JPH0830648B2 - 光学像コントラストを発生させる装置 - Google Patents

光学像コントラストを発生させる装置

Info

Publication number
JPH0830648B2
JPH0830648B2 JP1184856A JP18485689A JPH0830648B2 JP H0830648 B2 JPH0830648 B2 JP H0830648B2 JP 1184856 A JP1184856 A JP 1184856A JP 18485689 A JP18485689 A JP 18485689A JP H0830648 B2 JPH0830648 B2 JP H0830648B2
Authority
JP
Japan
Prior art keywords
grid
image
generating
contrast
optical image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1184856A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0280906A (ja
Inventor
ノイマン ブルクハルト
Original Assignee
ライカ インドゥストリーフェルヴァルツング ゲゼルシャフト ミット ベシュレンクテル ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ライカ インドゥストリーフェルヴァルツング ゲゼルシャフト ミット ベシュレンクテル ハフツング filed Critical ライカ インドゥストリーフェルヴァルツング ゲゼルシャフト ミット ベシュレンクテル ハフツング
Publication of JPH0280906A publication Critical patent/JPH0280906A/ja
Publication of JPH0830648B2 publication Critical patent/JPH0830648B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/60—Systems using moiré fringes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Holo Graphy (AREA)
  • Display Devices Of Pinball Game Machines (AREA)
JP1184856A 1988-08-03 1989-07-19 光学像コントラストを発生させる装置 Expired - Fee Related JPH0830648B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3826317.3 1988-08-03
DE3826317A DE3826317C1 (OSRAM) 1988-08-03 1988-08-03

Publications (2)

Publication Number Publication Date
JPH0280906A JPH0280906A (ja) 1990-03-22
JPH0830648B2 true JPH0830648B2 (ja) 1996-03-27

Family

ID=6360128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1184856A Expired - Fee Related JPH0830648B2 (ja) 1988-08-03 1989-07-19 光学像コントラストを発生させる装置

Country Status (5)

Country Link
US (1) US4963724A (OSRAM)
EP (1) EP0353495B1 (OSRAM)
JP (1) JPH0830648B2 (OSRAM)
AT (1) ATE105943T1 (OSRAM)
DE (2) DE3826317C1 (OSRAM)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099363A (en) * 1987-09-24 1992-03-24 Washington University Method and apparatus for slow aperture scanning in a single aperture confocal scanning EPI-illumination microscope
DE3826317C1 (OSRAM) 1988-08-03 1989-07-06 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar, De
DE4023292A1 (de) * 1990-07-21 1992-01-23 Leica Lasertechnik Anordnung zur simultanen konfokalen bilderzeugung
US5416574A (en) * 1991-03-29 1995-05-16 Optikos Corporation Automated optical measurement apparatus
US5280336A (en) * 1991-03-29 1994-01-18 Optikos Corporation Automated radius measurement apparatus
JPH0527714U (ja) * 1991-09-13 1993-04-09 横河電機株式会社 透過型共焦点用光スキヤナ
US5648652A (en) * 1993-09-22 1997-07-15 Asahi Kogaku Kogyo Kabushiki Kaisha Optical focus evaluation and focus adjustment methods, focus evaluation and focus adjustment apparatus, and screen apparatus
FR2716003B1 (fr) * 1994-02-04 1996-04-26 Biocom Sa Procédé d'analyse automatique d'éléments en faible concentration sur un support d'objets de faible occurrence et dispositif pour la mise en Óoeuvre dudit procédé.
JP3515162B2 (ja) * 1994-03-02 2004-04-05 株式会社ニデック 観察装置
JP3386269B2 (ja) * 1995-01-25 2003-03-17 株式会社ニュークリエイション 光学検査装置
DE19511937C2 (de) * 1995-03-31 1997-04-30 Zeiss Carl Jena Gmbh Konfokales Auflichtmikroskop
GB9704967D0 (en) * 1997-03-11 1997-04-30 Howard Foundation Flicker photometer
EP1207415B1 (en) * 1997-10-29 2006-08-30 MacAulay, Calum, E. Apparatus and methods relating to spatially light modulated microscopy
WO2000029876A2 (de) * 1998-11-16 2000-05-25 Leica Microsystems Heidelberg Gmbh Verfahren zum betrieb eines vorzugsweise konfokalen laser scanning mikroskops
AU1880700A (en) * 1999-12-23 2001-07-09 Harry Oldfield A microscope, a method for manufacturing a microscope and a method for operatinga microscope
DE10338472B4 (de) 2003-08-21 2020-08-06 Carl Zeiss Meditec Ag Optisches Abbildungssystem mit erweiterter Schärfentiefe
WO2007043314A1 (ja) * 2005-10-13 2007-04-19 Nikon Corporation 顕微鏡装置
DE102005061834B4 (de) 2005-12-23 2007-11-08 Ioss Intelligente Optische Sensoren & Systeme Gmbh Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche
DE102007047468A1 (de) * 2007-09-28 2009-04-02 Carl Zeiss Microimaging Gmbh Verfahren und Anordnung zur optischen Erfassung einer beleuchteten Probe
DE102007047465A1 (de) 2007-09-28 2009-04-02 Carl Zeiss Microimaging Gmbh Verfahren und Anordnung zur optischen Erfassung einer beleuchteten Probe
US20130083997A1 (en) * 2011-10-04 2013-04-04 Alcatel-Lucent Usa Inc. Temporally structured light
EP3301431B1 (en) 2016-09-29 2019-08-28 Roche Diagniostics GmbH Multi-chamber analysis device and method for analyzing
KR102632562B1 (ko) 2018-08-22 2024-02-02 삼성전자주식회사 Si 기반 검사 장치와 검사 방법, 및 그 검사 방법을 포함한 반도체 소자 제조방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4963724A (en) 1988-08-03 1990-10-16 Wild Leitz Gmbh Apparatus for producing an optical image contrast

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3853398A (en) * 1972-07-05 1974-12-10 Canon Kk Mask pattern printing device
DE2360197A1 (de) * 1973-12-03 1975-06-05 Ibm Deutschland Verfahren zur erhoehung der schaerfentiefe und/oder des aufloesungsvermoegens von lichtmikroskopen
US3926500A (en) * 1974-12-02 1975-12-16 Ibm Method of increasing the depth of focus and or the resolution of light microscopes by illuminating and imaging through a diaphragm with pinhole apertures
US4634880A (en) * 1982-04-19 1987-01-06 Siscan Systems, Inc. Confocal optical imaging system with improved signal-to-noise ratio
DD228089A1 (de) * 1984-11-01 1985-10-02 Zeiss Jena Veb Carl Anordnung zur bestimmung der oberflaechengestalt von objekten mittels moiretechnik

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4963724A (en) 1988-08-03 1990-10-16 Wild Leitz Gmbh Apparatus for producing an optical image contrast

Also Published As

Publication number Publication date
ATE105943T1 (de) 1994-06-15
US4963724A (en) 1990-10-16
JPH0280906A (ja) 1990-03-22
EP0353495A3 (de) 1991-08-28
EP0353495A2 (de) 1990-02-07
DE3826317C1 (OSRAM) 1989-07-06
EP0353495B1 (de) 1994-05-18
DE58907677D1 (de) 1994-06-23

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