JPH075629Y2 - 半導体ウエ−ハ熱処理装置 - Google Patents

半導体ウエ−ハ熱処理装置

Info

Publication number
JPH075629Y2
JPH075629Y2 JP1986044004U JP4400486U JPH075629Y2 JP H075629 Y2 JPH075629 Y2 JP H075629Y2 JP 1986044004 U JP1986044004 U JP 1986044004U JP 4400486 U JP4400486 U JP 4400486U JP H075629 Y2 JPH075629 Y2 JP H075629Y2
Authority
JP
Japan
Prior art keywords
wafer
support
points
heat treatment
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986044004U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62177031U (enExample
Inventor
平人 大村
Original Assignee
コマツ電子金属株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コマツ電子金属株式会社 filed Critical コマツ電子金属株式会社
Priority to JP1986044004U priority Critical patent/JPH075629Y2/ja
Publication of JPS62177031U publication Critical patent/JPS62177031U/ja
Application granted granted Critical
Publication of JPH075629Y2 publication Critical patent/JPH075629Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986044004U 1986-01-22 1986-03-27 半導体ウエ−ハ熱処理装置 Expired - Lifetime JPH075629Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986044004U JPH075629Y2 (ja) 1986-01-22 1986-03-27 半導体ウエ−ハ熱処理装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP662086 1986-01-22
JP61-6620 1986-01-22
JP1986044004U JPH075629Y2 (ja) 1986-01-22 1986-03-27 半導体ウエ−ハ熱処理装置

Publications (2)

Publication Number Publication Date
JPS62177031U JPS62177031U (enExample) 1987-11-10
JPH075629Y2 true JPH075629Y2 (ja) 1995-02-08

Family

ID=33031522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986044004U Expired - Lifetime JPH075629Y2 (ja) 1986-01-22 1986-03-27 半導体ウエ−ハ熱処理装置

Country Status (1)

Country Link
JP (1) JPH075629Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589579A (ja) * 1981-07-06 1983-01-19 Mitsubishi Electric Corp 電力可逆変換制御回路

Also Published As

Publication number Publication date
JPS62177031U (enExample) 1987-11-10

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