JPS62177031U - - Google Patents
Info
- Publication number
- JPS62177031U JPS62177031U JP4400486U JP4400486U JPS62177031U JP S62177031 U JPS62177031 U JP S62177031U JP 4400486 U JP4400486 U JP 4400486U JP 4400486 U JP4400486 U JP 4400486U JP S62177031 U JPS62177031 U JP S62177031U
- Authority
- JP
- Japan
- Prior art keywords
- support
- heat treatment
- treatment apparatus
- wafer
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986044004U JPH075629Y2 (ja) | 1986-01-22 | 1986-03-27 | 半導体ウエ−ハ熱処理装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61-6620 | 1986-01-22 | ||
| JP662086 | 1986-01-22 | ||
| JP1986044004U JPH075629Y2 (ja) | 1986-01-22 | 1986-03-27 | 半導体ウエ−ハ熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62177031U true JPS62177031U (enExample) | 1987-11-10 |
| JPH075629Y2 JPH075629Y2 (ja) | 1995-02-08 |
Family
ID=33031522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986044004U Expired - Lifetime JPH075629Y2 (ja) | 1986-01-22 | 1986-03-27 | 半導体ウエ−ハ熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH075629Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS589579A (ja) * | 1981-07-06 | 1983-01-19 | Mitsubishi Electric Corp | 電力可逆変換制御回路 |
-
1986
- 1986-03-27 JP JP1986044004U patent/JPH075629Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS589579A (ja) * | 1981-07-06 | 1983-01-19 | Mitsubishi Electric Corp | 電力可逆変換制御回路 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH075629Y2 (ja) | 1995-02-08 |