JPH01173933U - - Google Patents

Info

Publication number
JPH01173933U
JPH01173933U JP7042388U JP7042388U JPH01173933U JP H01173933 U JPH01173933 U JP H01173933U JP 7042388 U JP7042388 U JP 7042388U JP 7042388 U JP7042388 U JP 7042388U JP H01173933 U JPH01173933 U JP H01173933U
Authority
JP
Japan
Prior art keywords
wafer processing
partition plate
tank
grooves parallel
processing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7042388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH083000Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988070423U priority Critical patent/JPH083000Y2/ja
Publication of JPH01173933U publication Critical patent/JPH01173933U/ja
Application granted granted Critical
Publication of JPH083000Y2 publication Critical patent/JPH083000Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP1988070423U 1988-05-30 1988-05-30 ウエハ処理槽 Expired - Lifetime JPH083000Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988070423U JPH083000Y2 (ja) 1988-05-30 1988-05-30 ウエハ処理槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988070423U JPH083000Y2 (ja) 1988-05-30 1988-05-30 ウエハ処理槽

Publications (2)

Publication Number Publication Date
JPH01173933U true JPH01173933U (enrdf_load_stackoverflow) 1989-12-11
JPH083000Y2 JPH083000Y2 (ja) 1996-01-29

Family

ID=31295666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988070423U Expired - Lifetime JPH083000Y2 (ja) 1988-05-30 1988-05-30 ウエハ処理槽

Country Status (1)

Country Link
JP (1) JPH083000Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106136A (ja) * 1983-11-14 1985-06-11 Mitsubishi Electric Corp 薄板状体の洗浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106136A (ja) * 1983-11-14 1985-06-11 Mitsubishi Electric Corp 薄板状体の洗浄装置

Also Published As

Publication number Publication date
JPH083000Y2 (ja) 1996-01-29

Similar Documents

Publication Publication Date Title
JPH01173933U (enrdf_load_stackoverflow)
JPH01171288U (enrdf_load_stackoverflow)
JPS6235536U (enrdf_load_stackoverflow)
JPH0162453U (enrdf_load_stackoverflow)
JPS61205480U (enrdf_load_stackoverflow)
JPH0217129U (enrdf_load_stackoverflow)
JPS61204699U (enrdf_load_stackoverflow)
JPS63135880U (enrdf_load_stackoverflow)
JPH033283U (enrdf_load_stackoverflow)
JPS62117933U (enrdf_load_stackoverflow)
JPS6362092U (enrdf_load_stackoverflow)
JPS6152990U (enrdf_load_stackoverflow)
JPH01117383U (enrdf_load_stackoverflow)
JPS61186014U (enrdf_load_stackoverflow)
JPS6240937U (enrdf_load_stackoverflow)
JPS6256655U (enrdf_load_stackoverflow)
JPH01133487U (enrdf_load_stackoverflow)
JPH0247982U (enrdf_load_stackoverflow)
JPS6348591U (enrdf_load_stackoverflow)
JPS62203359U (enrdf_load_stackoverflow)
JPH0425725U (enrdf_load_stackoverflow)
JPS6189392U (enrdf_load_stackoverflow)
JPS61164189U (enrdf_load_stackoverflow)
JPS626664U (enrdf_load_stackoverflow)
JPH03120034U (enrdf_load_stackoverflow)