JPH083000Y2 - ウエハ処理槽 - Google Patents

ウエハ処理槽

Info

Publication number
JPH083000Y2
JPH083000Y2 JP1988070423U JP7042388U JPH083000Y2 JP H083000 Y2 JPH083000 Y2 JP H083000Y2 JP 1988070423 U JP1988070423 U JP 1988070423U JP 7042388 U JP7042388 U JP 7042388U JP H083000 Y2 JPH083000 Y2 JP H083000Y2
Authority
JP
Japan
Prior art keywords
wafer
water
washing
cassette
processing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988070423U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01173933U (enrdf_load_stackoverflow
Inventor
秀明 竹内
順三 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1988070423U priority Critical patent/JPH083000Y2/ja
Publication of JPH01173933U publication Critical patent/JPH01173933U/ja
Application granted granted Critical
Publication of JPH083000Y2 publication Critical patent/JPH083000Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP1988070423U 1988-05-30 1988-05-30 ウエハ処理槽 Expired - Lifetime JPH083000Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988070423U JPH083000Y2 (ja) 1988-05-30 1988-05-30 ウエハ処理槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988070423U JPH083000Y2 (ja) 1988-05-30 1988-05-30 ウエハ処理槽

Publications (2)

Publication Number Publication Date
JPH01173933U JPH01173933U (enrdf_load_stackoverflow) 1989-12-11
JPH083000Y2 true JPH083000Y2 (ja) 1996-01-29

Family

ID=31295666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988070423U Expired - Lifetime JPH083000Y2 (ja) 1988-05-30 1988-05-30 ウエハ処理槽

Country Status (1)

Country Link
JP (1) JPH083000Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106136A (ja) * 1983-11-14 1985-06-11 Mitsubishi Electric Corp 薄板状体の洗浄装置

Also Published As

Publication number Publication date
JPH01173933U (enrdf_load_stackoverflow) 1989-12-11

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