JPH082617Y2 - プローブ構造 - Google Patents

プローブ構造

Info

Publication number
JPH082617Y2
JPH082617Y2 JP1990024968U JP2496890U JPH082617Y2 JP H082617 Y2 JPH082617 Y2 JP H082617Y2 JP 1990024968 U JP1990024968 U JP 1990024968U JP 2496890 U JP2496890 U JP 2496890U JP H082617 Y2 JPH082617 Y2 JP H082617Y2
Authority
JP
Japan
Prior art keywords
contact
measured
contact piece
substrate
transmission path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990024968U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03115866U (enrdf_load_stackoverflow
Inventor
克哉 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP1990024968U priority Critical patent/JPH082617Y2/ja
Publication of JPH03115866U publication Critical patent/JPH03115866U/ja
Application granted granted Critical
Publication of JPH082617Y2 publication Critical patent/JPH082617Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
JP1990024968U 1990-03-14 1990-03-14 プローブ構造 Expired - Fee Related JPH082617Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990024968U JPH082617Y2 (ja) 1990-03-14 1990-03-14 プローブ構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990024968U JPH082617Y2 (ja) 1990-03-14 1990-03-14 プローブ構造

Publications (2)

Publication Number Publication Date
JPH03115866U JPH03115866U (enrdf_load_stackoverflow) 1991-12-02
JPH082617Y2 true JPH082617Y2 (ja) 1996-01-29

Family

ID=31527914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990024968U Expired - Fee Related JPH082617Y2 (ja) 1990-03-14 1990-03-14 プローブ構造

Country Status (1)

Country Link
JP (1) JPH082617Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3693218B2 (ja) * 1998-03-09 2005-09-07 富士通株式会社 半導体装置用コンタクタ
TW200704937A (en) * 2005-03-08 2007-02-01 Tokyo Electron Ltd Method of forming connection pin, probe, connection pin, probe card, and method of producing probe card

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135162A (enrdf_load_stackoverflow) * 1973-05-02 1974-12-26
JP2544186B2 (ja) * 1988-08-16 1996-10-16 東京エレクトロン株式会社 プロ―ブ装置

Also Published As

Publication number Publication date
JPH03115866U (enrdf_load_stackoverflow) 1991-12-02

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Legal Events

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