JPH09219453A5 - - Google Patents
Info
- Publication number
- JPH09219453A5 JPH09219453A5 JP1996332895A JP33289596A JPH09219453A5 JP H09219453 A5 JPH09219453 A5 JP H09219453A5 JP 1996332895 A JP1996332895 A JP 1996332895A JP 33289596 A JP33289596 A JP 33289596A JP H09219453 A5 JPH09219453 A5 JP H09219453A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film made
- resin material
- silicide
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33289596A JP4209477B2 (ja) | 1995-11-27 | 1996-11-27 | 半導体装置の作製方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33263095 | 1995-11-27 | ||
| JP7-332630 | 1995-11-27 | ||
| JP34563195 | 1995-12-09 | ||
| JP7-345631 | 1995-12-09 | ||
| JP33289596A JP4209477B2 (ja) | 1995-11-27 | 1996-11-27 | 半導体装置の作製方法 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004233978A Division JP4209822B2 (ja) | 1995-11-27 | 2004-08-11 | 液晶表示装置の作製方法及びｅｌ表示装置の作製方法 |
| JP2008203838A Division JP4999799B2 (ja) | 1995-11-27 | 2008-08-07 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH09219453A JPH09219453A (ja) | 1997-08-19 |
| JPH09219453A5 true JPH09219453A5 (enExample) | 2004-11-18 |
| JP4209477B2 JP4209477B2 (ja) | 2009-01-14 |
Family
ID=27340552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33289596A Expired - Fee Related JP4209477B2 (ja) | 1995-11-27 | 1996-11-27 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4209477B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6583471B1 (en) * | 1999-06-02 | 2003-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having first and second insulating films |
| TWI269248B (en) | 2002-05-13 | 2006-12-21 | Semiconductor Energy Lab | Display device |
| KR100611148B1 (ko) | 2003-11-25 | 2006-08-09 | 삼성에스디아이 주식회사 | 박막트랜지스터, 그의 제조방법 및 이를 사용하는 유기전계발광소자 |
| JP6485024B2 (ja) * | 2014-12-10 | 2019-03-20 | 株式会社Ｊｏｌｅｄ | 薄膜トランジスタ基板の製造方法 |
| CN116154003A (zh) | 2015-11-20 | 2023-05-23 | 株式会社半导体能源研究所 | 半导体装置、包括该半导体装置的显示装置以及包括该半导体装置的电子设备 |
| TWI730017B (zh) | 2016-08-09 | 2021-06-11 | 日商半導體能源研究所股份有限公司 | 顯示裝置的製造方法、顯示裝置、顯示模組及電子裝置 |
-
1996
- 1996-11-27 JP JP33289596A patent/JP4209477B2/ja not_active Expired - Fee Related
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