JPH0754999Y2 - 縦型プラズマ処理機のリアクター - Google Patents

縦型プラズマ処理機のリアクター

Info

Publication number
JPH0754999Y2
JPH0754999Y2 JP1989056559U JP5655989U JPH0754999Y2 JP H0754999 Y2 JPH0754999 Y2 JP H0754999Y2 JP 1989056559 U JP1989056559 U JP 1989056559U JP 5655989 U JP5655989 U JP 5655989U JP H0754999 Y2 JPH0754999 Y2 JP H0754999Y2
Authority
JP
Japan
Prior art keywords
reactor
plasma processing
heat radiation
skylight
cap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989056559U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02146426U (enExample
Inventor
義雄 岩城
Original Assignee
エム・シー・エレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エム・シー・エレクトロニクス株式会社 filed Critical エム・シー・エレクトロニクス株式会社
Priority to JP1989056559U priority Critical patent/JPH0754999Y2/ja
Publication of JPH02146426U publication Critical patent/JPH02146426U/ja
Application granted granted Critical
Publication of JPH0754999Y2 publication Critical patent/JPH0754999Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1989056559U 1989-05-17 1989-05-17 縦型プラズマ処理機のリアクター Expired - Lifetime JPH0754999Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989056559U JPH0754999Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のリアクター

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989056559U JPH0754999Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のリアクター

Publications (2)

Publication Number Publication Date
JPH02146426U JPH02146426U (enExample) 1990-12-12
JPH0754999Y2 true JPH0754999Y2 (ja) 1995-12-18

Family

ID=31580495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989056559U Expired - Lifetime JPH0754999Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のリアクター

Country Status (1)

Country Link
JP (1) JPH0754999Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860552A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS6226028U (enExample) * 1985-07-29 1987-02-17

Also Published As

Publication number Publication date
JPH02146426U (enExample) 1990-12-12

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