JPH0750679Y2 - サーモパイル型赤外線センサ - Google Patents

サーモパイル型赤外線センサ

Info

Publication number
JPH0750679Y2
JPH0750679Y2 JP1526390U JP1526390U JPH0750679Y2 JP H0750679 Y2 JPH0750679 Y2 JP H0750679Y2 JP 1526390 U JP1526390 U JP 1526390U JP 1526390 U JP1526390 U JP 1526390U JP H0750679 Y2 JPH0750679 Y2 JP H0750679Y2
Authority
JP
Japan
Prior art keywords
carbon film
hard carbon
infrared sensor
substrate
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1526390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03109028U (no
Inventor
建史 神谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP1526390U priority Critical patent/JPH0750679Y2/ja
Priority to DE4102524A priority patent/DE4102524C2/de
Priority to US07/648,134 priority patent/US5056929A/en
Publication of JPH03109028U publication Critical patent/JPH03109028U/ja
Application granted granted Critical
Publication of JPH0750679Y2 publication Critical patent/JPH0750679Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP1526390U 1990-01-30 1990-02-20 サーモパイル型赤外線センサ Expired - Lifetime JPH0750679Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1526390U JPH0750679Y2 (ja) 1990-02-20 1990-02-20 サーモパイル型赤外線センサ
DE4102524A DE4102524C2 (de) 1990-01-30 1991-01-29 Infrarotsensor
US07/648,134 US5056929A (en) 1990-01-30 1991-01-30 Temperature compensation type infrared sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1526390U JPH0750679Y2 (ja) 1990-02-20 1990-02-20 サーモパイル型赤外線センサ

Publications (2)

Publication Number Publication Date
JPH03109028U JPH03109028U (no) 1991-11-08
JPH0750679Y2 true JPH0750679Y2 (ja) 1995-11-15

Family

ID=31518581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1526390U Expired - Lifetime JPH0750679Y2 (ja) 1990-01-30 1990-02-20 サーモパイル型赤外線センサ

Country Status (1)

Country Link
JP (1) JPH0750679Y2 (no)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4978501B2 (ja) * 2008-02-14 2012-07-18 日本電気株式会社 熱型赤外線検出器及びその製造方法
WO2011136203A1 (ja) * 2010-04-26 2011-11-03 株式会社エッチ．エム．イー． 温度センサ素子及びこれを用いた放射温度計、並びに温度センサ素子の製造方法と、フォトレジスト膜を用いた多重層薄膜サーモパイル及びこれを用いた放射温度計、並びに多重層薄膜サーモパイルの製造方法

Also Published As

Publication number Publication date
JPH03109028U (no) 1991-11-08

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