JPH077114Y2 - 把持装置 - Google Patents
把持装置Info
- Publication number
- JPH077114Y2 JPH077114Y2 JP1989131408U JP13140889U JPH077114Y2 JP H077114 Y2 JPH077114 Y2 JP H077114Y2 JP 1989131408 U JP1989131408 U JP 1989131408U JP 13140889 U JP13140889 U JP 13140889U JP H077114 Y2 JPH077114 Y2 JP H077114Y2
- Authority
- JP
- Japan
- Prior art keywords
- arms
- article
- gripping
- center
- gripped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989131408U JPH077114Y2 (ja) | 1989-11-09 | 1989-11-09 | 把持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989131408U JPH077114Y2 (ja) | 1989-11-09 | 1989-11-09 | 把持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0368794U JPH0368794U (sk) | 1991-07-08 |
JPH077114Y2 true JPH077114Y2 (ja) | 1995-02-22 |
Family
ID=31678918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989131408U Expired - Lifetime JPH077114Y2 (ja) | 1989-11-09 | 1989-11-09 | 把持装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH077114Y2 (sk) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5570948B2 (ja) * | 2010-11-02 | 2014-08-13 | 株式会社アルバック | 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6367090U (sk) * | 1986-10-20 | 1988-05-06 |
-
1989
- 1989-11-09 JP JP1989131408U patent/JPH077114Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0368794U (sk) | 1991-07-08 |
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