ATE218194T1 - Mikroejektionspumpe - Google Patents

Mikroejektionspumpe

Info

Publication number
ATE218194T1
ATE218194T1 AT97951842T AT97951842T ATE218194T1 AT E218194 T1 ATE218194 T1 AT E218194T1 AT 97951842 T AT97951842 T AT 97951842T AT 97951842 T AT97951842 T AT 97951842T AT E218194 T1 ATE218194 T1 AT E218194T1
Authority
AT
Austria
Prior art keywords
pump
chamber
pump chamber
silicon
designed
Prior art date
Application number
AT97951842T
Other languages
English (en)
Inventor
Steffen Howitz
Mario Buerger
Thomas Wegener
Thomas Gehring
Original Assignee
Gesim Ges Fuer Silizium Mikros
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7814406&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE218194(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Gesim Ges Fuer Silizium Mikros filed Critical Gesim Ges Fuer Silizium Mikros
Application granted granted Critical
Publication of ATE218194T1 publication Critical patent/ATE218194T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08—Cooling; Heating; Preventing freezing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
AT97951842T 1996-12-11 1997-12-11 Mikroejektionspumpe ATE218194T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19651568 1996-12-11
PCT/DE1997/002874 WO1998026179A1 (de) 1996-12-11 1997-12-11 Mikroejektionspumpe

Publications (1)

Publication Number Publication Date
ATE218194T1 true ATE218194T1 (de) 2002-06-15

Family

ID=7814406

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97951842T ATE218194T1 (de) 1996-12-11 1997-12-11 Mikroejektionspumpe

Country Status (6)

Country Link
US (1) US6179584B1 (de)
EP (1) EP0956449B1 (de)
JP (1) JP2001505640A (de)
AT (1) ATE218194T1 (de)
DE (2) DE29724735U1 (de)
WO (1) WO1998026179A1 (de)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7285422B1 (en) 1997-01-23 2007-10-23 Sequenom, Inc. Systems and methods for preparing and analyzing low volume analyte array elements
CA2270132A1 (en) 1996-11-06 1998-05-14 Sequenom, Inc. Dna diagnostics based on mass spectrometry
RU2143596C1 (ru) * 1998-09-08 1999-12-27 Попов Сергей Анатольевич Жидкостно-газовый эжектор
DE19913076A1 (de) 1999-03-23 2000-10-19 Hahn Schickard Ges Vorrichtung und Verfahren zum Aufbringen von Mikrotröpfchen auf ein Substrat
EP1128075A3 (de) * 2000-02-24 2003-10-29 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Mikropumpe und/oder Mikromischer mit integriertem Sensor und Verfahren zu dessen Herstellung
AUPQ669000A0 (en) * 2000-04-04 2000-05-04 Cooke, Richard Screen display device
US6530755B2 (en) 2000-04-07 2003-03-11 Tecan Trading Ag Micropump
WO2002022358A1 (en) * 2000-09-18 2002-03-21 Par Technologies, Llc. Piezoelectric actuator and pump using same
US7198250B2 (en) * 2000-09-18 2007-04-03 Par Technologies, Llc Piezoelectric actuator and pump using same
US20020142483A1 (en) 2000-10-30 2002-10-03 Sequenom, Inc. Method and apparatus for delivery of submicroliter volumes onto a substrate
US20040073175A1 (en) * 2002-01-07 2004-04-15 Jacobson James D. Infusion system
US6869275B2 (en) * 2002-02-14 2005-03-22 Philip Morris Usa Inc. Piezoelectrically driven fluids pump and piezoelectric fluid valve
US20030163111A1 (en) * 2002-02-26 2003-08-28 Daellenbach Keith K. End effector for needle-free injection system
FR2839662B1 (fr) * 2002-05-16 2005-12-02 Centre Nat Rech Scient Dispositif de depot localise d'au moins une solution biologique
US8080221B2 (en) 2002-08-05 2011-12-20 Palo Alto Research Center Incorporated Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
US7241420B2 (en) 2002-08-05 2007-07-10 Palo Alto Research Center Incorporated Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
KR20060019518A (ko) * 2003-04-21 2006-03-03 스트라타젠트 라이프 사이언시즈 반복적 마이크로제트 약물 전달 장치 및 방법
FR2861814B1 (fr) * 2003-11-04 2006-02-03 Cit Alcatel Dispositif de pompage par micropompes a transpiration thermique
WO2005060593A2 (en) * 2003-12-10 2005-07-07 Purdue Research Foundation Micropump for electronics cooling
US7312554B2 (en) * 2004-04-02 2007-12-25 Adaptivenergy, Llc Piezoelectric devices and methods and circuits for driving same
US7290993B2 (en) * 2004-04-02 2007-11-06 Adaptivenergy Llc Piezoelectric devices and methods and circuits for driving same
US7287965B2 (en) * 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
US20050225201A1 (en) * 2004-04-02 2005-10-13 Par Technologies, Llc Piezoelectric devices and methods and circuits for driving same
CN1583541B (zh) * 2004-05-27 2010-09-29 哈尔滨工程大学 采用多层驱动膜结构的微驱动器及其制作方法
US7104767B2 (en) * 2004-07-19 2006-09-12 Wilson Greatbatch Technologies, Inc. Diaphragm pump for medical applications
JP4626224B2 (ja) * 2004-08-27 2011-02-02 富士ゼロックス株式会社 マイクロポンプ
JP4645159B2 (ja) * 2004-11-02 2011-03-09 コニカミノルタホールディングス株式会社 マイクロポンプ
US20060147329A1 (en) * 2004-12-30 2006-07-06 Tanner Edward T Active valve and active valving for pump
US7258533B2 (en) * 2004-12-30 2007-08-21 Adaptivenergy, Llc Method and apparatus for scavenging energy during pump operation
US20060232171A1 (en) * 2005-04-13 2006-10-19 Par Technologies, Llc Piezoelectric diaphragm assembly with conductors on flexible film
US20060232166A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
JP3896141B2 (ja) * 2005-06-28 2007-03-22 シャープ株式会社 マイクロポンプおよびマイクロポンプシステム
DE202006010293U1 (de) * 2005-07-22 2006-08-31 Tecan Trading Ag Pipettiergerät mit Computerprogrammprodukt zum Akzeptieren oder Verwerfen von pipettierten Flüssigkeitsproben
JP4779126B2 (ja) * 2005-07-27 2011-09-28 国立大学法人九州工業大学 バルブレスマイクロポンプ
US8591457B2 (en) * 2005-08-10 2013-11-26 Alza Corporation Method for making a needle-free jet injection drug delivery device
US20080150659A1 (en) * 2005-08-31 2008-06-26 Matsushita Electric Works, Ltd. Relay Device Using Conductive Fluid
US20070075286A1 (en) * 2005-10-04 2007-04-05 Par Technologies, Llc Piezoelectric valves drive
US20070129681A1 (en) * 2005-11-01 2007-06-07 Par Technologies, Llc Piezoelectric actuation of piston within dispensing chamber
WO2007061610A1 (en) * 2005-11-18 2007-05-31 Par Technologies, Llc Human powered piezoelectric power generating device
KR100804686B1 (ko) 2006-11-23 2008-02-18 한국에너지기술연구원 기포 동력 마이크로 펌프
US20080246367A1 (en) * 2006-12-29 2008-10-09 Adaptivenergy, Llc Tuned laminated piezoelectric elements and methods of tuning same
US20090180931A1 (en) 2007-09-17 2009-07-16 Sequenom, Inc. Integrated robotic sample transfer device
US8040022B2 (en) * 2007-12-12 2011-10-18 Aprolase Development Co., Llc Forced vibration piezo generator and piezo actuator
US20100211002A1 (en) * 2009-02-18 2010-08-19 Davis David L Electromagnetic infusion pump with integral flow monitor
US8197235B2 (en) * 2009-02-18 2012-06-12 Davis David L Infusion pump with integrated permanent magnet
US8353864B2 (en) * 2009-02-18 2013-01-15 Davis David L Low cost disposable infusion pump
DE102009030395A1 (de) 2009-06-25 2011-05-26 Tecan Trading Ag Differnziertes chromatographisches Analysenverfahren zur Kompensation von Varianzen in der signalerzeugenden Einheit bei quantifizierenden chromatographischen Analysen
US8579414B2 (en) 2009-12-23 2013-11-12 Xerox Corporation Self-assembling structures for electrostatic extraction of pigments from liquid inks for marking
KR101153613B1 (ko) * 2010-05-25 2012-06-18 삼성전기주식회사 마이크로 이젝터 및 그 제조방법
DK2665557T3 (da) 2011-01-21 2020-04-06 Biodot Inc Piezoelektrisk dispenser med en langsgående transducer og udskifteligt kapillærrør
WO2016010748A1 (en) 2014-07-14 2016-01-21 Li-Cor, Inc. Analyte separator with electrohydrodynamic taylor cone jet blotter
AU2017213725B2 (en) 2016-02-01 2021-12-23 Li-Cor, Inc. Capillary electrophoresis inkjet dispensing
DE102016002665A1 (de) 2016-03-08 2017-09-14 Hauni Maschinenbau Gmbh Elektronisches Zigarettenprodukt und Kartusche für ein elektronisches Zigarettenprodukt
EP3497433A1 (de) 2016-08-08 2019-06-19 Li-Cor, Inc. Multihülsenfluss und on-chip-abschlusselektrode für mikrofluidisches direkt-blotting
US11241689B2 (en) 2016-08-08 2022-02-08 Li-Cor, Inc. Microchip electrophoresis inkjet dispensing

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4152098A (en) * 1977-01-03 1979-05-01 Clark Ivan P Micropump
DE69026765T2 (de) * 1989-07-11 1996-10-24 Ngk Insulators Ltd Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
US5171132A (en) * 1989-12-27 1992-12-15 Seiko Epson Corporation Two-valve thin plate micropump
US5094594A (en) 1990-04-23 1992-03-10 Genomyx, Incorporated Piezoelectric pumping device
EP0465229B1 (de) * 1990-07-02 1994-12-28 Seiko Epson Corporation Mikropumpe und Verfahren zur Herstellung einer Mikropumpe
ES2069896T3 (es) * 1990-07-10 1995-05-16 Westonbridge Int Ltd Valvula, metodo para producir dicha valvula y microbomba que incorpora dicha valvula.
SE508435C2 (sv) * 1993-02-23 1998-10-05 Erik Stemme Förträngningspump av membranpumptyp
SE501139C2 (sv) * 1993-04-08 1994-11-21 Sem Ab Anordning vid fluidpump av membrantyp
US5659171A (en) * 1993-09-22 1997-08-19 Northrop Grumman Corporation Micro-miniature diaphragm pump for the low pressure pumping of gases
CH689836A5 (fr) * 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropompe.
DE4402119C2 (de) * 1994-01-25 1998-07-23 Karlsruhe Forschzent Verfahren zur Herstellung von Mikromembranpumpen
DE4422743A1 (de) * 1994-06-29 1996-01-04 Torsten Gerlach Mikropumpe
US5856174A (en) * 1995-06-29 1999-01-05 Affymetrix, Inc. Integrated nucleic acid diagnostic device
EP0821764B1 (de) * 1995-09-20 2001-12-12 Koninklijke Philips Electronics N.V. Pumpe
US5840062A (en) * 1995-11-08 1998-11-24 Gumaste; Anand V. Solid state fluid delivery system
US6054277A (en) * 1996-05-08 2000-04-25 Regents Of The University Of Minnesota Integrated microchip genetic testing system
US5779868A (en) * 1996-06-28 1998-07-14 Caliper Technologies Corporation Electropipettor and compensation means for electrophoretic bias
US5871336A (en) * 1996-07-25 1999-02-16 Northrop Grumman Corporation Thermal transpiration driven vacuum pump
DE19720482C5 (de) * 1997-05-16 2006-01-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikromembranpumpe

Also Published As

Publication number Publication date
DE59707378D1 (de) 2002-07-04
WO1998026179A1 (de) 1998-06-18
EP0956449A1 (de) 1999-11-17
EP0956449B1 (de) 2002-05-29
JP2001505640A (ja) 2001-04-24
US6179584B1 (en) 2001-01-30
DE29724735U1 (de) 2003-11-13

Similar Documents

Publication Publication Date Title
DE59707378D1 (de) Mikroejektionspumpe
SG169226A1 (en) Water treatment apparatus
ES2182911T3 (es) Metodo y aparato para incrementar el caudal de un liquido a traves de un orificio.
ATE191863T1 (de) Luftreinigungsgerät
GB2318308A (en) Separator
ES2111181T3 (es) Metodos y aparatos de compactacion.
DK0963168T3 (da) Renseanordning til en elektrisk barbermaskine
DE3876896D1 (de) Regelventileinrichtung.
DK0815041T3 (da) Dyse til forstøvningsapparat
DE69100769D1 (de) Herzunterstützungsvorrichtung.
GB9106574D0 (en) Improvements in or relating to material treatment apparatus
DE3661594D1 (en) Gas-treating device
MY104484A (en) Positive displacement pump
CO4650196A1 (es) Eyector de cabeza mezcladora
FI854650A0 (fi) Kopplingsstycke foer vattenbehandlingsanordning.
SE7802369L (sv) Genomstromningskanal for en vetska
SE8900113D0 (sv) Anordning foer omvandling av kinetisk energi till tryckenergi
NO960494D0 (no) Anordning for å tilveiebringe en singlettoksygenaktivert gasström
SE8901254D0 (sv) Energiomvandlingsanordning
MY104943A (en) Processing apparatus
ES2093351T3 (es) Conjunto inyector para bañera, para producir chorros de aire y/o de agua.
ATE188727T1 (de) Holzgaserzeuger
SE8500711L (sv) Spritsmunstycke for murbruk
DE59704583D1 (de) Luftfilter
RU93011294A (ru) Струйный насос

Legal Events

Date Code Title Description
RZN Patent revoked