JPH09275074A - アライメント方法 - Google Patents

アライメント方法

Info

Publication number
JPH09275074A
JPH09275074A JP9006469A JP646997A JPH09275074A JP H09275074 A JPH09275074 A JP H09275074A JP 9006469 A JP9006469 A JP 9006469A JP 646997 A JP646997 A JP 646997A JP H09275074 A JPH09275074 A JP H09275074A
Authority
JP
Japan
Prior art keywords
alignment
mark
alignment mark
field
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9006469A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09275074A5 (OSRAM
Inventor
Kei Nara
圭 奈良
Seiji Miyazaki
聖二 宮崎
Hideki Koitabashi
英樹 小板橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9006469A priority Critical patent/JPH09275074A/ja
Publication of JPH09275074A publication Critical patent/JPH09275074A/ja
Publication of JPH09275074A5 publication Critical patent/JPH09275074A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9006469A 1996-02-05 1997-01-17 アライメント方法 Pending JPH09275074A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9006469A JPH09275074A (ja) 1996-02-05 1997-01-17 アライメント方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1887296 1996-02-05
JP8-18872 1996-02-05
JP9006469A JPH09275074A (ja) 1996-02-05 1997-01-17 アライメント方法

Publications (2)

Publication Number Publication Date
JPH09275074A true JPH09275074A (ja) 1997-10-21
JPH09275074A5 JPH09275074A5 (OSRAM) 2004-12-24

Family

ID=26340619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9006469A Pending JPH09275074A (ja) 1996-02-05 1997-01-17 アライメント方法

Country Status (1)

Country Link
JP (1) JPH09275074A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009533702A (ja) * 2006-04-11 2009-09-17 マイクロニック レーザー システムズ アクチボラゲット 位置合わせ方法及びそのための装置
US8399832B2 (en) 2004-06-25 2013-03-19 Hitachi High-Technologies Scanning electron microscope and CD measurement calibration standard specimen
JP2015053404A (ja) * 2013-09-06 2015-03-19 キヤノン株式会社 計測装置、計測方法、リソグラフィ装置、及び物品の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8399832B2 (en) 2004-06-25 2013-03-19 Hitachi High-Technologies Scanning electron microscope and CD measurement calibration standard specimen
JP2009533702A (ja) * 2006-04-11 2009-09-17 マイクロニック レーザー システムズ アクチボラゲット 位置合わせ方法及びそのための装置
JP2015053404A (ja) * 2013-09-06 2015-03-19 キヤノン株式会社 計測装置、計測方法、リソグラフィ装置、及び物品の製造方法

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