en) 2010-03-05 2011-09-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve
US20110223253A1 (en) * 2010-03-15 2011-09-15 Artimplant Ab Physically stabilized biodegradable osteochondral implant and methods for its manufacture and implantation
DE102010040169A1 (de) 2010-09-02 2012-03-08 Robert Bosch Gmbh Vorrichtung zur Drosselung einer Fluidströmung und korrespondierende Kolbenpumpe zur Förderung von Fluiden
EP2469089A1 (en) 2010-12-23 2012-06-27 Debiotech S.A. Electronic control method and system for a piezo-electric pump
JP6162047B2 (ja) 2011-02-02 2017-07-12 ザ チャールズ スターク ドレイパー ラボラトリー インク 薬物送達装置
WO2012176171A1 (en) 2011-06-23 2012-12-27 Debiotech S.A. Vented reservoir for medical pump
EP2543404A1 (en) 2011-07-04 2013-01-09 Debiotech S.A. Method and system for detecting malfunction of a mems micropump
EP2551523A1 (en) 2011-07-29 2013-01-30 Debiotech S.A. Method and device for accurate and low-consumption mems micropump actuation
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9867929B2 (en) * 2012-08-15 2018-01-16 Becton, Dickinson And Company Pump engine with metering system for dispensing liquid medication
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
WO2014100725A1 (en) 2012-12-21 2014-06-26 Micronics, Inc. Portable fluorescence detection system and microassay cartridge
US10065186B2 (en) 2012-12-21 2018-09-04 Micronics, Inc. Fluidic circuits and related manufacturing methods
EP3549674B1 (en) 2012-12-21 2020-08-12 PerkinElmer Health Sciences, Inc. Low elasticity films for microfluidic use
CN104169583B (zh) 2012-12-21 2017-03-01 弗劳恩霍夫应用研究促进协会 包括安全阀布置的泵布置结构
US9903508B2 (en) 2013-03-07 2018-02-27 Debiotech S.A. Microfluidic valve having improved tolerance to particles
JP6484222B2 (ja) 2013-05-07 2019-03-13 マイクロニクス， インコーポレイテッド 核酸の調製および分析のためのデバイス
JP6472788B2 (ja) 2013-05-07 2019-02-20 マイクロニクス， インコーポレイテッド 粘土鉱物およびアルカリ性溶液を使用して核酸含有試料を調製するための方法
EP2994750B1 (en) 2013-05-07 2020-08-12 PerkinElmer Health Sciences, Inc. Microfluidic devices and methods for performing serum separation and blood cross-matching
TWI539076B (zh) * 2013-09-25 2016-06-21 馬小康 腔體分離式薄膜幫浦
EP2868970B1 (en) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regulating device
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
WO2018046078A1 (en) * 2016-09-07 2018-03-15 Robert Bosch Gmbh Micropumps
WO2018060505A1 (en) * 2016-09-29 2018-04-05 Koninklijke Philips N.V. Piezoelectric membrane pump for the infusion of liquids
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
DK3534002T3 (da) * 2016-10-27 2021-04-06 Nitto Kohki Co Væskepumpe
TWI625462B (zh) * 2017-01-05 2018-06-01 研能科技股份有限公司 微型氣壓動力裝置
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
CN111151311B (zh) * 2018-11-07 2021-10-12 研能科技股份有限公司 微流道结构的制造方法
JP2022553270A (ja) * 2019-10-18 2022-12-22 ヒールテル・（グアンジョウ）・メディカル・テクノロジー・カンパニー・リミテッド 流体を注入するためのシステム及び方法
CN111692069B (zh) * 2020-06-19 2021-04-09 燕山大学 一种驱动与阀控融合式流体驱动装置
NL2026780B1 (en) 2020-10-27 2022-06-21 Univ Delft Tech Precise fluid manipulation in the femtolitre range
CN113464410B (zh) * 2021-08-19 2022-03-22 浙江大学 一种压力无级可调的大流量压电泵
WO2023158618A1 (en) * 2022-02-17 2023-08-24 Aita Bio Inc. Mems micropump with piezoelectric active valve that remains closed following micropump power loss

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2933799C3 (de) * 1979-08-18 1982-05-19 Schaldach, Max, Prof. Dr.-Ing., 8520 Erlangen Vorrichtung zur Förderung und Dosierung kleinster Flüssigkeitsmengen
FR2516606B1 (fr) * 1981-11-19 1986-05-16 Bessman Samuel Pompe a diaphragme a commande piezo-electrique, notamment micro-pompe pour implantation dans le corps humain
DE3320443C2 (de) * 1983-06-06 1994-08-18 Siemens Ag Flüssigkeitspumpe
ES2061042T3 (es) * 1989-06-14 1994-12-01 Westonbridge Int Ltd Microbomba perfeccionada.
ATE125605T1 (de) * 1990-08-31 1995-08-15 Westonbridge Int Ltd Ventil mit positionsdetektor und damit versehener mikropumpe.
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump

Also Published As

Publication number Publication date
US5759014A (en) 1998-06-02
WO1995019502A1 (fr) 1995-07-20
EP0739451A1 (fr) 1996-10-30
JP3948493B2 (ja) 2007-07-25
JPH09512075A (ja) 1997-12-02
CH689836A5 (fr) 1999-12-15
AU679311B2 (en) 1997-06-26
EP0739451B1 (fr) 1997-08-06
DE69500529T2 (de) 1998-03-12
AU1326395A (en) 1995-08-01
CA2181084A1 (en) 1995-07-20
CA2181084C (en) 2004-09-14
DE69500529D1 (de) 1997-09-11

Similar Documents

Publication Publication Date Title
ES2107908T3 (es) Microbomba.
ES2300235T3 (es) Irrigador bucal
ES2665977T3 (es) Supresión de sonido de un compresor
ATE257038T1 (de) Spenderpumpen
DK81388D0 (da) Pumpe til hjerte-lunge-genoplivelse
ATE505652T1 (de) Verdichtungssystem
AR241092A2 (es) "mejoras en bombas gerotor".
BR0316588A (pt) Aparelho para enchimento de cartuchos de injeção
AR002123A1 (es) Dispositivo para bombeo de sangre de forma tubular, con valvulas activas gobernado por vacio.
DK1380351T3 (da) Suge- og trykpumpe med antibakteriel anordning
BRPI0505276A (pt) unidade de energia hidráulica elétrica e método de usar a mesma
ES2104164T3 (es) Compresor de tornillo rotativo.
BRPI0505902A (pt) compressor compacto
BR0313347A (pt) Bomba operada por meio de fluido
ES2109503T3 (es) Maquina de piston.
ES2125631T3 (es) Dispositivo de accionamiento para organo de retraccion de cinturon de seguridad.
AR044416A1 (es) Disposicion para alivio de presion de bomba
BR0200016A (pt) Bomba de combustìvel com saìda para vapor
CO5060561A1 (es) Bomba de engranajes de alta eficiencia para bombear fluidos altamente viscosos
ES2089071T3 (es) Dispositivo de descarga para medios.
ATE378442T1 (de) Materialverdampfungskammer mit differentialvakuumpumpe
ES2117621T1 (es) Bomba accionada por motor electrico.
IT1252200B (it) Testa di cilindro di un compressore alternativo ermetico
ES2075769T3 (es) Bomba para pruebas de presion.
GB2004331A (en) Peristaltic pumps

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 739451

Country of ref document: ES