JPH03115866U - - Google Patents

Info

Publication number
JPH03115866U
JPH03115866U JP2496890U JP2496890U JPH03115866U JP H03115866 U JPH03115866 U JP H03115866U JP 2496890 U JP2496890 U JP 2496890U JP 2496890 U JP2496890 U JP 2496890U JP H03115866 U JPH03115866 U JP H03115866U
Authority
JP
Japan
Prior art keywords
transmission path
signal transmission
contact piece
probe structure
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2496890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH082617Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990024968U priority Critical patent/JPH082617Y2/ja
Publication of JPH03115866U publication Critical patent/JPH03115866U/ja
Application granted granted Critical
Publication of JPH082617Y2 publication Critical patent/JPH082617Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990024968U 1990-03-14 1990-03-14 プローブ構造 Expired - Fee Related JPH082617Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990024968U JPH082617Y2 (ja) 1990-03-14 1990-03-14 プローブ構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990024968U JPH082617Y2 (ja) 1990-03-14 1990-03-14 プローブ構造

Publications (2)

Publication Number Publication Date
JPH03115866U true JPH03115866U (enrdf_load_stackoverflow) 1991-12-02
JPH082617Y2 JPH082617Y2 (ja) 1996-01-29

Family

ID=31527914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990024968U Expired - Fee Related JPH082617Y2 (ja) 1990-03-14 1990-03-14 プローブ構造

Country Status (1)

Country Link
JP (1) JPH082617Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11258269A (ja) * 1998-03-09 1999-09-24 Fujitsu Ltd 半導体装置用コンタクタ
WO2006095759A1 (ja) * 2005-03-08 2006-09-14 Tokyo Electron Limited 接続ピンの形成方法，プローブ，接続ピン，プローブカード及びプローブカードの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135162A (enrdf_load_stackoverflow) * 1973-05-02 1974-12-26
JPH0252257A (ja) * 1988-08-16 1990-02-21 Tokyo Electron Ltd プローブ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135162A (enrdf_load_stackoverflow) * 1973-05-02 1974-12-26
JPH0252257A (ja) * 1988-08-16 1990-02-21 Tokyo Electron Ltd プローブ装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11258269A (ja) * 1998-03-09 1999-09-24 Fujitsu Ltd 半導体装置用コンタクタ
WO2006095759A1 (ja) * 2005-03-08 2006-09-14 Tokyo Electron Limited 接続ピンの形成方法，プローブ，接続ピン，プローブカード及びプローブカードの製造方法
JPWO2006095759A1 (ja) * 2005-03-08 2008-08-14 東京エレクトロン株式会社 接続ピンの形成方法，プローブ，接続ピン，プローブカード及びプローブカードの製造方法
JP4588711B2 (ja) * 2005-03-08 2010-12-01 東京エレクトロン株式会社 接続ピンの形成方法，プローブ，接続ピン，プローブカード及びプローブカードの製造方法

Also Published As

Publication number Publication date
JPH082617Y2 (ja) 1996-01-29

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